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Matches 451 - 500 out of 12,777

Document Document Title
WO/2013/143733A1
A fuel supply for an EUV radiation source is disclosed. The fuel supply comprises a reservoir (40) for retaining a volume of fuel (42), a nozzle (32), in fluid connection with the reservoir, and configured to direct a stream of fuel alon...  
WO/2013/144690A1
A laser apparatus may include a master oscillator, an optical unit provided in a beam path of a laser beam from the master oscillator, a beam adjusting unit provided upstream from the optical unit in a beam path of the laser beam and con...  
WO/2013/149004A1
An x-ray generator includes a voltage source and a voltage divider network coupled thereto, a housing, and an insulator carried within the housing. An emitter cathode is carried within the housing and emits electrons and undesirable cond...  
WO/2013/142603A1
Medical devices and methods for determining the size of blood vessels are disclosed. In an embodiment, a blood vessel sizing device includes a marker configured for placement on the skin of a patient. The marker defines a substantially c...  
WO/2013/141580A1
The present invention relates to an extreme ultraviolet (EUV) light generating device for stabilization and improving energy efficiency through laser beam correction. The EUV plasma generation device according to the present invention in...  
WO/2013/141578A1
The present invention relates to an apparatus for generating extreme ultraviolet light by means of plasma, the apparatus comprising: a laser source for outputting laser; a tunable laser mirror (TLM) for reflecting laser beams from the la...  
WO/2013/135550A1
In order to predict the lifetime of an X-ray generator, the data of at least one physical variable which influences the lifetime of the generator are regularly stored. The stored data are evaluated by means of stored statistics in order ...  
WO/2013/131693A1
An ion capture apparatus for a laser produced plasma (LPP) radiation source apparatus comprises a magnetic field generator and two magnetic cores (350). The two magnetic cores are arranged to channel a magnetic field (330) generated by s...  
WO/2013/131628A1
New kinds of moderate-load X-ray source devices are described, with reduced weight and size, thus being especially suitable for compact portable X-ray sources, such as those required for hand-held dental and veterinarian applications. Th...  
WO/2013/133135A1
This X-ray generation device is provided with the following: an electron-beam generation means that generates an electron beam; a laser-light generation means that generates laser light such that said laser light, which generates X-rays ...  
WO/2013/131706A1
The present invention provides a method of monitoring the operation of a radiation source fuel droplet stream generator comprising a fuel-containing capillary and a piezo-electric actuator (500). The method comprises analysing the resona...  
WO/2013/129067A1
An X-ray irradiation device (1) is provided with: a plurality of X-ray irradiation units (3), each having an X-ray tube (6) for generating X-rays, a drive circuit (15) for driving the X-ray tube (6), and a main wire (22) connected to the...  
WO/2013/127587A3
A source collector apparatus includes a plasma generation apparatus arranged to excite a fuel to form a radiation emitting plasma, a collector arranged to collect the radiation, and a contamination receiving apparatus, wherein the contam...  
WO/2013/129068A1
In an X-ray radiation source (2), by fastening a lid (31c) to a main body (35) with screws (65), an X-ray tube (21) is secured to a case (31) with the X-ray tube (21) being pressed against the inner surface of a wall (31a) by a first cir...  
WO/2013/129069A1
An X-ray irradiation unit (3) is provided with: an X-ray tube (6) for generating X-rays; an operating life detection circuit (15b) for detecting the operating life of the X-ray tube (6); and a display circuit (15c) for externally indicat...  
WO/2013/124101A3
A fuel stream generator comprising a nozzle connected to a fuel reservoir, wherein the nozzle is provided with a gas inlet configured to provide a sheath of gas around fuel flowing along the nozzle is disclosed. Also disclosed are a meth...  
WO/2013/124101A2
A fuel stream generator comprising a nozzle connected to a fuel reservoir, wherein the nozzle is provided with a gas inlet configured to provide a sheath of gas around fuel flowing along the nozzle is disclosed. Also disclosed are a meth...  
WO/2013/122505A1
The invention relates to a device and a method for generating powerful extreme ultraviolet or soft x-ray radiation. The field of use includes EUV lithography in the production of integrated circuits, and also metrology. The device compri...  
WO/2013/117355A1
The present invention provides methods and apparatus for facilitating the start up of a fuel droplet stream generator. During a start-up phase the fuel droplet stream generator is positioned so that the fuel droplets re emitted downwardl...  
WO/2013/116549A1
The present specification discloses a multi-view X-ray inspection system having, in one of several embodiments, a three-view configuration with three X-ray sources. Each X-ray source rotates and is configured to emit a rotating X-ray pen...  
WO/2013/110968A1
An apparatus for generating extreme ultraviolet light may include a reference member (9), a chamber (2) fixed to the reference member, the chamber including at least one window (38), a laser beam introduction optical system (50) configur...  
WO/2013/107686A3
A source-collector device is constructed and arranged to generate a radiation beam. The device includes a target unit constructed and arranged to present a target surface (301) of plasma-forming material; a laser unit (50) constructed an...  
WO/2013/107660A1
A beam guidance system (4) is used for the focusing guidance of radiation (3) from a high-power laser light source (2) onto a target (5). The beam guidance system (4) has at least one mirror (7) as a reflective beam guidance component an...  
WO/2013/105011A3
A fluoroscopic system is disclosed with capability of differential exposure of different input areas of an image intensifier. The x-ray beam solid angle is limited by a collimator that is relatively near to the focal point of the x-ray t...  
WO/2013/104947A1
A device is provided for controlling a laser beam. The device may include a first wavefront adjuster (81) provided in a beam path of a laser beam outputted from a laser apparatus (3), a beam delivery unit (50) provided in a beam path of ...  
WO/2013/102426A1
A radiation device installation box and an X-ray generator. The radiation device installation box includes a box body (1), a convex edge (18) fixed on the inner wall of the box body (1) and in a ring shape and a compensation apparatus wh...  
WO/2013/102427A1
A radiation device installation case, oil cooled circulation system and X-ray generator, solving the technical problems of poor X-ray generator sealing property, heavy X-ray generator case or large amount of X-ray leakage; the radiation ...  
WO/2013/092094A1
A method of treating or operating a radiation source apparatus (SO), for instance for generating EUV radiation for device lithography, is disclosed. The method is for use with radiation source apparatus having a chamber (220) arranged to...  
WO/2013/095760A1
An x-ray source can include an x-ray tube and a power supply. The x-ray tube can be removably affixed to the power supply in a rigid manner with the x-ray tube movable and holdable along with the power supply when affixed thereto. A rele...  
WO/2013/083335A3
A radiation source (SO) suitable for providing a beam of radiation to an illuminator of a lithographic apparatus. The radiation source comprises a nozzle (128) configured to direct a stream of fuel droplets along a trajectory (140) towar...  
WO/2013/081179A1
In a radiation generating apparatus of the invention, a radiation tube (2) having a cathode (11) for emitting an electron and an anode (14) for generating a radiation by an irradiation of the electron emitted from the cathode is enclosed...  
WO/2013/072165A3
In a discharge-produced plasma source, a pair of electrodes is charged using a transmission line. In an embodiment, a pair of transmission lines may be used, connected symmetrically to the electrodes. The impedance of the transmission li...  
WO/2013/072828A1
The invention relates to a radiation application apparatus for applying radiation at a location within an object. The radiation application apparatus comprises a transforming unit (2) for being arranged within the object at the location ...  
WO/2013/074032A1
The disclosure is related to an apparatus, systems and methods for producing X-ray images. More particularly, the disclosure relates to a mobile X-ray apparatus for medical examination. The disclosure provide for fast, easy and safe tran...  
WO/2013/065762A1
Provided is a radiation emission device equipped with: a metal target that, when an electron beam is emitted thereto, radiates bremsstrahlung X-rays as radiation beams; a radiation blocking body which has a slit-shaped radiation transmis...  
WO/2013/065703A1
In order to provide an X-ray high voltage apparatus that can reduce power loss and temperature rise in a step-up circuit, a step-up circuit operating period during which the output voltage of a step-up circuit (20) is controlled to match...  
WO/2013/061051A1
An apparatus for generating x-rays comprises an electron beam generator and a first device (4) arranged to apply an RF electric field to accelerate the electron beam from the generator. A photon source is arranged to provide photons to a...  
WO/2013/055975A3
An X-ray imager includes a photo detector, a pixel array, a scan line and a data line. The photo detector includes a plurality of X-ray sensitive particles that are configured to be electrically isolating and to generate charge carriers ...  
WO/2013/054163A1
An alignment system for a laser apparatus includes a guide laser device outputting a guide laser beam, an adjusting mechanism adjusting travel directions of the guide laser beam and a laser beam from the laser apparatus, a beam path comb...  
WO/2013/050736A3
A high-harmonic optical generator (100) comprising a laser arrangement (102) and an optical waveguide (104), wherein the laser arrangement is configured to couple a beam (E) of linearly polarized radiation at a fundamental frequency (COQ...  
WO/2013/051338A1
This radiation generating apparatus is provided with: a fuel storage unit (20) which stores a mixed liquid (61); a pressure application unit (10) which applies a pressure to the mixed liquid (61); a jet formation unit (30) which forms a ...  
WO/2013/050842A1
A system (11A) for generating extreme ultraviolet light, in which a target material (27) inside a chamber (2A) is irradiated with a laser beam to be turned into plasma, includes a first laser apparatus (40) configured to output a first l...  
WO/2013/050212A1
A radiation source suitable for providing a beam of radiation to an illuminator of a lithographic apparatus. The radiation source comprises a nozzle configured to direct a stream of fuel droplets along a trajectory towards a plasma forma...  
WO/2013/050736A2
A high harmonic optical generator comprising a laser arrangement and an optical waveguide, wherein the laser arrangement is configured to couple a beam of linearly polarized radiation at a fundamental frequency into the optical waveguide...  
WO/2013/042514A1
In the present radiography system, a still image is captured by means of a pre-exposure ahead of moving picture imaging, and on the basis of the still image resulting from the pre-exposure, an ROI is set, and ABC control is prohibited un...  
WO/2013/041323A1
A radiation source having a fuel stream generator (110) that generates and directs a fuel stream (102) along a trajectory towards a plasma formation location (104). A pre-pulse laser radiation assembly directs a first beam of laser radia...  
WO/2013/042812A1
The present invention relates to an integral apparatus for generating x-rays, in which a high-voltage generation portion and an x-ray generation portion are integrally coupled to the inside of a housing, and more specifically, to an inte...  
WO/2013/038287A1
The present invention relates to X-ray radiation with multiple photon energies. To provide an X-ray tube capable of generating multiple-energy X-ray radiation with an improved switching capacity and a reduced design setup, a multiple-ene...  
WO/2013/035893A1
This invention generally refers to a new generation of transmission x-ray tubes which can produce high quality medical images with the x-ray tube considerably closer to patients consequently reducing space required to generate images and...  
WO/2013/029897A1
A radiation source comprises a nozzle configured to direct a stream of fuel droplets (400) along a trajectory towards a plasma formation location and a laser configured to direct laser radiation to the plasma formation location to conver...  

Matches 451 - 500 out of 12,777