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Matches 751 - 800 out of 6,666

Document Document Title
JP2018148473A
To provide a structure of a MEMS device which prevents film breakage while improving the sensitivity of the MEMS device.A movable electrode 8 has a multilayer structure composed of membrane layers 4, 7 having different thicknesses, and a...  
JP6390423B2  
JP2018526946A
A probe assembly (650) contains the modular device (670) which detects an external signal or releases energy. A modular device (670) has a device array (676) containing at least one of electric contact or the optical fiber ends. A probe ...  
JP6388833B2  
JPWO2018047585A1
An ultrasonic probe with the structure for manufacturing that by which the plurality of the piezoelectric element was arranged in the shape of an array at the fixed interval with a sufficient product yield array type [as a device] is pro...  
JP6384260B2  
JP2018524942A
A microphone is provided with the housing and conversion element containing the lower part and the upper part, and a conversion element is arranged in a housing and connected with the lower part electrically and mechanically. In order to...  
JP6381195B2  
JP2018129725A
To improve reception characteristics and transmission characteristics by reducing a parasitic capacitance and wiring resistance in a CMUT (capacitive micromachined ultrasonic transducer).A capacitive micromachined ultrasonic transducer i...  
JP2018129402A
To provide a piezoelectric element and a manufacturing method therefor capable of increasing an amount of displacement of a diaphragm by controlling an initial deflected position to an upper convex structure by a piezoelectric layer and ...  
JP2018118356A
To provide a MEMS element of which breakage is prevented, and a method for manufacturing said MEMS element.The MEMS element is provided in which an air gap is formed by arranging a silicon substrate 1 comprising a back chamber 11, and a ...  
JP6365853B2  
JP6365690B2  
JP6365726B2  
JP6364900B2  
JP2018117203A
To provide a bone conduction vibrator capable of improving quality and production efficiency, while simultaneously stabilizing quality, and to provide manufacturing method thereof.A bone conduction vibrator includes a cylindrical frame 2...  
JP2018117206A
To provide a MEMS element capable of achieving an improvement in sensitivity and miniaturization at the same time, and a method of manufacturing the same.A MEMS element in which a movable electrode 3 and a fixed electrode 5 formed on a s...  
JPWO2017115521A1
[Subject] The manufacturing method of the pronouncing device as for which curvature of an armature which operates a diaphragm is made to the minimum is provided. [Means for Solution] Armature 32 is vibrated and diaphragm 11 is made to dr...  
JP6361897B2  
JP6363097B2  
JP6362741B2  
JP6358795B2  
JP2018110282A
To provide a manufacturing method of a capacitive transducer which accurately confirms completion of etching of a sacrificial layer to reduce sensitivity and variation.In a manufacturing method of a capacitive transducer which forms a ga...  
JP6357275B2  
JPWO2017018313A1
Conversion efficiency is high and provides an electroacoustic transduction film renewable with sufficient volume and a manufacturing method for the same, an electroacoustic transducer, a flexible display, a vocal-cords microphone, and a ...  
JPWO2017042997A1
[Subject] Provide a manufacturing method of an ultrasonic array vibrator and an ultrasonic array vibrator, an ultrasonic probe, and ultrasonic diagnostic equipment which the impedance match effect was high and were excellent in productiv...  
JP2018098591A
To provide a capacitive transducer capable of restraining deterioration in transmission efficiency and reception sensitivity by restraining deterioration in membrane utilization efficiency, and a method of manufacturing the capacitive tr...  
JP6345926B2  
JP2018093459A
To provide a method of forming a silica gel diaphragm excellent in performance with simple process.A formation method of silica gel diaphragm 100 includes at least a step of preparing a hot press mold, and placing at least a dome, as a m...  
JPWO2017081806A1
The vibration portion which vibrates to a substrate and an account board perpendicularly [the 1 side of the present invention], A vibration portion has a supporter which connects the opposite portion which counters via one or more caves,...  
JP2018093380A
To provide: a method for manufacturing an ultrasonic device, which enables the increase in resolution of an image produced based on ultrasonic waves by reducing the variation in thickness of an acoustic matching layer; a method for manuf...  
JP2018093467A
To provide an electrostatic type transducer of good handleability while increasing the number of laminations by application of a method for winding like a roll, and a method for manufacturing the same.An electrostatic type transducer 1 c...  
JP6337080B2  
JP6337026B2  
JP6333547B2  
JPWO2016194208A1
超音波トランスデューサ素子を、基板と、前 記基板の第1主面上に形成された下部電極と 、前記下部電極上に形成された第1絶縁膜と 、前記第1絶縁膜上に形成された第1空...  
JP6328131B2  
JP2018078565A
To reduce size of a semiconductor sensor, and to enhance sensor sensitivity.A deep groove is formed in a thickness direction of a substrate such as a semiconductor substrate. A thin plate is stuck to upper surfaces and/or lower surfaces ...  
JP2018512769A
It is an ultrasonic array for sound wave transmission containing at least one CMUT cell, and is a CMUT cell, It is the 1st electrode and a cell film which has the 1st electrode and the 2nd electrode that counters on both sides of a cavit...  
JP6323671B2  
JP6325310B2  
JP2018070956A
To provide a manufacturing method of a high aspect ratio structure for manufacturing the high aspect ratio structure capable of reducing generation of sticking, a manufacturing method of an ultrasonic probe, the high aspect ratio structu...  
JP2018074529A
To provide an ultrasonic probe, an ultrasonic diagnostic device, and a method of manufacturing the ultrasonic probe that can restrain characteristic variations of ultrasonic waves transmitted and received by a plurality of piezoelectric ...  
JP2018074427A
To satisfactorily perform sensitivity adjustment without enlarging an ASIC and without enlarging a size or increasing cost even in a MEMS element.The present invention relates to a MEMS element comprising a stationary electrode 3 and a m...  
JP6320812B2  
JP6320189B2  
JP6317996B2  
JP2018064150A
To provide a method for manufacturing a vibration plate of a speaker, which enables the improvement of the vibration plate in heat resistance, durability and acoustic characteristics.Disclosed is a method for manufacturing a vibration pl...  
JP6311800B2  
JP6311104B2  

Matches 751 - 800 out of 6,666