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JP2009178815 |
To provide a micromachine apparatus capable of reducing the noise of an output signal by suppressing the vibration of the micromachine, and a method for manufacturing the same.The micromachine apparatus 1 includes: substrates 11, 12; a M...
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JP2009158485 |
To provide a micro machine (MEMS structural body) formed by a surface micro machine technology in which a structure for preventing a wire from becoming thinner and being broken is provided.In a structure where a wire (an upper auxiliary ...
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JP2009152196 |
To provide a MEMS switch where standoff voltage control is improved.The MEMS switches 20, 30, and 40 comprise a substrate 28; movable actuators 22, 32, and 132 combined with the substrate 28 and having first and second side faces; first ...
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JP2009152194 |
To provide a MEMS switch preventing inconvenient conduction modes and damages on the switch caused by an accidental operation.The MEMS switch includes a movable actuator 33 combined with the substrate, a substrate contact 35, a substrate...
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JP2009152195 |
To provide a MEMS switch capable of holding off an increasing amount of voltage while a self-operation is avoided.The MEMS switches (10, 30, 40) include: the substrate (12); first actuator members (21, 41) and second actuator members (22...
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JP2009140914 |
To prevent a hindrance against contact between an upper switch electrode and a lower switch electrode.The invention relates to a MEMS (microelectromechanical systems) switch having a substrate, a structural layer having a beam structure ...
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JP2009134993 |
To provide an MEMS switch in which downsizing is achieved and on/off of an electric current of a large capacity can be carried out surely.A silicon substrate 1 has a support part 2, and one end of a plate-like magnetic body 3 is fixed to...
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JP2009118627 |
To provide an actuator of an electrostatically or piezoelectrically driving type, capable of attaining stable driving characteristics by eliminating charge injection into a dielectric film or charge trap, thus solving problems with a dri...
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JP2009110974 |
To provide a microrelay excellent in sealability and capable of simplifying manufacturing processes.The microrelay includes a fixed substrate having fixed contacts and fixed electrodes, a cap substrate arranged in opposition to the fixed...
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JP2009107487 |
To provide an electric power steering device capable of ensuring a required amount of current even when a switch provided between a motor and a battery side is miniaturized.The switch 8 manufactured using fine electric mechanical system ...
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JP2009105031 |
To provide an electrostatic actuator, a microswitch, and an electronic equipment capable of stabilizing motions of a membrane.The electrostatic actuator comprises a suction electrode arranged on a substrate, the membrane arranged facing ...
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JP2009081149 |
To provide a micro-relay excellent in a sealing property and capable of simplifying manufacturing processes.The micro-relay is provided with a fixed substrate having stationary contacts and a stationary electrode, a cap substrate arrange...
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JP2009081963 |
To provide an electrostatic actuator suppressing vibration with a structure of a film body itself and to provide a micro-switch, an electronic apparatus, and to provide a method of manufacturing the electrostatic actuator.The electrostat...
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JP2009077479 |
To carry out quick switching control with a wireless switching controller that controls a switch by a radio signal.The wireless switching controller includes: an antenna for receiving radio signals; a SAW correlator that detects a signal...
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JP2009070670 |
To provide a semiconductor device capable of measuring simply and precisely the condition of an electrostatic actuator, and a control method of the electrostatic actuator.After impressing a hold voltage VHOLD on the upper electrode 14 an...
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JP2009054314 |
To suppress a twisting action by a suspension to prevent a collision between electrodes.This switch has a ground, a movable electrode, and a stationary conductor on the same surface. The ground also has a function serving as a fixed elec...
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JP2009048875 |
To provide an electrostatic drive actuator in which ratio of maximum capacity value to the minimum capacity value obtained by variations in a variable capacitance element can be further increased than a conventional one.The electrostatic...
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JP2009043537 |
To improve reliability and yield by preventing dust and moisture from adhering to an MEMS structure part.The MEMS switch 1 comprises: a means 6 generating an electric field in a predetermined space; a beam 4 positioned in the space, bent...
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JP2009032501 |
To provide an electric component reduced in a manufacturing time.This electric component 1A includes: a board 2; a functional element 7 operating by being mounted on the board 2; a first sealing body 8 separated from the functional eleme...
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JP2009033021 |
To provide a structure for preventing a carbon nanotube bundle from spreading.The structure includes a conductive film 12 formed in a base layer 10 and a plurality of carbon nanotube CNT bundles 20 an end of which is connected to the con...
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JP2009021227 |
To provide an electromechanical switch capable of being compatible with both low-voltage driving and high isolation.The electromechanical switch has a first beam 106 organizing a driving section, a second beam 107 as a contact section li...
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JP2009016161 |
To provide a high frequency switch in which stiction is effectively evaded.The switch has three sheets of electrodes arranged in which a through hole is provided on one inner sheet and the two outer sheets can be driven by an electrostat...
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JP2009009785 |
To enhance reliability by heightening adhesiveness of an insulating part and bridge electrodes.The MEMS switch 11 is provided with an insulation board 2, a signal wire 3 fitted and segmented on the insulation board 2, a bridge 4 provided...
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JP2009009884 |
To provide a manufacturing method of an MEMS switch capable of improving a switching characteristic and reliability; and an MEMS switch.A sacrifice layer arranged between a movable electrode 5 and an attraction electrode 4 constituting t...
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JP2008311225 |
To provide a high-reliability electromechanical element that avoids generation of an adhering phenomenon (stiction) making it difficult for contacts on the electromechanical element to separate from each other to achieve excellent low-vo...
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JP2008300284 |
To provide an electrostatic MEMS which can be driven at a low voltage with a simple structure, easy to be manufactured, such as a metal movable electrode obtained by integrating a high frequency movable electrode and a movable electrode ...
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JP2008296335 |
To provide a hollow sealing structure and a manufacturing method of the hollow sealing structure, which reduces a size of the hollow sealing structure and shortens time to remove sacrifice layers in it.The manufacturing method of the hol...
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JP2008300301 |
To reduce drive voltage without causing any specific troubles.A movable plate 12 is supported by a leaf spring portion 14 so that it can move up and down against a base board 11. Above the movable plate 12, there is arranged a fixed plat...
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JP2008296336 |
To provide a hollow sealing structure and manufacturing method for a hollow sealing structure, which downsizes the hollow sealing structure and shortens a removing time of an internal sacrifice layer.The hollow sealing structure 1 compri...
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JP2008294540 |
To obtain a beam adjusting device capable of electrically switching the beam axis of an antenna by using a phase shifter having less insertion loss and easily adjusting the beam axis.The adjusting device is provided with: a transmitter/r...
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JP2008283473 |
To provide a power amplifier which can reduce insertion loss and power consumption and can be prevented from being made large in size.The power amplifier 1 includes: a power distributor 2 for dividing an input signal into a plurality of ...
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JP2008278651 |
To provide an electrostatic actuator generating large force even when starting suction, and to provide a micro-switch, electronic apparatus and a manufacturing method of the electrostatic actuator.The electrostatic actuator electrostatic...
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JP2008253058 |
To decrease possibility that a jointed portion to a wiring board peels off, when mounting on the wiring board is performed and decrease the possibility of a lead wire being cut, when an electrode is electrically connected through a wire ...
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JP2008238330 |
To provide a MEMS (Micro-Electro-Mechanical System) device having low operation voltage and strong pressure contact force and separating force.This MEMS device has a substrate 1, a supporting part 2 provided on the substrate 1, a fixed e...
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JP2008235254 |
To provide a drive microsystem which is provided with an opening travel end stop part of a pivot arm so that a rotation of the pivot arm can be controlled.The drive microsystem 1 is formed on a plane base plate 2 and is provided with a p...
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JP2008218023 |
To provide a switching device and its manufacturing method capable of preventing adhesion of contacts without increasing junction resistance.The switching device has a metallic contact comprising metallic fixed contacts 10, 10 formed on ...
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JP2008218400 |
To provide a gate voltage control system for electrostatically actuating a MEMS switch 14.The gate voltage control system includes an electrostatically responsive actuator movable through a gap for changing over a close state/open state....
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JP2008210640 |
To provide an electrostatically-driven element high in reliability for operation.Fixed conductor patterns 3a and 3b are formed on a surface of a board 2, and a movable part 4 is arranged on the upper of the fixed conductor patterns 3a an...
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JP2008204768 |
To provide a miniature relay which has a high isolation characteristic and can be easily produced by minimizing a capacity coupling component between contacts without requiring high alignment precision.The miniature relay includes a mova...
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JP2008198607 |
To provide a MEMS (micro electromechanical system) switch capable of being operated by high input/output current, and interconnecting method and packaging method applicable to a MEMS relay.A MEMS structural body is provided which is furt...
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JP2008186771 |
To construct a switch effectively preventing stiction using a rotor suspended by a beam.A meniscus intervening between switch contact surfaces is deformed in a shearing direction to separate cross-linkage of the meniscus off, so as to ma...
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JP2008181725 |
To control a variable-displacement micro machine device more easily and correctly than ever by suppressing generation of hysteresis.A method of controlling driving of a micro machine device 11 having first and second electrodes 24 and 25...
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JP2008177043 |
To provide a microswitching element suitable for suppressing orientation variations of a movable contact electrode to a fixed contact electrode, and a manufacturing method of the microswitching element.The element X1 is provided with a f...
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JP2008177074 |
To provide a microswitching element suitable for lowering a drive voltage, and suitable for avoiding stiction between contact electrodes.This microswitching element X1 includes: a substrate S1; a movable part 12 having a first surface 12...
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JP2008171586 |
To provide an electrical machine switch, which realizes enhanced performance of an electrical machine switch, such as high-speed response, low-voltage driving, high reliability (durability, high power), or extendability (such as SPDT: Si...
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JP2008160563 |
To reduce impedance mismatching, insertion loss, or the like in a high frequency signal attenuating device, or the like.Signal lines 2S constituting a portion of a coplaner line 2 at end parts of input and output sides of the high freque...
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JP2008146940 |
To provide a microswitching element suitable for reducing a driving voltage.This microswitching element X1 is equipped with a base substrate S1, a stationary part 11, a movable part 12 extending along the base substrate S1 while having a...
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JP2008146939 |
To provide a micro switching element suitable for achieving reduction of a driving voltage.The element X1 is equipped with a fixed part 11, a movable part 12 which has the fixed end fixed to the fixed part 11 and extends, a contact elect...
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JP2008131096 |
To provide a phase shifter which has high-frequency characteristics and can suppress deterioration in insertion loss and reflection loss.The phase shifter 3b includes a substrate 11, a high-frequency signal line 12 which is provided on t...
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JP2008130613 |
To realize MEMS variable capacity having a large capacity ratio.The MEMS variable capacity system is provided with an MEMS variable capacity VC that is connected in series between first and second ports P1 and P2, a first power circuit P...
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