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Patent Searching and Data


Matches 251 - 300 out of 18,145

Document Document Title
WO/2009/121906A1
Method for producing an electroacoustic component, comprising the following steps: a substrate for an electroacoustic component is provided; an electrically conductive layer is applied to the substrate; the electrically conductive layer ...  
WO/2009/121901A1
The invention is concerned with the field of material sciences and relates to a layer system for electrodes which can be used for example in frequency filters, sensors or actuators. The object of the present invention is to specify a lay...  
WO/2009/104329A1
A method for manufacturing a piezoelectric vibrator comprises an overlapping step for overlapping a lid substrate (40) on a base substrate (50) such that a piezoelectric vibrating-reed (4) is contained in a cavity (C) after the piezoelec...  
WO/2009/104293A1
A piezoelectric vibrator comprises a base substrate composed of a glass material having a bonding film formed on the upper surface, a lid substrate composed of a glass material having a recess for cavity and bonded to the base substrate ...  
WO/2009/104333A1
A piezoelectric vibrator (1) is provided with a base substrate (2), a lid substrate (3) which has a recessed portion (3a) for a cavity and is joined to the base substrate with the recessed portion facing the base substrate, a piezoelectr...  
WO/2009/104309A1
This piezoelectric vibrator comprises a base substrate, a lid substrate having a recess for a cavity and joined to the base substrate with the recess being opposed to the base substrate, a piezoelectric vibrating reed so joined to the up...  
WO/2009/104314A1
A piezoelectric vibrator comprises a base substrate having polished facing sides; a lid substrate, which has a recess for cavity and is bonded to the base substrate so that the recess faces the base substrate; a piezoelectric vibrating r...  
WO/2009/104308A1
Provided is a piezoelectric vibrator manufacturing method for manufacturing a plurality of piezoelectric vibrators, in which piezoelectric vibration members are sealed in cavities formed between a base substrate and a lid substrate joint...  
WO/2009/104438A1
Provided is an elastic wave device which can prevent flux from flowing into a hollow space when the elastic wave device is mounted using solder bumps. An elastic wave device comprises (a) a substrate (11), (b) a vibration portion (14) fo...  
WO/2009/104310A1
A piezoelectric oscillator comprises a base substrate, a lid substrate having a recess portion forming a cavity, joined to the base substrate, and facing the base substrate, piezoelectric oscillating pieces which are joined to the top fa...  
WO/2009/104328A1
A piezoelectric vibrator (1) is provided with a base substrate (2) having polished double surfaces; a lid substrate (3), which has a recessed section (3a) for a cavity (C) and is bonded to the base substrate; a piezoelectric vibrating pi...  
WO/2009/104327A1
A piezoelectric vibrator (1) is provided with a base substrate (2); a lid substrate (3), which has a recessed section (3a) for a cavity and is bonded to the base substrate with the recessed section facing the base substrate; a piezoelect...  
WO/2009/104486A1
Provided is a structure of a microelectromechanical device wherein the gap can be made narrower. Also provided is a process for fabricating the microelectromechanical device. A microelectromechanical device comprises a resonator (22) and...  
WO/2009/101921A1
Provided is an electronic component which can withstand the stress applied from a printed board, or the like. An electronic component (1a) has a cavity (9) sealed airtightly by a base (2) and a lid (5), and a crystal oscillator (6) is he...  
WO/2009/101733A1
Provided are a piezoelectric vibrating piece (4) having a pair of vibrating arms (10, 11) with a base end fixed to a base (12) while placed in parallel and with a weight metallic film (21) formed at the tip, a base substrate (2) having t...  
WO/2009/096563A1
Provided are a small and highly reliable elastic wave device and a method for manufacturing such device. The elastic wave device is provided with a piezoelectric substrate (1); an SAW element (2) formed on one main surface of the piezoel...  
WO/2009/097167A2
Method and apparatus for lowering capacitively-transduced resonator impedance within micromechanical resonator devices. Fabrication limits exist on how small the gap spacing can be made between a resonator and the associated input and ou...  
WO/2009/097167A3
Method and apparatus for lowering capacitively-transduced resonator impedance within micromechanical resonator devices. Fabrication limits exist on how small the gap spacing can be made between a resonator and the associated input and ou...  
WO/2009/093376A1
Disclosed is a method for manufacturing an elastic wave element, which has excellent temperature coefficient of frequency (TCF), high machining accuracy of an IDT pattern and is durable to high-temperature process at 200°C or higher. Th...  
WO/2009/093377A1
Disclosed is an elastic wave element wherein expansion and contraction due to temperature change are sufficiently suppressed and frequency shift is small. A method for manufacturing such elastic wave element is also disclosed. The elasti...  
WO/2009/081686A1
Disclosed is a method for manufacturing a piezoelectric vibrator (1). The method is provided with a step of forming through holes (35, 36), which penetrate a wafer to be used as a base substrate, so that openings are made on the outer si...  
WO/2009/081651A1
A composite piezoelectric substrate manufacturing method by which an ultrathin piezoelectric film having a uniform thickness can be formed by efficiently using a piezoelectric material. The method comprises the steps of a) preparing a pi...  
WO/2009/079188A9
A microelectromechanical resonator may include one or more resonator masses that oscillates in a bulk mode and that includes a first plurality of regions each having a density, and a second plurality of regions each having a density, the...  
WO/2009/079188A1
A microelectromechanical resonator may include one or more resonator masses that oscillates in a bulk mode and that includes a first plurality of regions each having a density, and a second plurality of regions each having a density, the...  
WO/2009/078137A1
Disclosed is a surface wave device, for which a dicing blade is hard to wear, for which a dicing speed is hard to drop, and which can be each produced highly precisely and productively from a mother laminate. The surface wave device is p...  
WO/2009/078089A1
An elastic wave device according to the present invention includes a piezoelectric substrate (14), a comb-shaped electrode (13) arranged on the piezoelectric substrate (14), and a SiO2 layer (12) formed so as to cover the electrode (13)....  
WO/2009/072358A1
A piezoelectric vibrator manufacturing method is provided with a cavity forming step of forming a recessed section for a cavity on at least one of two wafers; a bonding electrode film forming step of forming a bonding electrode film on b...  
WO/2009/072585A1
Disclosed are: a novel production process for producing a crystalline KLN film; a novel film structure for process stabilization; and a process for producing a semiconductor device using the crystalline KLN film as a piezoelectric thin f...  
WO/2009/072432A1
Disclosed is a method for manufacturing a package (1) having a base substrate (10) and a lid substrate (20) which are bonded to each other and composed of a glass base material. The package also has a cavity (C) which is formed between t...  
WO/2009/066448A1
A piezoelectric filter is formed by electrically connecting a first piezoelectric oscillator to a second piezoelectric oscillator. Each of the first and the second piezoelectric oscillator has: a substrate; a lower load film formed on th...  
WO/2009/057699A1
Provided is a highly reliable elastic wave device wherein deterioration of electrical characteristics due to deformation of a protection cover is suppressed. A method for manufacturing such elastic wave device is also provided. The elast...  
WO/2009/057195A1
An elastic wave element comprises resonators (2), each including an electrode for exciting elastic waves, power feeding interconnection portion (3) so disposed as to electrically connect the resonators (2), a piezoelectric substrate (4) ...  
WO/2009/047266A1
The invention relates to an electromechanical component vibrating at a nanometric or micrometric scale that comprises a vibrating mechanical member (1) interacting with at least one so-called detection electrode (2). The detection electr...  
WO/2009/037977A1
When an elastic wave measuring device (10) inputs a high-frequency burst signal in a first ball SAW device (5A), the device successively switches the input destination of the high-frequency burst signal to other ball SAW devices (5B) to ...  
WO/2009/035155A1
A crystal oscillator piece having a major axis parallel to X-axis and hardly causing leak vibration even though the shape of the cross section of each of the vibration legs is not symmetric and method for manufacturing such a crystal osc...  
WO/2009/031258A1
[PROBLEMS] To provide a crystal device where a lid and a base are formed entirely of crystal and bonded by siloxane bond (Si-O-Si). [MEANS FOR SOLVING PROBLEMS] A crystal device (100) comprises a crystal frame (50), which is made of crys...  
WO/2009/028683A1
To provide a branching filter and a method for manufacturing the same. In the branching filter, the same mounting board can be shared between a normal arrangement of an electrode group formed in a main surface of a piezoelectric substrat...  
WO/2009/025118A1
A piezoelectric resonator in which the characteristics are not impaired even if the number of acoustic reflection layers is decreased. Its fabrication method is also provided. A piezoelectric resonator (10) comprises (a) a substrate (12)...  
WO/2009/022578A1
A polyimide resin is applied over the surface of a first substrate (5) in a uniform thickness and then heated thereon, thereby forming a semi-cured polyimide layer. Then, the polyimide layer is cured, thereby forming a first polyimide la...  
WO/2009/020015A1
A tuning fork-type crystal oscillator having an improved frequency adjusting accuracy and a method for adjusting its frequency. The tuning fork-type crystal oscillator having a tuning fork-like crystal piece (3) in which a pair of tuning...  
WO/2009/019316A3
A method for forming narrow gaps, for ex ample gaps narrower than 400nm, e.g. less than 200nm or 100 nm, between elements of a MEMS structure is described, as well as a method for forming micromachined or MEMS structures comprising narro...  
WO/2009/016906A1
Provided is an elastic wave device by which cracks are not easily generated in a piezoelectric substrate, contact resistance of a contact section, i.e., an electrically connecting section between wiring patterns, is reduced and an insert...  
WO/2009/000687A1
The invention relates to a detector of micromechanical design which is suitable for detecting particles, for example gas molecules, in a gaseous atmosphere. The detector has a plate (11) as a system capable of oscillation and is mounted ...  
WO/2009/001650A1
A method for fabricating a small and low-profile surface acoustic wave device which can be formed collectively by a wafer process without causing deterioration in characteristics. The surface acoustic wave device comprises a piezoelectri...  
WO/2008/149298A1
A pressure/vacuum sensor and method, comprising: driving a MEMS piezoresistive resonator (8) into resonant vibration, applying Joule heating to the resonator (8); and sensing a variable parameter that varies in response to the tendency o...  
WO/2008/143004A1
Provided is a dry etching method by which a substrate is not broken even when the both surfaces of the substrate are dry-etched. An etching gas composed of fluorocarbon gas and a rare gas is introduced into a vacuum chamber to generate p...  
WO/2008/142022A1
The invention relates to an evaluation device for an electronic control unit (ECU) comprising an input for receiving information relating to a current supply to the electronic control unit (ECU) and/or relating to the temperature of said...  
WO/2008/127032A1
The present invention provides a power cutoff device automatically operated upon the occurrence of a spark on an electric wire. The power cutoff device of the present invention automatically cuts off power supply to an earth leakage brea...  
WO/2008/117891A1
A crystal oscillator piece in which generation of leakage oscillation is suppressed, and its manufacturing method. The method for manufacturing a crystal oscillator piece comprises a step for forming a first etching mask on the surface o...  
WO/2008/114784A1
Disclosed is a metal paste for sealing, which comprises a metal powder and an organic solvent, wherein the metal powder comprises at least one metal powder selected from a gold powder, a silver powder, a platinum powder and a palladium p...  

Matches 251 - 300 out of 18,145