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Matches 451 - 500 out of 12,833

Document Document Title
WO/2014/016139A1
An EUV light source (2) for a projection exposure apparatus (1) for EUV projection lithography comprises a first electron beam device in the form of an electron beam supply device (2a). The light source (2) furthermore includes an EUV ge...  
WO/2014/017766A1
A digital X-ray source is disclosed. The device is an X-ray source comprising an X-ray generation unit for emitting X-rays, the X-ray generation unit comprising: a cathode electrode; an emitter formed on the cathode electrode; an anode e...  
WO/2014/013645A1
Provided is an industrial X-ray generator (1) wherein X-rays are generated by hitting a target (25) with an electron emitted from a filament (24). The industrial X-ray generator includes a circuit for applying a tube voltage between the ...  
WO/2014/006193A1
A method for controlling an interaction between droplet targets (4b) and a high power and high-repetition-rate laser beam (2) at a laser focus position (2b) of said laser beam (2), comprising the steps of · providing a droplet generator...  
WO/2014/006427A1
A system for generating a focused gamma ray beam having: means for generating a converging electron beam; and a target positioned before the focal point of the converging electron beam, wherein the electron beam and target are selected a...  
WO/2014/000998A1
A laser driven light source comprises laser (52) and focusing optics (54). These produce a beam of radiation focused on a plasma forming zone within a container (40) containing a gas (e.g., Xe). Collection optics (44) collects photons em...  
WO/2013/190412A1
A voltage multiplier 10 comprises a series of multiplier stages 12a, 12b, 12c, 12d. Each multiplier stage, for example 12b, comprises a first input 16b, a second input 14b, a first output 16c and second output 14c. The first and second o...  
WO/2013/190944A1
An extreme ultraviolet light generation system configured so as to generate extreme ultraviolet light by irradiating a target with first pulse laser light and second pulse laser light to convert the target into plasma. The extreme ultrav...  
WO/2013/189827A3
A radiation source (SO) comprising a fuel source configured to deliver fuel to a location (12) from which the fuel emits EUV radiation. The radiation source further comprises an immobile fuel debris receiving surface (24c, d) provided wi...  
WO/2013/188567A1
A high energy radiation generator utilizes sliding friction in a low pressure environment to generate high energy radiation, for example x-rays. The sliding friction may be generated by sweeping one material against a second material, fo...  
WO/2013/186052A1
An EUV excitation light source (1) with a beam guiding device (22) for manipulating at least one laser beam (10, 12) is provided. The beam guiding device (22) has at least one beam splitter (2) for generating at least two separated beams...  
WO/2013/178292A1
The invention relates to a spark gap with a capacitive energy accumulator. According to the invention, said spark gap (14, 15) is fed via a plurality of annularly arranged capacitors (19), said capacitors being electrically connected to ...  
WO/2013/180007A1
An extreme UV light generation device, which may be configured so as to generate extreme UV light by beaming laser light onto the target and causing the target to turn into a plasma. The extreme UV light generation device may be provid...  
WO/2013/174620A1
A radiation source for generating EUV radiation suitable for use in a lithographic apparatus includes a laser configured to fire laser pulses at a target area to which is supplied a stream of fuel droplets. The fuel droplets may be tin d...  
WO/2013/174525A1
The present invention provides a method for generating electromagnetic radiation which is preferably extreme ultraviolet and/or soft x-ray radiation from a plasma, comprising the steps: Accelerating a radiation fuel which is preferably a...  
WO/2013/172320A1
In order to provide a control technology for an inverter circuit with which switching loss can be reduced and a high power factor can be maintained regardless of load deviations, the direct current voltage supplied to an inverter (4) is ...  
WO/2013/168468A1
This X-ray generation device (1) is provided with: an electron gun section (3) that emits an electron beam (EB);, and a target section (T). Said target section (T) that comprises: a substrate (21) comprising diamond; and a target body (2...  
WO/2013/157475A1
An objective of the present invention is to carry out a stable AEC which is not affected by geometric positioning misalignment of a grid and a dose detection sensor with small concern for image quality declines and without involving time...  
WO/2013/157476A1
An objective of the present invention is to carry out a stable AEC which is not affected by geometric positioning misalignment of a grid and a dose detection sensor with a small concern for image quality declines and without involving ti...  
WO/2013/153156A1
A method for producing electromagnetic radiation comprising : firing a first laser pulse and generating a plasma region, said first laser pulse penetrating at least partially into said plasma region to create a plasma density wake in sai...  
WO/2013/150884A1
To provide a method for controlling an X-ray image diagnosis device and X-ray generation device equipped with an ABS system for tracking movement of a subject position without an operator having to carry out an operation for setting a re...  
WO/2013/149953A1
The present invention is directed to a method for stabilizing a plasma comprising: a. providing in an ionization chamber a number of high voltage wires and a gas suitable for forming a plasma b. exposing the gas to a high voltage thereby...  
WO/2013/144693A3
A laser apparatus may include, a first frame (81) and a second frame (82), a sleeve through-hole (88) provided in the second frame (82), a sleeve insertion hole (86) provided in the first frame (81), a screw (86), a positioning sleeve (8...  
WO/2013/144742A1
A medical imaging device 10 comprises an inverter 12 with semiconductor switches 26 for generating an AC voltage to be supplied to a load20, 22, a coil 32 inductively coupled to a conductor 34 of the inverter 12 connected with a semicond...  
WO/2013/148518A1
An x-ray generator device includes a housing at least partially holding a specific fluid pressure, with an arm positioned to be able to strike a strike plate within the housing. The housing contains an x-ray window. The arm is magnetical...  
WO/2013/143733A1
A fuel supply for an EUV radiation source is disclosed. The fuel supply comprises a reservoir (40) for retaining a volume of fuel (42), a nozzle (32), in fluid connection with the reservoir, and configured to direct a stream of fuel alon...  
WO/2013/144690A1
A laser apparatus may include a master oscillator, an optical unit provided in a beam path of a laser beam from the master oscillator, a beam adjusting unit provided upstream from the optical unit in a beam path of the laser beam and con...  
WO/2013/149004A1
An x-ray generator includes a voltage source and a voltage divider network coupled thereto, a housing, and an insulator carried within the housing. An emitter cathode is carried within the housing and emits electrons and undesirable cond...  
WO/2013/142603A1
Medical devices and methods for determining the size of blood vessels are disclosed. In an embodiment, a blood vessel sizing device includes a marker configured for placement on the skin of a patient. The marker defines a substantially c...  
WO/2013/141580A1
The present invention relates to an extreme ultraviolet (EUV) light generating device for stabilization and improving energy efficiency through laser beam correction. The EUV plasma generation device according to the present invention in...  
WO/2013/141578A1
The present invention relates to an apparatus for generating extreme ultraviolet light by means of plasma, the apparatus comprising: a laser source for outputting laser; a tunable laser mirror (TLM) for reflecting laser beams from the la...  
WO/2013/135550A1
In order to predict the lifetime of an X-ray generator, the data of at least one physical variable which influences the lifetime of the generator are regularly stored. The stored data are evaluated by means of stored statistics in order ...  
WO/2013/131693A1
An ion capture apparatus for a laser produced plasma (LPP) radiation source apparatus comprises a magnetic field generator and two magnetic cores (350). The two magnetic cores are arranged to channel a magnetic field (330) generated by s...  
WO/2013/131628A1
New kinds of moderate-load X-ray source devices are described, with reduced weight and size, thus being especially suitable for compact portable X-ray sources, such as those required for hand-held dental and veterinarian applications. Th...  
WO/2013/133135A1
This X-ray generation device is provided with the following: an electron-beam generation means that generates an electron beam; a laser-light generation means that generates laser light such that said laser light, which generates X-rays ...  
WO/2013/131706A1
The present invention provides a method of monitoring the operation of a radiation source fuel droplet stream generator comprising a fuel-containing capillary and a piezo-electric actuator (500). The method comprises analysing the resona...  
WO/2013/129067A1
An X-ray irradiation device (1) is provided with: a plurality of X-ray irradiation units (3), each having an X-ray tube (6) for generating X-rays, a drive circuit (15) for driving the X-ray tube (6), and a main wire (22) connected to the...  
WO/2013/127587A3
A source collector apparatus includes a plasma generation apparatus arranged to excite a fuel to form a radiation emitting plasma, a collector arranged to collect the radiation, and a contamination receiving apparatus, wherein the contam...  
WO/2013/129068A1
In an X-ray radiation source (2), by fastening a lid (31c) to a main body (35) with screws (65), an X-ray tube (21) is secured to a case (31) with the X-ray tube (21) being pressed against the inner surface of a wall (31a) by a first cir...  
WO/2013/129069A1
An X-ray irradiation unit (3) is provided with: an X-ray tube (6) for generating X-rays; an operating life detection circuit (15b) for detecting the operating life of the X-ray tube (6); and a display circuit (15c) for externally indicat...  
WO/2013/124101A3
A fuel stream generator comprising a nozzle connected to a fuel reservoir, wherein the nozzle is provided with a gas inlet configured to provide a sheath of gas around fuel flowing along the nozzle is disclosed. Also disclosed are a meth...  
WO/2013/124101A2
A fuel stream generator comprising a nozzle connected to a fuel reservoir, wherein the nozzle is provided with a gas inlet configured to provide a sheath of gas around fuel flowing along the nozzle is disclosed. Also disclosed are a meth...  
WO/2013/122505A1
The invention relates to a device and a method for generating powerful extreme ultraviolet or soft x-ray radiation. The field of use includes EUV lithography in the production of integrated circuits, and also metrology. The device compri...  
WO/2013/117355A1
The present invention provides methods and apparatus for facilitating the start up of a fuel droplet stream generator. During a start-up phase the fuel droplet stream generator is positioned so that the fuel droplets re emitted downwardl...  
WO/2013/116549A1
The present specification discloses a multi-view X-ray inspection system having, in one of several embodiments, a three-view configuration with three X-ray sources. Each X-ray source rotates and is configured to emit a rotating X-ray pen...  
WO/2013/110968A1
An apparatus for generating extreme ultraviolet light may include a reference member (9), a chamber (2) fixed to the reference member, the chamber including at least one window (38), a laser beam introduction optical system (50) configur...  
WO/2013/107686A3
A source-collector device is constructed and arranged to generate a radiation beam. The device includes a target unit constructed and arranged to present a target surface (301) of plasma-forming material; a laser unit (50) constructed an...  
WO/2013/107660A1
A beam guidance system (4) is used for the focusing guidance of radiation (3) from a high-power laser light source (2) onto a target (5). The beam guidance system (4) has at least one mirror (7) as a reflective beam guidance component an...  
WO/2013/105011A3
A fluoroscopic system is disclosed with capability of differential exposure of different input areas of an image intensifier. The x-ray beam solid angle is limited by a collimator that is relatively near to the focal point of the x-ray t...  
WO/2013/104947A1
A device is provided for controlling a laser beam. The device may include a first wavefront adjuster (81) provided in a beam path of a laser beam outputted from a laser apparatus (3), a beam delivery unit (50) provided in a beam path of ...  

Matches 451 - 500 out of 12,833