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Patent Searching and Data


Matches 301 - 350 out of 11,095

Document Document Title
WO/2006/130777
A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode (Pt) ; a top electrode (Al) ; and a piezoelectric layern (AIN) disposed between the bottom electrode and the top electrode. The piezoelectric re...  
WO/2006/126382
A piezoelectric device which can be efficiently manufactured. A cover substrate (20) is bonded along the periphery of an element substrate (12) whereupon a piezoelectric element is formed, and the piezoelectric element is sealed. The mai...  
WO/2006/123653
A piezoelectric device which is thinned with excellent yield and has improved production efficiency. An element substrate (12) whereupon a piezoelectric element is formed, and a cover substrate (20) are placed and bonded one over another...  
WO/2006/120994
A composite piezoelectric substrate formed by bonding a piezoelectric substrate and a supporting substrate. A metal electrode for exciting a surface acoustic wave is formed on the surface of the piezoelectric substrate. The thickness of ...  
WO/2006/118192
Disclosed is a piezoelectric component (1) comprising a piezoelectric transducer (10) wherein a pair of electrodes (20a, 20b) are formed on both major surfaces of a piezoelectric substrate (11), a pair of frame members (30a, 30b) fitted ...  
WO/2006/114922
A surface acoustic wave element wherein an electrode for exciting and detecting surface acoustic waves is formed on a piezoelectric substrate is characterized in that the element is provided with at least a composite piezoelectric chip, ...  
WO/2006/107961
Electrically responsive devices and methods for fabricating electrically- responsive devices involves applying an electrically responsive material (e.g. piezoelectric material) (132) over at least a portion of a surface of a substrate ma...  
WO/2006/107961
Electrically responsive devices and methods for fabricating electrically- responsive devices involves applying an electrically responsive material (e.g. piezoelectric material) (132) over at least a portion of a surface of a substrate ma...  
WO/2006/106831
A surface acoustic device is provided with a piezoelectric substrate and a cover which face each other at a prescribed interval. On a cover side main plane of the piezoelectric substrate, a comb-shaped electrode and a pad electrode are p...  
WO/2006/104265
A crystal vibrator (1, 51) includes an upper and a lower substrate (3, 4, 53, 54) overlaid on the upper and the lower surface of an intermediate crystal plate (2, 52) formed by a crystal vibration piece (5, 55) and an external frame (6, ...  
WO/2006/103921
A radio receiving apparatus for substantially A/D converting an RF signal to allow the reception process to be performed by use of digital signal process. A bandpass A/D converter (4) performs an A/D conversion of a received signal of a ...  
WO/2006/101450
A method of producing a polycrystalline film of a metal compound, AlN or ZnO, on a substrate with a non-zero mean tilt of the c-axis relative to the surface normal of the substrate, is disclosed. The method comprises deposition of crysta...  
WO/2006/100457
A method of forming a Bragg reflector stack including depositing alternate Silicon Dioxide and Tungsten layers characterised in that a Tungsten Nitride layer is deposited at at least one Silicon Dioxide/Tungsten interface.  
WO/2006/101762
A method for fabrication of single crystal silicon micromechanical resonators using a two-wafer process, including either a Silicon-on-insulator (SOI) (104) or insulating base and resonator wafers (108) , wherein resonator anchors (122, ...  
WO/2006/092982
Disclosed is a surface acoustic wave device comprising a piezoelectric substrate, a comb-shaped electrode formed on a first major surface of the piezoelectric substrate, and a supporting substrate bonded to a second major surface of the ...  
WO/2006/087496
The invention relates to an acoustic wave device comprising a piezoelectric layer (41) on an omnidirectional acoustic mirror (32) and excitation and/or reception means (43, 44) which are provided on a surface of said piezoelectric layer ...  
WO/2006/079765
The invention relates to a microresonator comprising a resonant element (160) which is made from monocrystalline silicon and at least one activation electrode (120, 121) which is positioned close to the resonant element, whereby the reso...  
WO/2006/080226
A process for producing a micromachine, in which the corrosion of structure can be inhibited; and a relevant micromachine. There is provided a process for producing a micromachine, characterized by including the step of conducting patter...  
WO/2006/067949
A piezoelectric thin film resonator wherein fluctuations of a resonance frequency and a resonance resistance are reduced by uniformly flattening a film constituting the resonator, and a method for manufacturing such piezoelectric thin fi...  
WO/2006/064414
The invention refers to a method for the fabrication of a thin film acoustic reflector stack with alternating layers of a first and a second material having different acoustic characteristic impedances, wherein the layers are deposited a...  
WO/2006/057128
A piezoelectric vibrator (10) has a first piezoelectric body substrate (1a) and a second piezoelectric body substrate (1c). The first piezoelectric body substrate (1a) has a first main surface (41) and a second main surface (42) that are...  
WO/2006/043343
A utilization ratio of a target material, a tact time, maintenance easiness and film forming accuracy are improved by a thin film forming apparatus. The thin film forming apparatus is provided with a vacuum chamber, a sputter cathode for...  
WO/2006/043713
A piezoelectric device wherein planar sizes can be easily reduced and TAB tape resonance designing is easily performed. Further, a sealing hole can be surely sealed in the piezoelectric device. The piezoelectric device (10) has an IC chi...  
WO/2006/035762
A method for fabricating a resonance vibration device in which a structure consisting of a support, a vibratory beam extending from the support, and a vibration element supported by the beam to perform resonance vibration as the beam vib...  
WO/2006/032335
The invention relates to a component which functions with the aid of acoustic waves, and which combines various measures in order to lower the temperature path, in particular the resonance frequency. Said component comprises a piezoelect...  
WO/2006/032363
The invention relates to a device and a method for influencing vibration of a planar element (1), comprising two opposing surfaces (15, 15') and a neutral fibre plane (2) running between both surfaces, comprising at least one actuator (9...  
WO/2006/034299
A resonator system (10) wherein a plurality of resonators (16, 18) each including piezoelectric material, are suspended relative to a substrate (12). An edge of each resonator (16, 18) is mechanically coupled to an edge of another resona...  
WO/2006/034299
A resonator system (10) wherein a plurality of resonators (16, 18) each including piezoelectric material, are suspended relative to a substrate (12). An edge of each resonator (16, 18) is mechanically coupled to an edge of another resona...  
WO/2006/030900
As a corrosion resistant metal film to crystal etching, a Cr film is used as a base layer and an Au film is used as a surface layer. After outer shape patterning is performed to a photoresist layer, the Au film is etched, a groove part p...  
WO/2006/022072
A manufacturing method of an electronic component having an electronic component element bonded and secured onto a substrate using conductive adhesive, which provides an electronic component exhibiting excellent reliability in electrical...  
WO/2006/018788
Thin-film bulk acoustic wave filters based on piezoelectric resonators operating in the thickness extensionally mode achieve relative band-widths in the order of to 4 % at a center frequency of 2 GHz. According to an exemplary embodiment...  
WO/2006/013301
The invention concerns an electromechanical resonator comprising a vibrating body (4), at least one excitation electrode (14, 16) and at least one detection electrode (10, 12), characterized in that the vibrating body comprises a first p...  
WO/2006/011417
Disclosed is a surface acoustic wave device wherein an insulator layer is so formed as to cover an IDT electrode and the surface of the insulator layer is planarized. In such a surface acoustic wave device, the electrode can have a suffi...  
WO/2006/011449
It is possible to provide a concatenated body of MEMS filters having a design flexibility and capable of ignoring the affect of the mass load. There is provided a structure in which the affect of the mass load is not reflected in the cha...  
WO/2006/006343
A piezoelectric device which has reduced sizes and improved moisture resistance and does not require sealing after being mounted on a circuit board, and a method for manufacturing such device are provided. The piezoelectric device (10) i...  
WO/2006/004470
The invention discloses a tuneable resonator (100, 200, 300, 500, 600, 700, 900) with a substrate layer (140, 260, 360, 560, 660, 960), which substrate layer supports a structure with a first electrode (130, 240, 350, 550, 650). In conne...  
WO/2006/003933
An electronic part includes: a substrate; a comb-shaped electrode having a plurality of electrode fingers arranged parallel to one another on the upper surface of the substrate; and a protection film formed on the substrate so as to cove...  
WO/2005/125007
There is provided a high-frequency element capable of stabilizing DC bias voltage applied to an electrostatic drive type vibrator and a power supply element capable of supplying a stable DC bias voltage. There is also provided a communic...  
WO/2005/125006
It is possible to provide a quartz device having a stable oscillation characteristic and a high reliability. The quartz device includes a first main surface having a part of a basic part and a part of an oscillation leg within a single p...  
WO/2005/125005
A SAW device removing the defects of prior art that a filter satisfying the standards required for the RF SAW filter of a GPS receiver could not be realized and that the performance of a circuit or an apparatus degrades when a SAW filter...  
WO/2005/122395
A small-sized highly integrated electric machine signal selecting element, which can select and output only a signal of a prescribed frequency without providing a high sensitive oscillation detecting function, and an electric device usin...  
WO/2005/114836
Plural band film bulk acoustic resonators may be formed on the same integrated circuit using lithographic techniques. As a result, high volume production of reproducible components can be achieved, wherein the resonators, as manufactured...  
WO/2005/112259
Disclosed herein is a method of manufacturing a lithium tantalate substrate for surface acoustic wave elements, which includes heating a lithium tantalate material to a temperature of not less than the Curie temperature of lithium tantal...  
WO/2005/109636
The electronic device comprises a network of at least one thin-film capacitor and at least one inductor on a first side of a substrate of a semiconductor material. The substrate has a resistivity sufficiently high to limit electrical los...  
WO/2005/109639
There are many inventions described and illustrated herein. These inventions are directed to a method of fabricating a microelectromechanical resonator having an output frequency that may be adjusted, tuned, set, defined and/or selected ...  
WO/2005/104257
An electromechanical device (201) includes a support structure (210) formed by attaching inner surfaces of second and third substrates (220a-b) to a first substrate (230). The support structure (210) includes at least one cavity (250) be...  
WO/2005/104639
When inner electrodes (22-24) are formed of a conductive paste for a multilayer ceramic board, which can be sintered at a low temperature and contraction of which at the time of baking is suppressed, the inner electrodes (22-24) contract...  
WO/2005/104361
The present invention provides an electro-mechanical device , for example , a Micro-Electro-Mechanical Systems (MEMS) device, for example a low-loss Film Bulk Acoustic Resonators (FBAR) filter, and a process to produce the same. In order...  
WO/2005/102910
Disclosed is an MEMS component that is disposed on a panel as a chip component. Each assembly point for a chip is tightly encircled by a frame structure that sits on the panel. The joint between the frame structure and the chip is sealed...  
WO/2005/099090
A surface acoustic wave filter for preventing a large void from being generated at the time of pressing a resin sheet covering an element chip while heating the resin sheet, and a method for manufacturing the surface acoustic wave filter...  

Matches 301 - 350 out of 11,095