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WO/2012/011703 |
According to the MEMS switch and the method for manufacturing same of the present invention, the MEMS switch includes a substrate, a first terminal formed on the substrate, a second terminal formed on the substrate and being spaced a pre...
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WO/2012/001554 |
The invention relates to an electromechanical switch device (100, 200), comprising a first switch portion (111, 112, 211, 212), a second switch portion (121, 122, 220) and an actuator device (130, 230). The actuator device (130, 230) is ...
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WO/2011/162949 |
Planar cavity Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structure are provided. The method includes forming at least one Micro-Electro-Mechanical System (MEMS) cavity (60a, 60b) having a planar ...
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WO/2011/162950 |
A method of forming at least one Micro-Electro-Mechanical System (MEMS) cavity (60b) includes forming a first sacrificial cavity layer (18) over a wiring layer (14) and substrate (10). The method further includes forming an insulator lay...
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WO/2011/121531 |
The present invention provides an integrated electro -mechanical actuator and a manufacturing method for manufacturing such an integrated electro-mechanical actuator. The integrated electro-mechanical actuator comprises an electrostatic ...
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WO/2011/111274 |
Disclosed is a structure for a signal line wherein a lower insulating layer (23) is formed on the upper surface of a base (22); a semiconductor layer (24) is provided on the upper surface of the lower insulating layer (24) such that at l...
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WO/2011/069988 |
The invention relates to a microelectromechanical system (MEMS) (100, 200) having an electromechanical microswitch (1) for switching an electrical signal (S), in particular a radio frequency signal (RFMEMS), in particular in the GHz rang...
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WO/2011/069988 |
The invention relates to a microelectromechanical system (MEMS) (100, 200) having an electromechanical microswitch (1) for switching an electrical signal (S), in particular a radio frequency signal (RFMEMS), in particular in the GHz rang...
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WO/2011/058354 |
A packaged RF MEMS device comprising: an RF MEMS device, a substrate upon which the RF MEMS device is mounted, a cover mounted on the substrate, the cover comprising a cavity for containing the RF MEMS device, the cover and substrate the...
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WO/2011/058355 |
A MEMS switch comprising a pair of contact-making surfaces, at least one of which is movable relative to the other to open or close the switch, a said surface being carried by a flexible element, and actuator means configured to effect s...
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WO/2011/047356 |
Integrated circuits with configurable multi-gate switch circuitry are provided. The switch circuitry may include switch control circuitry and an array of multi- gate switches. Each multi-gate switch may have first and second terminals, f...
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WO/2011/036808 |
Provided is a switch element equipped with a switching section provided on a base. The switching section comprises a support electrode which is fixed to the base, a beam which comprises a fixed portion that is fixed to the base and elec...
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WO/2011/033729 |
Disclosed is an MEMS switch that, in order for the contact resistance of a point of contact that transmits signals to be maintained at a low level, in an ON mode maintains sufficient contact force for the point of contact to have low con...
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WO/2011/033728 |
Disclosed is an MEMS switch that, in order for the contact resistance of a point of contact that transmits signals to be maintained at a low level, in an ON mode maintains sufficient contact force for the point of contact to have low con...
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WO/2011/019489 |
A switching device structure comprising a top magnet, a bottom magnet, and a movable member disposed between the top and bottom magnets, the movable member having an electromagnet positioned thereon, the electromagnet comprising a plural...
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WO/2011/019489 |
A switching device structure comprising a top magnet, a bottom magnet, and a movable member disposed between the top and bottom magnets, the movable member having an electromagnet positioned thereon, the electromagnet comprising a plural...
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WO/2010/128482 |
The present invention provides a capacitive MEMS device comprising a first electrode lying in a plane, and a second electrode suspended above the first electrode and movable with respect to the first electrode. The first electrode functi...
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WO/2010/105827 |
The MEMS structure comprises: a flexible membrane (6), which has a main longitudinal axis (6a) defining a longitudinal direction (X), at least one pillar (3, 3') under the flexible membrane (6), electric lowering actuation means (7) that...
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WO/2010/107876 |
Embodiments disclosed herein generally solve a stiction problem in switching devices by using a series of pulses of force which take the switch from being strongly adhered to a landing electrode to the point where it is only weakly adher...
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WO/2010/072431 |
Structures having a hybrid MEMS RF switch and method of fabricating such structures using existing wiring layers of a device is provided. The method of manufacturing a MEMS switch includes forming a forcing electrode from a lower wiring ...
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WO/2010/049865 |
The present invention relates to a MEMS switch and a method of operating a MEMS switch, in order to reduce impact stress. Several MEMS suffer from a so-called zipping effect. This zipping effect can take place in MEMS switches consisting...
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WO/2010/031885 |
The invention relates to a feedback resonant actuation method for MEMS electrostatic actuators. The invention involves connecting the electrostatic actuator (1) to an electronic circuit which operates as a sensor or estimator of the dist...
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WO/2010/005888 |
A micro-electromechanical (MEMS) relay (1500) decouples a flux path from an electrical path through a switch structure (1512) to eliminate signal degradations that result from fluctuations in the magnetic flux. The fluctuations in the ma...
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WO/2010/005888 |
A micro-electromechanical (MEMS) relay (1500) decouples a flux path from an electrical path through a switch structure (1512) to eliminate signal degradations that result from fluctuations in the magnetic flux. The fluctuations in the ma...
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WO/2009/147600 |
31 ABSTRACT A MEMS switch (1, 81), and methods of fabricating thereof, the switch comprising: a sealed cavity (24); and a membrane (26); wherein the sealed cavity (24) is defined in part by the membrane (26); and the membrane is a 5 meta...
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WO/2009/148677 |
A modally driven oscillating element periodically contacts one of more electrical contacts, thereby acting as a switch, otherwise known as a resonant switch, or "resoswitch", with very high Q's, typically above 10000 in air, and higher i...
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WO/2009/148677 |
A modally driven oscillating element periodically contacts one of more electrical contacts, thereby acting as a switch, otherwise known as a resonant switch, or "resoswitch", with very high Q's, typically above 10000 in air, and higher i...
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WO/2009/138919 |
A MEMS device comprises first and second opposing electrodes (42,46), wherein the second electrode (46) is electrically movable to vary the electrode spacing between facing first sides of the first and second electrodes. A first gas cham...
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WO/2009/135017 |
Embodiments disclosed herein relate to a non-volatile memory bitcell (1) and arrays thereof, methods of detecting whether the bitcell is in a programmed state, methods of detecting whether the bitcell is in an erased state, methods of se...
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WO/2009/128048 |
The present invention relates to a MEMS, being developed for e.g. a mobile communication application, such as switch, tunable capacitor, tunable filter, phase shifter, multiplexer, voltage controlled oscillator, and tunable matching netw...
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WO/2009/123111 |
An MEM switch comprises a substrate on which a signal line having fixed contacts is formed, a movable board equipped with movable contacts, a flexible support for supporting the movable board, and an electrostatic actuator and a piezoele...
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WO/2009/071498 |
The invention relates to an electrostatic-actuation microswitch of the capacitor type that comprises two frames, wherein the first one is a flexible membrane (11) and the second one includes at least one control electrode (13), the two f...
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WO/2009/070622 |
Improved actuation device useful in direct-write nanolithography and imaging including use of a pivot point for downward deflection of a cantilever with long travel path. A device comprising at least one holder, at least one cantilever, ...
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WO/2009/063627 |
When a high power signal is inputted into an electromechanical device, there occurs a phenomenon in which a movable electrode is driven unintendedly and automatically by an electrostatic force.Such a phenomenon is prevented in order to r...
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WO/2009/057988 |
There is disclosed a method of fabricating radio frequency surface microelectromechanical (MEMS) switch. The method utilizes four masks, each configured through photolithography process at different stages that resulted in substantially ...
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WO/2009/057988 |
There is disclosed a method of fabricating radio frequency surface microelectromechanical (MEMS) switch. The method utilizes four masks, each configured through photolithography process at different stages that resulted in substantially ...
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WO/2008/153574 |
A current control device is disclosed. The current control device includes control circuitry integrally arranged with a current path and at least one micro electromechanical system (MEMS) switch (20) disposed in the current path. The cur...
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WO/2008/153574 |
A current control device is disclosed. The current control device includes control circuitry integrally arranged with a current path and at least one micro electromechanical system (MEMS) switch (20) disposed in the current path. The cur...
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WO/2008/153579 |
Electrical distribution systems implementing micro-electromechanical system based switching devices. Exemplary embodiments include a method in an electrical distribution system, the method including determining if there is a fault condit...
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WO/2008/131088 |
A microelectromechanical system (MEMS) device includes an actuator having a plurality of charge collection elements. At least one of the charge collection elements is configured to build up electrical charges by directly interacting with...
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WO/2008/110389 |
The invention relates to a micromechanical switch device for switching an interrupted HF signal line which is provided on a substrate. The inventive device comprises a switch part and a cover which closes the switch part and is character...
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WO/2008/107573 |
The invention relates to a micro-relay (1) including an electrode (2) capable of translation displacement between a pair of upper contacts (3.1, 3.2) and a pair of lower contacts (4.1, 4.2). The displacements of the electrode (2) are con...
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WO/2008/080086 |
A method of driving a switch having a movable member and a contact first applies (to the switch) a first signal having a first level, and then applies a second signal having a second level to the switch (after applying the first signal)....
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WO/2008/077581 |
Integrated arrangement with a circuit and a MEMS circuit element (500), wherein the circuit has a plurality of semiconductor components (400) which are interconnected via metallic conductor tracks (101...104, 201...204, 301...304) in mul...
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WO/2008/076448 |
MEMS switches are formed with membranes or layers (64) that are deformable upon the application of a voltage. The MEMS switches may comprise compliant terminals (82) and/or contact conductors (58) to produce contact swiping.
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WO/2008/072163 |
The present invention relates to MEMS device that comprises a first electrode, and a second electrode suspended with a distance to the first electrode with the aid of a suspension structure. The MEMS device further comprises at least one...
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WO/2008/064216 |
A micro-electromechanical system switch includes a substrate (40) and a plurality of actuating electrodes (3000) formed the substrate wherein each actuating electrode is activatable. A cantilever beam (10) has a first end and a second en...
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WO/2008/064216 |
A micro-electromechanical system switch includes a substrate (40) and a plurality of actuating electrodes (3000) formed the substrate wherein each actuating electrode is activatable. A cantilever beam (10) has a first end and a second en...
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WO/2008/033213 |
An apparatus includes a mechanical switch. The mechanical switch includes a bilayer (10, 24) with first and second stable curved states. A transformation of the bilayer from the first state to the second state closes the switch.
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WO/2008/033213 |
An apparatus includes a mechanical switch. The mechanical switch includes a bilayer (10, 24) with first and second stable curved states. A transformation of the bilayer from the first state to the second state closes the switch.
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