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WO/2021/049342A1 |
Provided is an attachment/detachment device which, while using an electrostatic chuck method, has excellent responsiveness to attachment/detachment of a workpiece even when the workpiece is thin. The attachment/detachment device, which...
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WO/2021/045844A1 |
An electrostatic machine employs a high dielectric fluid comprised of a dielectric liquid with suspended dielectric particles. Electrorheological effects are minimized through small particle sizes and steric coatings on those particles l...
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WO/2021/044885A1 |
This electrostatic chuck is provided with: a first electrostatic chuck part provided with an electrically conductive base plate that has a first portion and a second portion provided to the outer periphery of the first portion and that h...
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WO/2021/044744A1 |
The piezoelectric actuator of the present disclosure comprises: a piezoelectric element; and a case in which the piezoelectric element is housed and which deforms correspondingly with respect to the expansion and contraction of the piezo...
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WO/2021/045186A1 |
In the case of manufacturing a thermoelectric conversion module using a paste including metal nanoparticles, it is difficult to apply the paste onto a thermoelectric conversion element in a controlled amount due to effects of specific fl...
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WO/2021/045000A1 |
The purpose of the present invention is to provide a droplet removal device and a droplet removal method that enable removal of droplets attached to the surface of an object by vibrating and moving droplets. The droplet removal device ac...
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WO/2021/044305A1 |
A medical device includes a user interface component and an energy harvesting system coupled to the user interface component. The energy harvesting system energy includes a harvesting component, a power storage device connected to the en...
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WO/2021/043636A1 |
The present invention relates to a piezoelectric stick-slip-motor and method of controlling same. In order to enable speed variation of the piezoelectric stick-slip-motor with a reduced noise generation, the present invention provides th...
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WO/2021/043588A1 |
The invention describes an elastic dielectric (130) which has an elastic polymer (190) and a plurality of pores (180). The plurality of pores (180) have an average pore diameter (d) of 50 pm or less, and the plurality of pores (180) have...
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WO/2021/046301A1 |
An apparatus, methods and controllers for electrostatically chucking varied substrate materials are disclosed. Some embodiments of the disclosure provide electrostatic chucks with variable polarity and/or voltage. Some embodiments of the...
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WO/2021/043249A1 |
A piezoelectric drive apparatus and a device. A piezoelectric drive apparatus (10) comprises: a liquid loop unit (11), a piezoelectric actuation unit (12), a valve unit (13), and an output unit (14). The liquid loop unit (11) is used for...
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WO/2021/039836A1 |
This magnetic levitation device (10) comprises a pair of first permanent magnets (20A, 20B). Each of the first permanent magnets has a lateral surface (22), a top surface (21), and an edge line (24) formed so as to chamfer a corner (23) ...
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WO/2021/039567A1 |
[Problem] To provide an actuator which is provided with: an actuator main body that has a first surface and a second surface facing each other; a first constraining member that is provided on the first surface and constrains the expansio...
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WO/2021/035616A1 |
A drive circuit, a drive circuit board and a driver. The drive circuit provided by the present invention comprises: a coupled inductor (210) and a drive switch (220), wherein the coupled inductor (210) comprises: a first winding (211) an...
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WO/2021/039358A1 |
The present disclosure relates to a drive device, a drive method, and an electronic instrument which enable an adjustment of a movement speed of a moving body to be realized. A drive circuit generates a first drive signal to be applied t...
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WO/2021/039530A1 |
A thermoelectric conversion device (1) according to the present invention is provided with: a heat dissipation substrate (2); a resin substrate (3) which is arranged on the heat dissipation substrate (2); thermoelectric conversion module...
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WO/2021/038255A2 |
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WO/2021/040023A1 |
A production method for a photothermal conversion element (1, 2), the production method comprising a step for preparing a solid material and a step for radiating laser light at the solid material and thereby forming a processed region. T...
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WO/2021/039051A1 |
[Problem] To provide a dielectric elastomer which comprises a urethane-based elastomer, and which is suitable for an actuator, is stable over time, has improved withstand voltage, and more preferably, has stability over time and a suppre...
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WO/2021/037779A1 |
A drive unit for driving a passive element (4) relative to an active element (1) comprises a resonator (2) and excitation means (23), at least a first arm (21) comprising, at an outer end of the arm, a first contact element (31) that is ...
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WO/2021/041471A1 |
Various embodiments of a system and method for controlling the shape, subdivision, recombination, movement and object manipulation of ferrofluid material in addition to pumping fluids with ferrofluid material using external electromagnet...
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WO/2021/035614A1 |
A drive circuit, a drive circuit board and a driver. The drive circuit comprises a first signal generator (100) and a signal drive circuit (200), wherein the first signal generator (100) is used for generating and outputting an initial s...
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WO/2021/039168A1 |
This thermoelectric conversion material is represented by the structural formula Ag2-xαxS. α is one selected from among Ni, V, and Ti. The value of x is greater than 0 and less than 0.6.
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WO/2021/039342A1 |
The thermoelectric conversion material is represented by the composition formula Ag2S(1-x)Sex, the value of x being larger than 0.01 but smaller than 0.6.
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WO/2021/035366A1 |
A nano-positioning system for fine and coarse nano-positioning including at least one actuator, wherein the at least one actuator includes a high Curie temperature material and wherein the nano-positioning system is configured to apply a...
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WO/2021/032483A1 |
A micromirror array comprises a substrate, a plurality of mirrors for reflecting incident light and, for each mirror (20) of the plurality of mirrors, at least one piezoelectric actuator (21) for displacing the mirror, wherein the at lea...
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WO/2021/030489A2 |
Disclosed are devices, systems, and methods for compact energy conversion. In one aspect, the compact energy conversion device includes a transport medium comprising a nanoparticle suspended in a dielectric. The transport medium has a fi...
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WO/2021/030516A1 |
A base plate containing a having a top and a bottom and comprising a beryllium oxide composition containing at least 95 wt% beryllium oxide and optionally fluorine/fluoride ion. The base plate demonstrates a clamping pressure of at least...
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WO/2021/030487A1 |
Disclosed are devices, systems, and methods for compact energy conversion. In one aspect, the compact energy conversion device includes a transport medium comprising a nanoparticle suspended in a dielectric. The transport medium has a fi...
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WO/2021/024628A1 |
This control device for controlling a dielectric elastomer actuator (DEA) is provided with a drive voltage generating unit, an open/closed switch unit, an alternating current signal generating unit, and an electrostatic capacitance detec...
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WO/2021/022803A1 |
Disclosed is a micro-displacement amplification mechanism, comprising two asymmetrical amplification structures. Each of the asymmetrical amplification structures comprises multiple asymmetrical amplification units connected in series by...
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WO/2021/025059A1 |
A first thermoelectric conversion module of this thermoelectric conversion element comprises: a first substrate having a first major surface and a second major surface; a first electrode, a first n-type thermoelectric conversion layer, a...
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WO/2021/025287A1 |
The present invention relates to an electrostatic chuck heater having a bipolar structure, the electrostatic chuck heater comprising: a heater body having an internal electrode and an external electrode for selectively performing an RF g...
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WO/2021/025060A1 |
This thermoelectric conversion element comprises: a substrate having a first main surface and a second main surface; a first electrode, an n-type thermoelectric conversion layer, a p-type thermoelectric conversion layer, and a second ele...
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WO/2021/026110A1 |
A moveable edge ring system for a plasma processing system includes a top edge ring and a first edge ring arranged below the top edge ring. A second edge ring is made of conductive material and includes an upper portion, a middle portion...
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WO/2021/019083A1 |
The invention relates to a mechanical reinforcement element (1), which has two end regions (2) and two angle regions (3), wherein the end regions (2) are arranged on two opposite end sides of the reinforcement element (1) and the angle r...
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WO/2021/019534A1 |
An electricity generating system including a liquid, a rotor in touch with an interface of the liquid to gas, a fuel compartment on or in the rotor for containing fuel, wherein the fuel compartment is configured to maintain the fuel away...
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WO/2021/019891A1 |
This thermoelectric module is provided with a thermoelectric element disposed between a pair of electrodes, and an anchor layer disposed between the electrodes and the thermoelectric element and connected to the thermoelectric element.
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WO/2021/019215A1 |
A vibrational lens is disclosed. The vibrational lens comprises at least two focusing plates each having a proximal and distal end. The separation between the distal ends of the at least two focusing plates is less than the separation be...
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WO/2021/021028A1 |
Disclosed herein are triboelectric nanogenerators (TENGs). Such TENGs comprise at least one triboelectric (TE) layer comprising two surfaces relative movement between which generates a TE charge, and a circuit. The circuit comprises a sw...
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WO/2021/021513A1 |
Exemplary support assemblies may include an electrostatic chuck body defining a substrate support surface. The assemblies may include a support stem coupled with the electrostatic chuck body. The assemblies may include a heater embedded ...
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WO/2021/015674A1 |
This invention relates to a triboelectric cell comprising a first electrode comprising a first material having a first Fermi level, a second electrode comprising a second material having a second Fermi level that is different from the fi...
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WO/2021/015202A1 |
[Problem] To propose an actuator having a novel configuration using Coulomb force. [Solution] This actuator 10 is provided with: a base electrode 2; a counter electrode 4 that faces the base electrode 2; a first terminal 31 that is conne...
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WO/2021/016584A1 |
Described are multi-layer electrostatic chucks used to secure and support a wafer substrate during wafer processing, and related methods, wherein the chuck includes a grounding structure that includes a grounding layer and a grounding pin.
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WO/2021/014679A1 |
Provided are a stage device, a charged particle beam device, and a vacuum device with which it is possible to increase the speed and acceleration of positioning and to suppress leakage of a magnetic field. To achieve this purpose, this m...
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WO/2021/013882A1 |
The invention refers to a pump actuating cap for a pump dispenser, the cap comprising a housing configured to be coupled with a pump to operate the pump. The cap further comprising: an electronic circuit, a power source to feed the elect...
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WO/2021/014381A1 |
An energy harvesting system, fastener (1), use of an energy harvesting system (10; 101; 201; 301; 401) and method for the conversion of kinetic energy into electrical energy; the harvesting system (10; 101; 201; 301; 401) being made, at ...
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WO/2021/016524A1 |
Aspects of triboelectric fibers and methods of manufacture of the fibers are described. In one example, a method of manufacture of a fiber for generating energy using the triboelectric effect includes forming a preform tube, heating the ...
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WO/2021/012433A1 |
A multi-degree-of-freedom piezoelectric actuator with a spherical rotor, comprising a base (1), the spherical rotor (2), a support frame (3), a pre-pressure adjusting mechanism (4), a stator bracket (5), and three stators (8) with the sa...
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WO/2021/013883A1 |
Plug (3) for a liquid-product dispensing container (1), and container (1) including said plug (3). The plug (3) includes a casing (5) to which the following is mounted: an actuator (7), to be pressed by a user for dispensing the liquid p...
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