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Matches 501 - 550 out of 12,887

Document Document Title
WO/2013/129067A1
An X-ray irradiation device (1) is provided with: a plurality of X-ray irradiation units (3), each having an X-ray tube (6) for generating X-rays, a drive circuit (15) for driving the X-ray tube (6), and a main wire (22) connected to the...  
WO/2013/127587A3
A source collector apparatus includes a plasma generation apparatus arranged to excite a fuel to form a radiation emitting plasma, a collector arranged to collect the radiation, and a contamination receiving apparatus, wherein the contam...  
WO/2013/129068A1
In an X-ray radiation source (2), by fastening a lid (31c) to a main body (35) with screws (65), an X-ray tube (21) is secured to a case (31) with the X-ray tube (21) being pressed against the inner surface of a wall (31a) by a first cir...  
WO/2013/129069A1
An X-ray irradiation unit (3) is provided with: an X-ray tube (6) for generating X-rays; an operating life detection circuit (15b) for detecting the operating life of the X-ray tube (6); and a display circuit (15c) for externally indicat...  
WO/2013/124101A3
A fuel stream generator comprising a nozzle connected to a fuel reservoir, wherein the nozzle is provided with a gas inlet configured to provide a sheath of gas around fuel flowing along the nozzle is disclosed. Also disclosed are a meth...  
WO/2013/124101A2
A fuel stream generator comprising a nozzle connected to a fuel reservoir, wherein the nozzle is provided with a gas inlet configured to provide a sheath of gas around fuel flowing along the nozzle is disclosed. Also disclosed are a meth...  
WO/2013/122505A1
The invention relates to a device and a method for generating powerful extreme ultraviolet or soft x-ray radiation. The field of use includes EUV lithography in the production of integrated circuits, and also metrology. The device compri...  
WO/2013/117355A1
The present invention provides methods and apparatus for facilitating the start up of a fuel droplet stream generator. During a start-up phase the fuel droplet stream generator is positioned so that the fuel droplets re emitted downwardl...  
WO/2013/116549A1
The present specification discloses a multi-view X-ray inspection system having, in one of several embodiments, a three-view configuration with three X-ray sources. Each X-ray source rotates and is configured to emit a rotating X-ray pen...  
WO/2013/110968A1
An apparatus for generating extreme ultraviolet light may include a reference member (9), a chamber (2) fixed to the reference member, the chamber including at least one window (38), a laser beam introduction optical system (50) configur...  
WO/2013/107686A3
A source-collector device is constructed and arranged to generate a radiation beam. The device includes a target unit constructed and arranged to present a target surface (301) of plasma-forming material; a laser unit (50) constructed an...  
WO/2013/107660A1
A beam guidance system (4) is used for the focusing guidance of radiation (3) from a high-power laser light source (2) onto a target (5). The beam guidance system (4) has at least one mirror (7) as a reflective beam guidance component an...  
WO/2013/105011A3
A fluoroscopic system is disclosed with capability of differential exposure of different input areas of an image intensifier. The x-ray beam solid angle is limited by a collimator that is relatively near to the focal point of the x-ray t...  
WO/2013/104947A1
A device is provided for controlling a laser beam. The device may include a first wavefront adjuster (81) provided in a beam path of a laser beam outputted from a laser apparatus (3), a beam delivery unit (50) provided in a beam path of ...  
WO/2013/102426A1
A radiation device installation box and an X-ray generator. The radiation device installation box includes a box body (1), a convex edge (18) fixed on the inner wall of the box body (1) and in a ring shape and a compensation apparatus wh...  
WO/2013/102427A1
A radiation device installation case, oil cooled circulation system and X-ray generator, solving the technical problems of poor X-ray generator sealing property, heavy X-ray generator case or large amount of X-ray leakage; the radiation ...  
WO/2013/092094A1
A method of treating or operating a radiation source apparatus (SO), for instance for generating EUV radiation for device lithography, is disclosed. The method is for use with radiation source apparatus having a chamber (220) arranged to...  
WO/2013/095760A1
An x-ray source can include an x-ray tube and a power supply. The x-ray tube can be removably affixed to the power supply in a rigid manner with the x-ray tube movable and holdable along with the power supply when affixed thereto. A rele...  
WO/2013/083335A3
A radiation source (SO) suitable for providing a beam of radiation to an illuminator of a lithographic apparatus. The radiation source comprises a nozzle (128) configured to direct a stream of fuel droplets along a trajectory (140) towar...  
WO/2013/081179A1
In a radiation generating apparatus of the invention, a radiation tube (2) having a cathode (11) for emitting an electron and an anode (14) for generating a radiation by an irradiation of the electron emitted from the cathode is enclosed...  
WO/2013/072165A3
In a discharge-produced plasma source, a pair of electrodes is charged using a transmission line. In an embodiment, a pair of transmission lines may be used, connected symmetrically to the electrodes. The impedance of the transmission li...  
WO/2013/072828A1
The invention relates to a radiation application apparatus for applying radiation at a location within an object. The radiation application apparatus comprises a transforming unit (2) for being arranged within the object at the location ...  
WO/2013/074032A1
The disclosure is related to an apparatus, systems and methods for producing X-ray images. More particularly, the disclosure relates to a mobile X-ray apparatus for medical examination. The disclosure provide for fast, easy and safe tran...  
WO/2013/065762A1
Provided is a radiation emission device equipped with: a metal target that, when an electron beam is emitted thereto, radiates bremsstrahlung X-rays as radiation beams; a radiation blocking body which has a slit-shaped radiation transmis...  
WO/2013/065703A1
In order to provide an X-ray high voltage apparatus that can reduce power loss and temperature rise in a step-up circuit, a step-up circuit operating period during which the output voltage of a step-up circuit (20) is controlled to match...  
WO/2013/061051A1
An apparatus for generating x-rays comprises an electron beam generator and a first device (4) arranged to apply an RF electric field to accelerate the electron beam from the generator. A photon source is arranged to provide photons to a...  
WO/2013/055975A3
An X-ray imager includes a photo detector, a pixel array, a scan line and a data line. The photo detector includes a plurality of X-ray sensitive particles that are configured to be electrically isolating and to generate charge carriers ...  
WO/2013/054163A1
An alignment system for a laser apparatus includes a guide laser device outputting a guide laser beam, an adjusting mechanism adjusting travel directions of the guide laser beam and a laser beam from the laser apparatus, a beam path comb...  
WO/2013/050736A3
A high-harmonic optical generator (100) comprising a laser arrangement (102) and an optical waveguide (104), wherein the laser arrangement is configured to couple a beam (E) of linearly polarized radiation at a fundamental frequency (COQ...  
WO/2013/051338A1
This radiation generating apparatus is provided with: a fuel storage unit (20) which stores a mixed liquid (61); a pressure application unit (10) which applies a pressure to the mixed liquid (61); a jet formation unit (30) which forms a ...  
WO/2013/050842A1
A system (11A) for generating extreme ultraviolet light, in which a target material (27) inside a chamber (2A) is irradiated with a laser beam to be turned into plasma, includes a first laser apparatus (40) configured to output a first l...  
WO/2013/050212A1
A radiation source suitable for providing a beam of radiation to an illuminator of a lithographic apparatus. The radiation source comprises a nozzle configured to direct a stream of fuel droplets along a trajectory towards a plasma forma...  
WO/2013/050736A2
A high harmonic optical generator comprising a laser arrangement and an optical waveguide, wherein the laser arrangement is configured to couple a beam of linearly polarized radiation at a fundamental frequency into the optical waveguide...  
WO/2013/042514A1
In the present radiography system, a still image is captured by means of a pre-exposure ahead of moving picture imaging, and on the basis of the still image resulting from the pre-exposure, an ROI is set, and ABC control is prohibited un...  
WO/2013/041323A1
A radiation source having a fuel stream generator (110) that generates and directs a fuel stream (102) along a trajectory towards a plasma formation location (104). A pre-pulse laser radiation assembly directs a first beam of laser radia...  
WO/2013/042812A1
The present invention relates to an integral apparatus for generating x-rays, in which a high-voltage generation portion and an x-ray generation portion are integrally coupled to the inside of a housing, and more specifically, to an inte...  
WO/2013/038287A1
The present invention relates to X-ray radiation with multiple photon energies. To provide an X-ray tube capable of generating multiple-energy X-ray radiation with an improved switching capacity and a reduced design setup, a multiple-ene...  
WO/2013/035893A1
This invention generally refers to a new generation of transmission x-ray tubes which can produce high quality medical images with the x-ray tube considerably closer to patients consequently reducing space required to generate images and...  
WO/2013/029897A1
A radiation source comprises a nozzle configured to direct a stream of fuel droplets (400) along a trajectory towards a plasma formation location and a laser configured to direct laser radiation to the plasma formation location to conver...  
WO/2013/029895A1
According to a first aspect of the present invention, there is provided a radiation source comprising: a nozzle configured to direct a stream of fuel droplets (70) along a trajectory towards a plasma formation location; a laser configure...  
WO/2013/029902A1
Methods and apparatus are provided for promoting the coalescence of fuel droplets in a stream generated by a radiation source droplet stream generator for use in lithographic apparatus. Various examples are described in which a modulatin...  
WO/2013/029896A1
A radiation source for generating EUV from a stream of molten metal fuel droplets by LPP (Laser Produced Plasma) or (Dual Laser Plasma) has a fuel droplet generator arranged to provide a stream of droplets of fuel and at least one laser ...  
WO/2013/031666A1
Provided are a radiation imaging system and radiation imaging method, wherein a system control unit comprises: a radiation imaging trial unit which, if a gradation value is different from a predicted result, exercises control by varying ...  
WO/2013/029906A1
A radiation source (60) suitable for providing a beam of radiation to an illuminator of a lithographic apparatus. The radiation source comprises a nozzle configured to direct a stream of fuel droplets (62) along a trajectory (64) towards...  
WO/2013/029898A1
A radiation source having a nozzle configured to direct a stream of fuel droplets along a trajectory towards a plasma formation location, a laser configured to direct laser radiation at the fuel droplets at the plasma formation location ...  
WO/2013/028272A1
An apparatus includes a drive laser system producing an amplified light beam of pulses that travels along a drive axis; a beam delivery system that directs the amplified light beam of pulses toward a target region; a target material deli...  
WO/2013/027817A1
In a radiography system and radiography method according to the present invention, the radiography system comprises a system control unit which controls a radiography device to execute radiography at a set frame rate. The system control ...  
WO/2013/023710A1
A radiation source includes: a nozzle configured to direct a stream of fuel droplets (30) along a trajectory towards a plasma formation location; a laser configured to output laser radiation, the laser radiation directed at the fuel drop...  
WO/2013/024316A3
The invention relates to a method for generating electromagnetic radiation (preferebly UV, VUV, XUV, or X-rays), to an optical short-period undulator (10) and to a free-electron laser comprising the latter. To accomplish the method, a hi...  
WO/2013/024086A1
The present invention relates in particular to methods and apparatuses for generating and/or providing X-ray radiation with specific radiation characteristics, in particular with a specific radiation dose rate curve (10). In order to pro...  

Matches 501 - 550 out of 12,887