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Matches 501 - 550 out of 12,777

Document Document Title
WO/2013/029895A1
According to a first aspect of the present invention, there is provided a radiation source comprising: a nozzle configured to direct a stream of fuel droplets (70) along a trajectory towards a plasma formation location; a laser configure...  
WO/2013/029902A1
Methods and apparatus are provided for promoting the coalescence of fuel droplets in a stream generated by a radiation source droplet stream generator for use in lithographic apparatus. Various examples are described in which a modulatin...  
WO/2013/029896A1
A radiation source for generating EUV from a stream of molten metal fuel droplets by LPP (Laser Produced Plasma) or (Dual Laser Plasma) has a fuel droplet generator arranged to provide a stream of droplets of fuel and at least one laser ...  
WO/2013/031666A1
Provided are a radiation imaging system and radiation imaging method, wherein a system control unit comprises: a radiation imaging trial unit which, if a gradation value is different from a predicted result, exercises control by varying ...  
WO/2013/029906A1
A radiation source (60) suitable for providing a beam of radiation to an illuminator of a lithographic apparatus. The radiation source comprises a nozzle configured to direct a stream of fuel droplets (62) along a trajectory (64) towards...  
WO/2013/029898A1
A radiation source having a nozzle configured to direct a stream of fuel droplets along a trajectory towards a plasma formation location, a laser configured to direct laser radiation at the fuel droplets at the plasma formation location ...  
WO/2013/028272A1
An apparatus includes a drive laser system producing an amplified light beam of pulses that travels along a drive axis; a beam delivery system that directs the amplified light beam of pulses toward a target region; a target material deli...  
WO/2013/027817A1
In a radiography system and radiography method according to the present invention, the radiography system comprises a system control unit which controls a radiography device to execute radiography at a set frame rate. The system control ...  
WO/2013/023710A1
A radiation source includes: a nozzle configured to direct a stream of fuel droplets (30) along a trajectory towards a plasma formation location; a laser configured to output laser radiation, the laser radiation directed at the fuel drop...  
WO/2013/024316A3
The invention relates to a method for generating electromagnetic radiation (preferebly UV, VUV, XUV, or X-rays), to an optical short-period undulator (10) and to a free-electron laser comprising the latter. To accomplish the method, a hi...  
WO/2013/024086A1
The present invention relates in particular to methods and apparatuses for generating and/or providing X-ray radiation with specific radiation characteristics, in particular with a specific radiation dose rate curve (10). In order to pro...  
WO/2013/024316A2
The invention relates to a method for generating electromagnetic radiation, to an optical short-period undulator and to a free-electron laser comprising the latter. To accomplish the method, a high-energy electrically charged particle be...  
WO/2013/021794A1
A radiation generating apparatus of the present invention includes an envelope 1 including a first window 2 allowing radiation to pass; a radiation tube 10 that is accommodated in the envelope 1, and includes a second window 15 allowing ...  
WO/2013/021874A1
A radiation generating apparatus includes: an envelope 1 having a first window 2 through which a radiation is transmitted; and a radiation tube 10 being held within the envelope 1, and having a second window 15 which is arranged in oppos...  
WO/2013/020758A1
A radiation source for generating EUV from a stream of molten fuel droplets by LPP (Laser Produced Plasma) or (Dual Laser Plasma) has a fuel droplet generator arranged to provide a stream of droplets of fuel (314) and at least one laser ...  
WO/2013/020613A1
The present invention relates to a method and device for generating optical radiation (18), in particular EUV radiation or soft x-rays, by means of electrically operated discharges. A plasma (15) is ignited in a gaseous medium between at...  
WO/2013/020613A8
The present invention relates to a method and device for generating optical radiation (18), in particular EUV radiation or soft x-rays, by means of electrically operated discharges. A plasma (15) is ignited in a gaseous medium between at...  
WO/2013/018712A1
The purpose of the present invention is to provide a stereo x-ray radiation device that is small and for which handling is simple. One cathode that functions as an emitter and two anodes that function as targets are disposed in a single ...  
WO/2013/014953A1
This x-ray generating device (10) is provided with: an electron gun (12) that generates an electron beam; a linear accelerator (14) that, by means of microwaves, accelerates the electron beam generated by the electron gun (12); an x-ray ...  
WO/2013/008685A1
In a radiography system (10) and a radiography method, a radiation output device (18) has a plurality of radiation sources (30, 30a-30h). The plurality of radiation sources (30a-30h) output radiation (16, 16a-16h) such that the output or...  
WO/2013/007407A1
A power supply (310) for providing HV power to a lithography illumination source (350) comprising a HV power source arranged to provide the HV power, a HV power transmission line arranged (370) to transmit the HV energy from the HV power...  
WO/2013/002124A1
Provided are an X-ray tube with which irradiation is possible while rapidly switching a plurality of different x-rays with a simple configuration, and an x-ray CT device employing same. An x-ray tube comprises first and second electron e...  
WO/2013/003566A2
There is provided a method that includes (a) detecting, at a point on a cable that runs from a controller to an x-ray generator, a prepare signal that is being transmitted from the controller to the x-ray generator to prepare the x-ray g...  
WO/2013/001917A1
A radiation imaging system (10) and a radiation imaging method involves a radiation output device (18) having a plurality of radiation sources (30, 30a to 30e), wherein the plurality of radiation sources (30, 30a to 30e) are arranged in ...  
WO/2013/001434A1
The present invention relates to signal and power supply transmission for an X-ray source. In order to provided an improved signal and power supply transmission with reduced constructional complexity and enhanced operation possibilities,...  
WO/2013/003566A3
There is provided a method that includes (a) detecting, at a point on a cable that runs from a controller to an x-ray generator, a prepare signal that is being transmitted from the controller to the x-ray generator to prepare the x-ray g...  
WO/2012/173266A1
An apparatus used with a laser apparatus may include a chamber, a target supply for supplying a target material to a region inside the chamber, a laser beam focusing optical system for focusing a laser beam from the laser apparatus in th...  
WO/2012/173166A3
A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the l...  
WO/2012/173166A2
A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the l...  
WO/2012/173703A2
A system for subsea imaging comprises a first plate having an inner surface, an outer surface, and a cavity formed in the inner surface. In addition, the system comprises a phosphor imaging plate disposed in the cavity. Further, the syst...  
WO/2012/168670A1
The present invention relates to a method and arrangement for generating a jet of fluid, to a method and system for transforming the jet into plasma, and to the uses of said system. According to the invention, the method is characterized...  
WO/2012/170144A1
An extreme-ultraviolet (EUV) light source comprising an optic, a target material, mid a laser beam passing through said optic along a beam path to irradiate said target material; The EUV light source further includes a system generating ...  
WO/2012/170914A1
The invention provides an X-ray source having a generator for generating an electron beam, an accelerator for accelerating the generated electron beam in a desired direction, one or more magnetic elements for transporting portions of the...  
WO/2012/166898A1
An imaging system can include an imaging capturing portion, an image processing unit, a main power supply and a supplemental power supply. The image capturing portion can include a source that emits an emission signal towards a target to...  
WO/2012/160967A1
An X-ray generator provided in a bone densitometry system, etc., has a structure (44) above an X-ray generation unit (14). Specifically, the structure (44) is provided around a filter unit (42), and the structure (44) comprises one horiz...  
WO/2012/154494A2
An x-ray source includes an enclosing vessel, a first roller arranged at least partially within the enclosing vessel, a second roller arranged at least partially within the enclosing vessel and to be in rolling contact with the first rol...  
WO/2012/154494A3
An x-ray source includes an enclosing vessel, a first roller arranged at least partially within the enclosing vessel, a second roller arranged at least partially within the enclosing vessel and to be in rolling contact with the first rol...  
WO/2012/154767A3
In order to increase the accuracy and speed of catheter reconstruction in surgical procedures such as an HDR prostate implant procedure, an automatic tracking system is provided preferably using an electromagnetic tracking device. The sy...  
WO/2012/148272A1
Method of generating electromagnetic radiation having a wavelength in the ultraviolet range, comprising: generating at least one liquid and/or solid particle that comprises an excitable material; moving the at least one particle in an ir...  
WO/2012/139872A2
The invention relates to an electron source (1) for generating an electron beam (23), a first electron emitter (20) for generating electrons and at least one second electron emitter (21) for generating electrons being arranged in said el...  
WO/2012/139872A3
The invention relates to an electron source for generating an electron beam and to an X-ray source for generating X-ray radiation. The invention concerns an electron source (1) for generating an electron beam (22), in which source a firs...  
WO/2012/140860A1
Provided is an X-ray generator (11) comprising an X-ray tube (14) including a body; an electron source (15) in the body; a target (18) at an end of the X-ray tube facing the electron source, the target generating X-rays by irradiation wi...  
WO/2012/136343A1
The invention relates to a droplet dispensing device, comprising a reservoir (11) for receiving a liquid material (31), an outlet nozzle (17a) in fluid communication with said reservoir (11) and a piezoelectric actuating means (29, 32) a...  
WO/2012/134736A1
A method and apparatus for compensating for thermal effects on the focal spot of a lens used to focus a laser beam on a target material at an irradiation site in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system is dis...  
WO/2012/131452A1
A laser apparatus may include a seed laser device configured to output a pulse laser beam, a pulse energy adjusting unit configured to vary pulse energy of the pulse laser beam, at least one amplifier for amplifying the pulse laser beam,...  
WO/2012/131450A1
A laser device having master oscillators that output seed beams is provided. The seed beams are guided from the master oscillators to a regenerative amplifier such that at least one of the seed beams enters the regenerative amplifier at ...  
WO/2012/132803A1
The purpose of the present invention is to prevent a contaminated material from discharging from the light emitting port of an extreme ultra violet light source device toward an exposure device. EUV light radiated from high-temperature p...  
WO/2012/131452A8
A laser apparatus may include a seed laser device configured to output a pulse laser beam, a pulse energy adjusting unit configured to vary pulse energy of the pulse laser beam, at least one amplifier for amplifying the pulse laser beam,...  
WO/2012/132156A1
The objective of the present invention is to radiate a plurality of X rays having different energies, and to inhibit dispersion in the energies of the generated X rays. An X-ray generating apparatus (14) provided in an X-ray inspection a...  
WO/2012/133720A1
An apparatus for generating extreme ultraviolet light may include: a chamber having an opening through which a laser beam is introduced into the chamber; a reference member on which the chamber is mounted; a target supply unit for supply...  

Matches 501 - 550 out of 12,777