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WO/2017/076427A1 |
The invention relates to a driver laser assembly (12) for an EUV radiation-generating device (1), comprising the following: a radiation source (2) for generating laser pulses (11) and an amplifier assembly (3) with at least one optical a...
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WO/2017/077614A1 |
An extreme ultraviolet light generating device is provided with: a chamber in which extreme ultraviolet light is generated from a target provided in a generating area; a condensing mirror 23 for reflecting the extreme ultraviolet light f...
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WO/2017/077641A1 |
An extreme ultraviolet light generating device is provided with: a chamber; an EUV collecting mirror that is disposed within the chamber, is provided with a reflective surface having a concave curved face shape and an outer peripheral pa...
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WO/2017/066843A1 |
An articulated arm to suspend an X-ray head from a support section in a radiographic imaging apparatus comprising two pairs of linkages separated and joined to an intermediate linkage wherein the proximal end of the first pair of linkage...
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WO/2017/066841A1 |
There is disclosed a mobile radiographic imaging apparatus including a component operable to emit radiation for imaging a subject, an arm rotatably connected at a proximal end thereof to a body section of the apparatus, such that it is s...
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WO/2017/063686A1 |
The invention relates to a polarizer assembly (1) comprising the following: a first polarizer device (2) with a first polarizer surface (8) for linearly polarizing a laser beam (5) which propagates in a first direction (R1) and which str...
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WO/2017/060814A1 |
The invention relates to a device (10) for determining spatially dependent x- ray flux degradation and photon spectral change, a system (1) for determining spatially dependent x-ray flux degradation and photon spectral change for an x-ra...
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WO/2017/054974A1 |
A mobile c-arm X-ray apparatus (1a, 1b, 1c) is described. The mobile X-ray apparatus (1a, 1b, 1c) comprises an electrically operated X-ray source (3). The mobile C-arm X-ray apparatus (a, 1b, 1c) also has an electrical energy storage dev...
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WO/2017/059314A1 |
An optical source for a photolithography tool includes a source configured to emit a fist beam of light and a second beam of light, the first beam of light having a first wavelength, and the second beam of light having a second wavelengt...
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WO/2017/058790A1 |
An illumination pump source is disclosed. The illumination pump source includes a set of power sources configured to generate a set of laser beams, with at least some of the set of laser beams configured to include illumination having di...
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WO/2017/056324A1 |
[Problem] To suppress a condensing position offset of pulsed laser light in relation to an EUV light generation system. [Solution] The EUV light generation system repeatedly outputs EUV light emitted from a target that has been irradiate...
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WO/2017/051454A1 |
This EUV light generation device is to be used along with a laser device that outputs laser light. The EUV light generation device comprises: a chamber wherein an EUV light is generated from a plasma, which is produced by irradiating the...
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WO/2017/042915A1 |
This target storage device may be provided with: a tank for storing a target that generates extreme ultraviolet light when irradiated with laser light; a heater, which is connected to the tank, and heats the tank; and a radiation member ...
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WO/2017/042881A1 |
This extreme ultraviolet light generation device may be provided with: a chamber having a window through which pulse laser light is inputted; a target supply unit that outputs at least one target toward a predetermined region inside of t...
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WO/2017/042974A1 |
This extreme ultraviolet light generation device may be provided with: a chamber in which laser light is applied to a target, and extreme ultraviolet light is generated; and a target supply unit that discharges the target to the inside o...
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WO/2017/036840A1 |
It is the objective of the present invention to provide a compact and cost effective light source based on a storage ring that can deliver sufficient power, superior stability and high coherence for metrology methods in the EUV range usi...
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WO/2017/032810A1 |
The invention relates to an X-ray source (2) for an imaging device comprising at least three electrodes; a power supply configured to provide a primary gap voltage between a first (13) and a second (12) electrode among said at least thre...
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WO/2017/027905A1 |
An imaging system, comprising: one or more imaging units comprising respective emitters for emitting imaging radiation and corresponding detectors for detecting the radiation after interaction of the radiation with a target portion of a ...
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WO/2017/030948A1 |
This disclosure provides systems, methods, and apparatus related to laser plasma accelerators. In one aspect a block of material defines a gas inlet, a chamber in fluid communication with the gas inlet, a throat in fluid communication wi...
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WO/2017/030003A1 |
An X-ray generator device and X-ray examination device having high reliability are provided. An examination and sorting device (100) includes an X-ray bulb (50) with an anode electrode (56) and a cathode electrode (57), and a tank (53) h...
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WO/2017/027636A1 |
in a laser produced plasma (LPF) extreme ultraviolet (EUV) system, a droplet is irradiated by a laser pulse to produce a plasma in a chamber. This generates forces that cause the plasma to destabilize and subsequent droplets to have thei...
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WO/2017/027566A1 |
A method includes providing a target, material that, comprises a component that emits extreme ultraviolet (EUV ) light when converted to plasma; directing a first beam of radiation toward the target material to deliver energy to the targ...
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WO/2017/025392A1 |
A target structure (T) made by lithography or used in lithography is inspected by irradiating the structure at least a first time with EUV radiation (304) generated by inverse Compton scattering. Radiation (308) scattered by the target s...
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WO/2017/017834A1 |
This EUV light generation device may comprise: a chamber having a first through-hole for letting a pulsed laser light therein; a target supply unit held by the chamber, and sending-out a target toward a predetermined region inside the ch...
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WO/2017/014761A1 |
An example embodiment includes an x-ray assembly. The x-ray assembly includes an x-ray tube (208), a filament (204), and a sensor (262, 264). The x-ray tube defines an evacuated envelope (210). The filament is positioned within the evacu...
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WO/2017/011055A1 |
The invention includes a power supply (17) for an x-ray tube (49). The power supply can comprise a control box (48) and a remote box (47). An electron-emitter transformer (14) can be located in the remote box. A box-connector cable (41) ...
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WO/2017/002363A1 |
Provided is an X-ray generating apparatus in which a likelihood that an anode member may be deformed by heat deformation of a container is eliminated or reduced to maintain a positional relationship between an electron source and a trans...
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WO/2017/003237A1 |
Disclosed is a portable X-ray generation device, which uses an electric field emission-type X-ray source, and is thus advantageous in reducing weight and volume and has excellent reliability in X-ray emission performance. The portable X-...
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WO/2017/003236A1 |
Disclosed is a portable X-ray emission device, which uses an electric field emission-type X-ray source, and is thus advantageous in reducing weight and volume and has excellent reliability in X-ray emission performance. The portable X-ra...
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WO/2016/208155A1 |
[Problem] To achieve lower power consumption in a radiation-irradiating device that constitutes a radiological image-capturing device, as well as in a control method for a radiation-irradiating device, and a program. [Solution] A radiati...
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WO/2016/207042A1 |
Disclosed is an amplifier arrangement (1) comprising: an optical amplifier (2) for amplifying laser radiation (3); a first retroreflector (7a) and a second retroreflector (7b), wherein the amplifier (2) is arranged in a beam path (6) of ...
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WO/2016/203630A1 |
The purpose of the present invention is to control the output timing of a laser light highly accurately. The extreme UV light generation device may comprise: a chamber, wherein plasma is generated, thereby causing extreme UV light to be ...
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WO/2016/186740A1 |
A coreless transformer ultra-violet (UV) light source system comprising a bulb including a predetermined amount of an element which efficiently emits UV light when exposed to a high current plasma state and a predetermined amount of a bu...
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WO/2016/181715A1 |
Provided is a radiation source with which the dose and coherency can be adjusted by enabling the width of the slits making up a multi-slit configuration to be changed. Individual slits S provided to this multi-slit configuration 3c are p...
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WO/2016/177519A1 |
A radiation source for a lithographic apparatus, in particular a laser-produced plasma source wherein a buffer liquid droplet is provided in a source chamber containing the plasma source. The buffer liquid droplet being evaporated explos...
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WO/2016/175031A1 |
According to one embodiment of the present invention, a chamber device may be provided with: a chamber (2); a target generation device, which is assembled to the chamber and supplies a target material to a predetermined region in the cha...
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WO/2016/174752A1 |
According to one embodiment of the present invention, a chamber device may be provided with: a chamber; a target generation device, which is assembled to the chamber and supplies a target material to a predetermined region in the chamber...
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WO/2016/170658A1 |
The purpose of the present invention is to improve the stability of operation of an EUV radiation generator.　This droplet detector may comprise a light source which irradiates illuminating light onto droplets which generate extreme ult...
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WO/2016/172611A1 |
Small, portable, and collapsible X-ray devices are described in this application. In particular, this application describes a portable X-ray device that contains a C-shaped support arm, an X-ray source contained near one end of the suppo...
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WO/2016/170972A1 |
The purpose of the present invention is to improve the stability of operation of an EUV radiation generator. This droplet detector may comprise a light source which irradiates illuminating light onto droplets which generate extreme ultra...
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WO/2016/171964A1 |
A system includes a plurality of sensors at distinct and separate locations, each of the distinct and separate locations being equidistant from a region that Is configured to pass light that propagates along a beam path, the sensors bein...
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WO/2016/171195A1 |
A laser device according to the present disclosure may be provided with: a quantum cascade laser for outputting laser light in accordance with a supply current, from the current rise timing of the supply current to a vibration start timi...
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WO/2016/166549A1 |
A radiation source and an associated method of use. The radiation source includes a laser-plasma wakefield accelerator that is configured to pass at least one laser pulse through a plasma and inject a stream of plasma electrons into at l...
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WO/2016/163108A1 |
Disclosed are: discharge electrodes having a shape for obtaining the desired light output; and a light source device equipped with these discharge electrodes. The EUV light source device (100) comprises: a pair of disk-shaped discharge e...
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WO/2016/157315A1 |
This extreme UV light generation device may be provided with: a chamber; a target supply unit for successively supplying targets into the chamber; an extreme UV light focusing mirror that includes a reflective surface for reflecting and ...
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WO/2016/159618A1 |
Discloses are an X-ray generation device and a control method therefor. The disclosed X-ray generation device including a filament, a grid, and an anode comprises: a filament control unit for controlling voltage applied to the filament; ...
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WO/2016/160708A1 |
A robotic scanning system is provided. The scanning system includes a robotic array having at least one set of scanning robots configured to perform a radiological scan on a subject, each robot having a respective emitter or detector. A ...
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WO/2016/157286A1 |
Provided is an imaging device in which a radiation unit (10) selectively emits X-rays from each of a plurality of radiation positions (RP) arranged along a radiation surface (12) that is a flat surface. An imaging unit (20) captures imag...
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WO/2016/160300A1 |
A method and system (10, 20, 30, 50) for reducing static charges on a material (18). X-rays (13) can ionize a flowing fluid (16). The ions can be transported to the material and can reduce or dissipate the static charges.
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WO/2016/160371A1 |
A system including an x-ray scanner gantry having: a housing; a gantry gear; a rotor; a generator mounted on the rotor; and first and second generator gears connected to or engaged with one or more axles of the generator. The second gene...
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