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Matches 101 - 150 out of 12,887

Document Document Title
WO/2017/187571A1
According to one aspect of the present disclosure, an extreme ultraviolet light sensor unit (160) is provided with: a mirror (121) that reflects extreme ultraviolet light; a filter (122) that passes extreme ultraviolet light reflected by...  
WO/2017/187630A1
A tank (40) may be provided with: a tank body (41) having a space (41S) in the interior thereof and having an opening (41A) communicating with the space (41S); a lid body (42) for covering the opening (41A) of the tank body (41) and the ...  
WO/2017/189193A1
A first target is provided to as interior of a vacuum chamber, a first light beam is directed toward the first target to form a first plasma from target material of the first target, the first plasma being associated 'with, a directional...  
WO/2017/162613A1
The present invention relates to an apparatus for generating X-rays. It is described to produce (210) with a power supply (40) at least two voltages between at least one cathode (20) and an anode (30), wherein the at least two voltages c...  
WO/2017/164251A1
This extreme ultraviolet light generator comprises: a plurality of extreme ultraviolet (EUV) light sensors for measuring EUV light energy from different directions to each other, said EUV light having been generated by irradiating, with ...  
WO/2017/163345A1
This extreme ultraviolet light generation apparatus is provided with: a plurality of EUV light sensors that measures, from different directions, the energy of an extreme ultraviolet light generated by irradiating a target supplied to a p...  
WO/2017/163315A1
[Problem] The purpose of the invention is, with respect to a droplet timing sensor for detecting the timing of droplet passage by receiving a light that has been irradiated from a light source unit onto a droplet in an EUV light generati...  
WO/2017/161376A1
Technology is described for a magnetic lift device for an x-ray tube. In one example, an anode assembly includes an anode, a bearing assembly, a ferromagnetic shaft, and a lift electromagnet. The anode is configured to receive electrons ...  
WO/2017/154111A1
Disclosed is an extreme ultraviolet light generation device that moves, on the basis of a command given from an external device, the generation position of extreme ultraviolet light. The extreme ultraviolet light generation device is pro...  
WO/2017/156033A1
A high energy radiation device may include a band and/or contact rod with surface properties to enhance field emissions or otherwise assist in control of x-ray generation. The high energy radiation device comprises a housing for maintain...  
WO/2017/154528A1
Provided is an extreme ultraviolet light generating apparatus 1 that moves the position at which extreme ultraviolet light is generated on the basis of a command from an exposure device 9 that is an external device, the extreme ultraviol...  
WO/2017/154179A1
[Problem] To allow a simple connection between an optical unit and an optical path pipe. [Solution] The structure connecting the optical path pipe to the side surface (1a) of the optical unit comprises: an extending-contracting pipe (72)...  
WO/2017/143974A1
A method for correcting filament current data of an X-ray tube, comprising acquiring a first to-be-corrected tube current value and a to-be-corrected filament current value corresponding to a first correction point; executing a pay-off o...  
WO/2017/145366A1
An extreme ultraviolet light generation device of the present invention is provided with: a target supply unit that outputs, along a track, a plurality of targets toward a plasma generation region; a laser device that outputs laser light...  
WO/2017/147197A1
Various embodiments concern techniques for intelligently switching between multiple sources of USB signals. More specifically, user devices are described that include a physical USB port for receiving a USB connector and one or more wire...  
WO/2017/147419A1
The present application provides a bipolar x-ray tube module. The bipolar x- ray tube module may include a bipolar x-ray tube and at least two voltage multipliers. The voltage multipliers may be positioned such that the voltage gradient ...  
WO/2017/143028A1
A laser-produced plasma extreme ultraviolet source has a buffer gas to slow ions down and thermalize them in a low temperature plasma. The plasma is initially trapped in a symmetrical cusp magnetic field configuration with a low magnetic...  
WO/2017/137074A1
The invention relates to a driver laser arrangement (12) for an EUV-radiation-producing device (1), comprising: a radiation source (2) for producing laser radiation (7) propagating in a first direction (R1), an amplifier arrangement (3) ...  
WO/2017/136551A1
A method of detecting a possible collision in a medical procedure that involves a medical system, includes: obtaining an image of a patient that is supported on a patient support; determining a first model using a processing unit based a...  
WO/2017/130323A1
This target supply device is provided with a nozzle which outputs a liquid target substance housed in a tank, a vibrating element which is driven by input of a square wave electric signal, a droplet detection unit which detects droplets ...  
WO/2017/130443A1
This target supply device is provided with a nozzle which outputs a liquid target substance housed in a tank, a vibrating element which is driven by input of a square wave electric signal, a droplet detection unit which detects droplets ...  
WO/2017/127182A1
A system and method of removing target material debris deposits simultaneously with generating EUV light includes generating hydrogen radicals in situ in the EUV vessel, proximate to the target material debris deposits and volatilizing t...  
WO/2017/126301A1
This extreme ultraviolet light generation device may comprise: a chamber in which extreme ultraviolet light is generated from a droplet supplied to a predetermined region inside the chamber; an image-forming optical system that is provid...  
WO/2017/123323A1
Disclosed is an EUV system element having a hydrogen diffusion barrier including a region implanted with species (e.g., ions energetic neutral atoms) of a non-hydrogen gaseous material. Also disclosed is a method of making such a compone...  
WO/2017/121573A1
Disclosed is an electro-actuable element for a droplet generator, comprising a plurality of electro-actuable segments spaced apart radially so as to define a channel therebetween. The electro-actuable element may comprise a clamping asse...  
WO/2017/120621A1
An x-ray imaging system and a method for retrofitting existing x-ray generators to allow those generators to be controlled by a digital x-ray imaging system are disclosed. The x-ray imaging system includes an imaging array and an image c...  
WO/2017/101982A1
The invention relates to an optical isolator comprising: a stop (1) which has an aperture (3) for passing laser radiation (5), said laser radiation passing through the aperture (3) in a first direction (R1), wherein the stop (1) serves t...  
WO/2017/102931A1
Droplet generators, such as used in an EUV radiation source, and associated EUV radiation sources and lithographic apparatuses. A droplet generator can include a nozzle assembly to emit the fuel as droplets, the nozzle assembly being wit...  
WO/2017/102261A1
An EUV source for generating a beam of EUV radiation, has a droplet generator with a nozzle assembly to emit droplets of fuel from a nozzle towards a plasma formation location. The nozzle assembly receives the fuel from a reservoir. The ...  
WO/2017/100611A1
An image-guided radiotherapy system adapted to be juxtaposed adjacent a CT scanner comprises a frame having an orifice adapted to permit passage therethrough of a couch on which a patient is positioned, together with a gantry assembly ro...  
WO/2017/098667A1
This target generation device is equipped with: a nozzle 262 including a nozzle hole 263 for ejecting, inside a chamber, a target 27 comprising a molten metal; and a cylindrical member 410 mounted on the nozzle 262 in such a manner as to...  
WO/2017/093045A1
The present invention relates to a device (34) and a method (70) for determining a status of an X-ray tube (10) of an X-ray system (36). Due to ageing and/or wear of the X-ray tube, the spectrum of the X-ray radiation (30) provided by th...  
WO/2017/090167A1
Provided is an extreme ultraviolet light generation device that may comprise the following: a target supply unit for outputting a target; a drive laser for outputting drive laser light with which the target is irradiated; a guide laser f...  
WO/2017/088929A1
The invention relates to a driver laser arrangement (12) for an EUV radiation generating device (1), comprising: a beam source (2) configured to generate a first laser pulse (11a) having a first wavelength (λ1) and a second laser pulse ...  
WO/2017/090126A1
This extreme ultraviolet light generating device is provided with a focusing mirror that reflects and focuses extreme ultraviolet light and a magnet that generates a magnetic field. The focusing mirror may include a first mirror section,...  
WO/2017/089400A1
The present invention relates an NPC switching device (10) for an X-ray system (86) with symmetric power supply, wherein the switching device is amended by extra damping resistors (13, 18) in the high voltage rails (24, 28). These resist...  
WO/2017/090237A1
A radiographic imaging system includes a radiation detector, a controller, and determining unit. The radiation detector detects radiation emitted from a radiation source. The controller is capable of selectively performing wired communic...  
WO/2017/089030A1
The invention relates to a circuit arrangement comprising electronic first components (7) arranged on a printed circuit board (9), at high-voltage potential. The circuit arrangement comprises: functionless, electronic second components (...  
WO/2017/087569A1
The present disclosure is directed to laser produced plasma light sources having a target material, such as Xenon, that is coated on the outer surface of a drum. Embodiments include bearing systems for rotating the drum that have structu...  
WO/2017/083569A1
The present disclosure is directed to a device having a nozzle for dispensing a liquid target material; one or more intermediary chamber(s), each intermediary chamber positioned to receive target material and formed with an exit aperture...  
WO/2017/081452A1
Methods and apparatus (40, 42) for inspecting nuclear waste, for example drums (10) of intermediate level nuclear waste, are disclosed. In particular, a single laser pulse may be directed at a pitcher-catcher laser target structure (34, ...  
WO/2017/076427A1
The invention relates to a driver laser assembly (12) for an EUV radiation-generating device (1), comprising the following: a radiation source (2) for generating laser pulses (11) and an amplifier assembly (3) with at least one optical a...  
WO/2017/077614A1
An extreme ultraviolet light generating device is provided with: a chamber in which extreme ultraviolet light is generated from a target provided in a generating area; a condensing mirror 23 for reflecting the extreme ultraviolet light f...  
WO/2017/077641A1
An extreme ultraviolet light generating device is provided with: a chamber; an EUV collecting mirror that is disposed within the chamber, is provided with a reflective surface having a concave curved face shape and an outer peripheral pa...  
WO/2017/066843A1
An articulated arm to suspend an X-ray head from a support section in a radiographic imaging apparatus comprising two pairs of linkages separated and joined to an intermediate linkage wherein the proximal end of the first pair of linkage...  
WO/2017/066841A1
There is disclosed a mobile radiographic imaging apparatus including a component operable to emit radiation for imaging a subject, an arm rotatably connected at a proximal end thereof to a body section of the apparatus, such that it is s...  
WO/2017/063686A1
The invention relates to a polarizer assembly (1) comprising the following: a first polarizer device (2) with a first polarizer surface (8) for linearly polarizing a laser beam (5) which propagates in a first direction (R1) and which str...  
WO/2017/060814A1
The invention relates to a device (10) for determining spatially dependent x- ray flux degradation and photon spectral change, a system (1) for determining spatially dependent x-ray flux degradation and photon spectral change for an x-ra...  
WO/2017/059314A8
An optical source for a photolithography tool includes a source configured to emit a fist beam of light and a second beam of light, the first beam of light having a first wavelength, and the second beam of light having a second wavelengt...  
WO/2017/054974A1
A mobile c-arm X-ray apparatus (1a, 1b, 1c) is described. The mobile X-ray apparatus (1a, 1b, 1c) comprises an electrically operated X-ray source (3). The mobile C-arm X-ray apparatus (a, 1b, 1c) also has an electrical energy storage dev...  

Matches 101 - 150 out of 12,887