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Patent Searching and Data


Matches 251 - 300 out of 17,892

Document Document Title
WO/2009/066448A1
A piezoelectric filter is formed by electrically connecting a first piezoelectric oscillator to a second piezoelectric oscillator. Each of the first and the second piezoelectric oscillator has: a substrate; a lower load film formed on th...  
WO/2009/057699A1
Provided is a highly reliable elastic wave device wherein deterioration of electrical characteristics due to deformation of a protection cover is suppressed. A method for manufacturing such elastic wave device is also provided. The elast...  
WO/2009/047266A1
The invention relates to an electromechanical component vibrating at a nanometric or micrometric scale that comprises a vibrating mechanical member (1) interacting with at least one so-called detection electrode (2). The detection electr...  
WO/2009/037977A1
When an elastic wave measuring device (10) inputs a high-frequency burst signal in a first ball SAW device (5A), the device successively switches the input destination of the high-frequency burst signal to other ball SAW devices (5B) to ...  
WO/2009/035155A1
A crystal oscillator piece having a major axis parallel to X-axis and hardly causing leak vibration even though the shape of the cross section of each of the vibration legs is not symmetric and method for manufacturing such a crystal osc...  
WO/2009/031258A1
[PROBLEMS] To provide a crystal device where a lid and a base are formed entirely of crystal and bonded by siloxane bond (Si-O-Si). [MEANS FOR SOLVING PROBLEMS] A crystal device (100) comprises a crystal frame (50), which is made of crys...  
WO/2009/028683A1
To provide a branching filter and a method for manufacturing the same. In the branching filter, the same mounting board can be shared between a normal arrangement of an electrode group formed in a main surface of a piezoelectric substrat...  
WO/2009/025118A1
A piezoelectric resonator in which the characteristics are not impaired even if the number of acoustic reflection layers is decreased. Its fabrication method is also provided. A piezoelectric resonator (10) comprises (a) a substrate (12)...  
WO/2009/022578A1
A polyimide resin is applied over the surface of a first substrate (5) in a uniform thickness and then heated thereon, thereby forming a semi-cured polyimide layer. Then, the polyimide layer is cured, thereby forming a first polyimide la...  
WO/2009/020015A1
A tuning fork-type crystal oscillator having an improved frequency adjusting accuracy and a method for adjusting its frequency. The tuning fork-type crystal oscillator having a tuning fork-like crystal piece (3) in which a pair of tuning...  
WO/2009/019316A3
A method for forming narrow gaps, for ex ample gaps narrower than 400nm, e.g. less than 200nm or 100 nm, between elements of a MEMS structure is described, as well as a method for forming micromachined or MEMS structures comprising narro...  
WO/2009/016906A1
Provided is an elastic wave device by which cracks are not easily generated in a piezoelectric substrate, contact resistance of a contact section, i.e., an electrically connecting section between wiring patterns, is reduced and an insert...  
WO/2009/000687A1
The invention relates to a detector of micromechanical design which is suitable for detecting particles, for example gas molecules, in a gaseous atmosphere. The detector has a plate (11) as a system capable of oscillation and is mounted ...  
WO/2009/001650A1
A method for fabricating a small and low-profile surface acoustic wave device which can be formed collectively by a wafer process without causing deterioration in characteristics. The surface acoustic wave device comprises a piezoelectri...  
WO/2008/149298A1
A pressure/vacuum sensor and method, comprising: driving a MEMS piezoresistive resonator (8) into resonant vibration, applying Joule heating to the resonator (8); and sensing a variable parameter that varies in response to the tendency o...  
WO/2008/143004A1
Provided is a dry etching method by which a substrate is not broken even when the both surfaces of the substrate are dry-etched. An etching gas composed of fluorocarbon gas and a rare gas is introduced into a vacuum chamber to generate p...  
WO/2008/142022A1
The invention relates to an evaluation device for an electronic control unit (ECU) comprising an input for receiving information relating to a current supply to the electronic control unit (ECU) and/or relating to the temperature of said...  
WO/2008/127032A1
The present invention provides a power cutoff device automatically operated upon the occurrence of a spark on an electric wire. The power cutoff device of the present invention automatically cuts off power supply to an earth leakage brea...  
WO/2008/117891A1
A crystal oscillator piece in which generation of leakage oscillation is suppressed, and its manufacturing method. The method for manufacturing a crystal oscillator piece comprises a step for forming a first etching mask on the surface o...  
WO/2008/114784A1
Disclosed is a metal paste for sealing, which comprises a metal powder and an organic solvent, wherein the metal powder comprises at least one metal powder selected from a gold powder, a silver powder, a platinum powder and a palladium p...  
WO/2008/110571A1
The invention relates to a component operated by guided acoustic waves and comprising a layer system (1, 2, 3, 6) that comprises a piezoelectric layer (1), a dielectric layer (2) and electrodes (3) that are arranged between the piezoelec...  
WO/2008/105199A1
A miniaturized electromagnetic wave separator is provided, and in particular, an electromagnetic wave separator is provided for making it possible to configure its low back height. The electromagnetic wave separator is comprised of a rec...  
WO/2008/105145A1
[Problems to be Solved] To provide a contour resonator having a desired resonance frequency and a desired temperature characteristic, and a method for adjusting this contour resonator. [Means to Solve the Problems] A contour resonator 10...  
WO/2008/102900A1
Provided is a package type piezoelectric vibrator which is capable of being packaged at a wafer level and is suitable for mass production. The package type crystalline vibrator has a structure wherein an extraction electrode exists by ha...  
WO/2008/102481A1
A method for manufacturing a piezoelectric resonator in which variation in characteristics is suppressed without complicating the manufacturing process, confinement of vibration to a piezoelectric vibrating section is improved and good f...  
WO/2008/087836A1
Provided is a method for manufacturing an elastic boundary wave device, in which a discontinuous portion is hardly formed in a dielectric film thereby to deteriorate the electric characteristics hardly, although an IDT is not thinned so ...  
WO/2008/081935A1
A surface acoustic wave device excellent in reliability and a method for manufacturing the same. The surface acoustic wave device comprises a piezoelectric substrate (1) for making a surface acoustic wave travel thereon, an IDT (2) forme...  
WO/2008/078840A1
Electromechanical characteristic of a piezoelectric element (10) is measured by sandwiching the piezoelectric element by two or more measurement terminals (21a, 21b) in contact with two or more electrodes arranged on the same plane (elec...  
WO/2008/061319A1
A method of fabricating an array (110) of micromechanical resonant members (112), including the steps of: using MEMS techniques to form a set of resonant members at a common first resonant frequency; and using MEMS techniques to provide ...  
WO/2008/062639A1
Provided is an elastic boundary wave device manufacturing method having a step of making it possible to perform a frequency adjustment easily and highly precisely. The elastic boundary wave device manufacturing method includes a step of ...  
WO/2008/059674A1
An acoustic boundary wave element and an acoustic boundary wave device which are excellent in heat dissipation properties and can enhance power resistance without increasing the chip size or the area of mounting space. In an acoustic bou...  
WO/2008/044182A3
A method of making a resonator, preferably a nano-resonator, includes starting with a FINFET structure with a central bar, first and second electrodes connected to the central bar, and third and fourth electrodes on either side of the ce...  
WO/2008/044182A2
A method of making a resonator, preferably a nano-resonator, includes starting with a FINFET structure with a central bar, first and second electrodes connected to the central bar, and third and fourth electrodes on either side of the ce...  
WO/2008/041404A1
This invention provides an elastic boundary wave device which can further enhance power performance. The elastic boundary wave device comprises a piezoelectric body (2), a dielectric body (3) stacked on the piezoelectric body (2), and an...  
WO/2008/039824A1
A die structural support apparatus and method are disclosed, in which a die component is provided. A support element can be configured for use with the die component, wherein said support element surrounds said die component, thereby str...  
WO/2008/032543A1
A thin film piezoelectric resonator suppresses deterioration of impedance at antiresonant frequency and has a high Q value. The thin film piezoelectric resonator is provided with a semiconductor substrate (8); an insulating layer (6) for...  
WO/2008/029854A1
This invention provides an apparatus and method for etching, which, in the dry etching of a workpiece having a large coefficient of thermal expansion, can eliminate a problem of cracking of the workpiece upon exposure to thermal deformat...  
WO/2008/018452A1
Provided is a method for manufacturing a surface acoustic wave device by which deterioration of electrical characteristics is reduced and the number of manufacturing steps is reduced. The method for manufacturing the surface acoustic wav...  
WO/2007/125724A1
Provided is an electronic component wherein corrosion does not easily advance due to entry or the like of moisture from an electrode pattern which extends to the inner side of a substrate main plane from an end formed by a substrate side...  
WO/2007/122786A1
Provided is a method for manufacturing a piezoelectric vibrating piece having less deteriorated layer on the surface and having vibrating characteristics with less difference compared with designed vibrating characteristics. Since a tuni...  
WO/2007/119643A1
A film bulk acoustic resonator (10) includes substrates (11, 12) having an oscillation space (20), and a piezoelectric laminated structure (14) arranged to face the oscillation space (20). The piezoelectric laminated structure (14) is pr...  
WO/2007/099742A1
A surface acoustic wave in which frequency/temperature characteristics can be improved effectively while the narrowing of a proportional band and the deterioration of insertion loss are not incurred significantly. In the surface acoustic...  
WO/2007/097151A1
Disclosed is a boundary acoustic wave device wherein loss is reduced. Specifically disclosed is a boundary acoustic wave device (1) comprising a first medium (2), a second medium (3) and an IDT electrode (4) arranged on the interface bet...  
WO/2007/080734A1
Disclosed is a low-cost miniaturizable surface acoustic wave device which does not require a complicated processing process or a component such as a cover member having a complicated shape. Also disclosed is a method for manufacturing su...  
WO/2007/078646A1
Multiple FBARs may be manufactured on a single wafer and later diced. Ideally, all devices formed in a wafer would have the same resonance frequency. However, due to manufacturing variances, the frequency response of the FBAR devices may...  
WO/2007/074566A1
This invention provides a piezoelectric ceramic that can easily regulate resonance frequency-temperature characteristics. A piezoelectric ceramic (2) comprises first and second parts (11 and 12) that are each in a layer form and have bee...  
WO/2007/072408A3
The invention relates to a MEMS resonator comprising a first electrode, a movable element (48) comprising a second electrode, the movable element (48) at least being movable towards the first electrode, the first electrode and the movabl...  
WO/2007/072408A2
The invention relates to a MEMS resonator comprising a first electrode, a movable element (48) comprising a second electrode, the movable element (48) at least being movable towards the first electrode, the first electrode and the movabl...  
WO/2007/072409A3
The invention relates to a MEMS resonator comprising a movable element (48), the movable element (48) comprising a first part (A) having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and the mo...  
WO/2007/072409A2
The invention relates to a MEMS resonator comprising a movable element (48), the movable element (48) comprising a first part (A) having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and the mo...  

Matches 251 - 300 out of 17,892