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WO/2014/006427A1 |
A system for generating a focused gamma ray beam having: means for generating a converging electron beam; and a target positioned before the focal point of the converging electron beam, wherein the electron beam and target are selected a...
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WO/2014/000998A1 |
A laser driven light source comprises laser (52) and focusing optics (54). These produce a beam of radiation focused on a plasma forming zone within a container (40) containing a gas (e.g., Xe). Collection optics (44) collects photons em...
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WO/2013/190412A1 |
A voltage multiplier 10 comprises a series of multiplier stages 12a, 12b, 12c, 12d. Each multiplier stage, for example 12b, comprises a first input 16b, a second input 14b, a first output 16c and second output 14c. The first and second o...
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WO/2013/190944A1 |
An extreme ultraviolet light generation system configured so as to generate extreme ultraviolet light by irradiating a target with first pulse laser light and second pulse laser light to convert the target into plasma. The extreme ultrav...
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WO/2013/188567A1 |
A high energy radiation generator utilizes sliding friction in a low pressure environment to generate high energy radiation, for example x-rays. The sliding friction may be generated by sweeping one material against a second material, fo...
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WO/2013/186052A1 |
An EUV excitation light source (1) with a beam guiding device (22) for manipulating at least one laser beam (10, 12) is provided. The beam guiding device (22) has at least one beam splitter (2) for generating at least two separated beams...
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WO/2013/178292A1 |
The invention relates to a spark gap with a capacitive energy accumulator. According to the invention, said spark gap (14, 15) is fed via a plurality of annularly arranged capacitors (19), said capacitors being electrically connected to ...
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WO/2013/180007A1 |
An extreme UV light generation device, which may be configured so as to generate extreme UV　light by beaming laser light onto the target and causing the target to turn into a plasma. The extreme UV light generation device may be provid...
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WO/2013/174620A1 |
A radiation source for generating EUV radiation suitable for use in a lithographic apparatus includes a laser configured to fire laser pulses at a target area to which is supplied a stream of fuel droplets. The fuel droplets may be tin d...
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WO/2013/174525A1 |
The present invention provides a method for generating electromagnetic radiation which is preferably extreme ultraviolet and/or soft x-ray radiation from a plasma, comprising the steps: Accelerating a radiation fuel which is preferably a...
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WO/2013/172320A1 |
In order to provide a control technology for an inverter circuit with which switching loss can be reduced and a high power factor can be maintained regardless of load deviations, the direct current voltage supplied to an inverter (4) is ...
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WO/2013/168468A1 |
This X-ray generation device (1) is provided with: an electron gun section (3) that emits an electron beam (EB);, and a target section (T). Said target section (T) that comprises: a substrate (21) comprising diamond; and a target body (2...
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WO/2013/157475A1 |
An objective of the present invention is to carry out a stable AEC which is not affected by geometric positioning misalignment of a grid and a dose detection sensor with small concern for image quality declines and without involving time...
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WO/2013/157476A1 |
An objective of the present invention is to carry out a stable AEC which is not affected by geometric positioning misalignment of a grid and a dose detection sensor with a small concern for image quality declines and without involving ti...
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WO/2013/153156A1 |
A method for producing electromagnetic radiation comprising : firing a first laser pulse and generating a plasma region, said first laser pulse penetrating at least partially into said plasma region to create a plasma density wake in sai...
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WO/2013/150884A1 |
To provide a method for controlling an X-ray image diagnosis device and X-ray generation device equipped with an ABS system for tracking movement of a subject position without an operator having to carry out an operation for setting a re...
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WO/2013/149953A1 |
The present invention is directed to a method for stabilizing a plasma comprising: a. providing in an ionization chamber a number of high voltage wires and a gas suitable for forming a plasma b. exposing the gas to a high voltage thereby...
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WO/2013/144742A1 |
A medical imaging device 10 comprises an inverter 12 with semiconductor switches 26 for generating an AC voltage to be supplied to a load20, 22, a coil 32 inductively coupled to a conductor 34 of the inverter 12 connected with a semicond...
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WO/2013/148518A1 |
An x-ray generator device includes a housing at least partially holding a specific fluid pressure, with an arm positioned to be able to strike a strike plate within the housing. The housing contains an x-ray window. The arm is magnetical...
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WO/2013/143733A1 |
A fuel supply for an EUV radiation source is disclosed. The fuel supply comprises a reservoir (40) for retaining a volume of fuel (42), a nozzle (32), in fluid connection with the reservoir, and configured to direct a stream of fuel alon...
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WO/2013/144690A1 |
A laser apparatus may include a master oscillator, an optical unit provided in a beam path of a laser beam from the master oscillator, a beam adjusting unit provided upstream from the optical unit in a beam path of the laser beam and con...
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WO/2013/149004A1 |
An x-ray generator includes a voltage source and a voltage divider network coupled thereto, a housing, and an insulator carried within the housing. An emitter cathode is carried within the housing and emits electrons and undesirable cond...
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WO/2013/142603A1 |
Medical devices and methods for determining the size of blood vessels are disclosed. In an embodiment, a blood vessel sizing device includes a marker configured for placement on the skin of a patient. The marker defines a substantially c...
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WO/2013/141580A1 |
The present invention relates to an extreme ultraviolet (EUV) light generating device for stabilization and improving energy efficiency through laser beam correction. The EUV plasma generation device according to the present invention in...
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WO/2013/141578A1 |
The present invention relates to an apparatus for generating extreme ultraviolet light by means of plasma, the apparatus comprising: a laser source for outputting laser; a tunable laser mirror (TLM) for reflecting laser beams from the la...
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WO/2013/135550A1 |
In order to predict the lifetime of an X-ray generator, the data of at least one physical variable which influences the lifetime of the generator are regularly stored. The stored data are evaluated by means of stored statistics in order ...
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WO/2013/131693A1 |
An ion capture apparatus for a laser produced plasma (LPP) radiation source apparatus comprises a magnetic field generator and two magnetic cores (350). The two magnetic cores are arranged to channel a magnetic field (330) generated by s...
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WO/2013/131628A1 |
New kinds of moderate-load X-ray source devices are described, with reduced weight and size, thus being especially suitable for compact portable X-ray sources, such as those required for hand-held dental and veterinarian applications. Th...
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WO/2013/133135A1 |
This X-ray generation device is provided with the following: an electron-beam generation means that generates an electron beam; a laser-light generation means that generates laser light such that said laser light, which generates X-rays ...
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WO/2013/131706A1 |
The present invention provides a method of monitoring the operation of a radiation source fuel droplet stream generator comprising a fuel-containing capillary and a piezo-electric actuator (500). The method comprises analysing the resona...
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WO/2013/129067A1 |
An X-ray irradiation device (1) is provided with: a plurality of X-ray irradiation units (3), each having an X-ray tube (6) for generating X-rays, a drive circuit (15) for driving the X-ray tube (6), and a main wire (22) connected to the...
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WO/2013/129068A1 |
In an X-ray radiation source (2), by fastening a lid (31c) to a main body (35) with screws (65), an X-ray tube (21) is secured to a case (31) with the X-ray tube (21) being pressed against the inner surface of a wall (31a) by a first cir...
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WO/2013/129069A1 |
An X-ray irradiation unit (3) is provided with: an X-ray tube (6) for generating X-rays; an operating life detection circuit (15b) for detecting the operating life of the X-ray tube (6); and a display circuit (15c) for externally indicat...
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WO/2013/124101A2 |
A fuel stream generator comprising a nozzle connected to a fuel reservoir, wherein the nozzle is provided with a gas inlet configured to provide a sheath of gas around fuel flowing along the nozzle is disclosed. Also disclosed are a meth...
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WO/2013/122505A1 |
The invention relates to a device and a method for generating powerful extreme ultraviolet or soft x-ray radiation. The field of use includes EUV lithography in the production of integrated circuits, and also metrology. The device compri...
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WO/2013/117355A1 |
The present invention provides methods and apparatus for facilitating the start up of a fuel droplet stream generator. During a start-up phase the fuel droplet stream generator is positioned so that the fuel droplets re emitted downwardl...
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WO/2013/116549A1 |
The present specification discloses a multi-view X-ray inspection system having, in one of several embodiments, a three-view configuration with three X-ray sources. Each X-ray source rotates and is configured to emit a rotating X-ray pen...
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WO/2013/110968A1 |
An apparatus for generating extreme ultraviolet light may include a reference member (9), a chamber (2) fixed to the reference member, the chamber including at least one window (38), a laser beam introduction optical system (50) configur...
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WO/2013/107660A1 |
A beam guidance system (4) is used for the focusing guidance of radiation (3) from a high-power laser light source (2) onto a target (5). The beam guidance system (4) has at least one mirror (7) as a reflective beam guidance component an...
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WO/2013/104947A1 |
A device is provided for controlling a laser beam. The device may include a first wavefront adjuster (81) provided in a beam path of a laser beam outputted from a laser apparatus (3), a beam delivery unit (50) provided in a beam path of ...
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WO/2013/102426A1 |
A radiation device installation box and an X-ray generator. The radiation device installation box includes a box body (1), a convex edge (18) fixed on the inner wall of the box body (1) and in a ring shape and a compensation apparatus wh...
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WO/2013/102427A1 |
A radiation device installation case, oil cooled circulation system and X-ray generator, solving the technical problems of poor X-ray generator sealing property, heavy X-ray generator case or large amount of X-ray leakage; the radiation ...
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WO/2013/092094A1 |
A method of treating or operating a radiation source apparatus (SO), for instance for generating EUV radiation for device lithography, is disclosed. The method is for use with radiation source apparatus having a chamber (220) arranged to...
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WO/2013/095760A1 |
An x-ray source can include an x-ray tube and a power supply. The x-ray tube can be removably affixed to the power supply in a rigid manner with the x-ray tube movable and holdable along with the power supply when affixed thereto. A rele...
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WO/2013/081179A1 |
In a radiation generating apparatus of the invention, a radiation tube (2) having a cathode (11) for emitting an electron and an anode (14) for generating a radiation by an irradiation of the electron emitted from the cathode is enclosed...
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WO/2013/072828A1 |
The invention relates to a radiation application apparatus for applying radiation at a location within an object. The radiation application apparatus comprises a transforming unit (2) for being arranged within the object at the location ...
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WO/2013/074032A1 |
The disclosure is related to an apparatus, systems and methods for producing X-ray images. More particularly, the disclosure relates to a mobile X-ray apparatus for medical examination. The disclosure provide for fast, easy and safe tran...
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WO/2013/065762A1 |
Provided is a radiation emission device equipped with: a metal target that, when an electron beam is emitted thereto, radiates bremsstrahlung X-rays as radiation beams; a radiation blocking body which has a slit-shaped radiation transmis...
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WO/2013/065703A1 |
In order to provide an X-ray high voltage apparatus that can reduce power loss and temperature rise in a step-up circuit, a step-up circuit operating period during which the output voltage of a step-up circuit (20) is controlled to match...
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WO/2013/061051A1 |
An apparatus for generating x-rays comprises an electron beam generator and a first device (4) arranged to apply an RF electric field to accelerate the electron beam from the generator. A photon source is arranged to provide photons to a...
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