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WO/2022/134542A1 |
An automatic exposure control method and system for an X-ray. The method comprises: opening a flat panel detector (11), performing parametric configuration on the flat panel detector (11), and selecting an exposure irradiation field; sca...
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WO/2022/135762A1 |
The invention relates to an X-ray source, comprising an electron source for providing electrons and a target element that can be subjected to the electrons, wherein the X-ray source has at least one deflection device (140) for at least t...
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WO/2022/139969A1 |
An x-ray source assembly includes an anode stack including a source spot upon which electrons impinge with power being supplied to the assembly, and a control system to facilitate maintaining intensity of output x-rays from the x-ray sou...
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WO/2022/121657A1 |
A detection device, a laser plasma light source and an adjustment method therefor, the detection device comprising a detector (280) and a controller (270); the detector (280) is disposed in a vacuum chamber (240) of the laser plasma ligh...
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WO/2022/119750A1 |
Provided herein is technology relating to radiology and radiotherapy and particularly, but not exclusively, to apparatuses, methods, and systems for multi-axis medical imaging of patients in vertical and horizontal positions.
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WO/2022/111935A1 |
Disclosed is a metrology apparatus for measurement of a target formed on a substrate by a lithographic process and associated method. The metrology apparatus comprises a radiation source operable to provide first radiation; a configured ...
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WO/2022/113443A1 |
Disclosed are: a rotary foil trap that has a relatively long period of operation lifetime without occurrence of a defect such as breakage of a foil in a short period; and a light source device provide with said rotary foil trap. A rota...
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WO/2022/102201A1 |
Disclosed are a foil trap cover device capable of inhibiting the occurrence of a failure of a heating means caused by debris, and a debris reduction apparatus equipped with the same. This foil trap cover device: has a plurality of piec...
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WO/2022/096386A1 |
:A monitoring device for maintenance prediction for a medical imaging apparatus and a related method are described. First and second data sets of parameters of the medical imaging apparatus are measured over respective first and second p...
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WO/2022/088045A1 |
Disclosed are a portable split ray system and an anti-collision portable X-ray machine head. The portable split ray system comprises an X-ray machine head and a power supply module splittingly arranged; the X-ray machine head is connecte...
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WO/2022/084234A1 |
An X-ray system is disclosed, comprising an electron-impact X-ray source configured to generate an X-ray beam; a radiation-shielded housing having an X-ray outlet port; an X-ray optical element arranged within said radiation-shielded hou...
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WO/2022/079986A1 |
The present invention addresses the problem of improving the resistance to corrosion of a receiving surface of a receiving plate member that catches a plasma material or debris. This extreme ultraviolet light source (1) comprises: a li...
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WO/2022/082055A1 |
An x-ray irradiation system includes a first x-ray tube constructed and arranged to be able to irradiate an object with at least a portion of a first x-ray beam emitted from the first x-ray tube, and a second x-ray tube constructed and a...
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WO/2022/063526A1 |
Described is a pump comprising a reservoir and a plurality of heating elements in thermal communication with the reservoir, the plurality of heating elements configured to selectively provide thermal energy to the reservoir. Also describ...
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WO/2022/063509A2 |
A pressure relief apparatus includes a pressure relief component formed of a compressible material and disposed at an interior surface of a structure within a target material supply system. The target material supply system is configured...
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WO/2022/063616A2 |
A mechanism for controlling an electron beam generator of an X-ray tube that switches between a low voltage mode and a high voltage mode. The proposed mechanism, during a transition between the low and high voltage modes, controls a powe...
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WO/2022/058131A1 |
A pressure vessel is configured to retain a fluid that includes tin. The pressure vessel includes a liner made of molybdenum, the liner defining a liner cavity that retains the tin fluid and is in contact with the tin fluid, and a pressu...
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WO/2022/059821A1 |
The present invention relates to an electromagnetic wave generation device, and provides an electromagnetic wave generation device comprising: a tube including an anode, a cathode and at least one gate; a first power supply circuit conne...
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WO/2022/047414A9 |
A thermal management system and method for cooling a CT detector assembly of a CT imaging system. The thermal management system uses a combination of air cooling for the readout electronics of the CT detector assembly and liquid cooling ...
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WO/2022/053381A1 |
The invention relates to an optical monitoring system (200) for monitoring an X-ray tube (100), the optical monitoring system (200) comprising: at least one optical sensor (201) configured to detect first signals of a first optical param...
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WO/2022/053451A1 |
An X-ray laser apparatus (100) for generating X-rays (1) comprises an excitation laser device (10) arranged to generate driving laser pulses (2), and a converter material source device (20) arranged to provide a droplet-shaped converter ...
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WO/2022/053622A1 |
The present invention relates to a system and a method for high-voltage switching for a computed tomography apparatus. The system comprises an oscillating circuit with a non-linear inductor and a capacitor. The inductor and the capacitor...
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WO/2022/053314A1 |
There is provided voltage switching circuitry (100) for an X-ray tube (10). The voltage switching circuitry comprises a plurality of waveform generators (102) connectable to an output (14) of a voltage generator (12) for supplying an ope...
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WO/2022/050875A1 |
A radiation source contains a collector module comprising an optical collector, positioned in a vacuum chamber with an emitting plasma, further comprising a means for debris mitigation which include at least two casings arranged to outpu...
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WO/2022/038921A1 |
This extreme ultraviolet light source device is provided with: a light source unit that generates plasma for emitting extreme ultraviolet light; a vacuum cabinet disposed between a utilization device by which the extreme ultraviolet ligh...
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WO/2022/022794A1 |
The invention relates to the field of X-ray equipment. An X-ray tube comprises a housing, the cavity of which forms a vacuum chamber, and arranged inside side vacuum chamber a cathode source of free electrons, a focusing electrode and an...
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WO/2022/023201A1 |
Disclosed is an apparatus for and method of aligning a target composed of a target material and a conditioning beam provided to condition the target by changing the target's shape, mass distribution, etc., in which the conditioning beam ...
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WO/2022/017687A1 |
Disclosed is an illumination source comprising a gas delivery system being configured to provide a gas target for generating an emitted radiation at an interaction region of the gas target, and an interferometer for illuminating at least...
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WO/2022/017866A1 |
A target material supply apparatus includes: first and second fluid flow components (1122, 1126) that define an axial flow path when joined together, in which the axial flow path is between a source of target material fluid and a nozzle ...
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WO/2022/019954A1 |
A gantry cooling system of a diagnostic medical imaging apparatus transfers apparatus-generated heat, such as gantry heat, to a solid material heatsink, via a circulating-fluid coolant conduit. In some embodiments, the heatsink is incorp...
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WO/2022/012869A1 |
A source material valve placed in a fluid feed line for a source material chamber such as a source material refill reservoir to prevent molten source material in the chamber from reaching and so contaminating and blocking the fluid feed ...
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WO/2022/008145A1 |
Systems, apparatuses, and methods are provided for steering aligning a laser beam and a fuel target. An example method can include generating, at a first rate, first sensing data indicative of a first overlap between a fuel target and a ...
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WO/2022/002662A1 |
Apparatus for and method of accelerating droplets used to generate EUV radiation that comprise an arrangement producing a laser beam directed to an irradiation region and a droplet source. The droplet source includes a fluid exiting a no...
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WO/2022/005477A1 |
A method comprises identifying a depositional form of a mineral phase in a sedimentary rock sample based on a measurement of a parameter indicative of a size of crystallites of the mineral phase in the rock sample.
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WO/2022/002560A1 |
Systems, apparatuses, and methods are provided for optical metrology in an extreme ultraviolet (EUV) radiation system. An example system can include a metrology system and a window. An example metrology system can be configured to be dis...
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WO/2022/002566A1 |
An EUV collector (11) has a reflection surface (20) having a basic mirror shape of a sector of a sphere. A diffraction grating (22) for EUV used light (10) is applied to the reflection surface (20). The diffraction grating (22) is embodi...
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WO/2021/258156A1 |
An imaging device for acquiring a time series of in vivo images of a region of a subject's body is provided. The imaging device includes at least three energy sources, at least three detectors for detecting energy from the at least three...
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WO/2021/257049A1 |
This specification describes an X-ray scanning system that adaptively generates a scatter signal, in the course of a single scan, based on the detected brightness areas of a scanned object. An X-ray source is configured to emit an X-ray ...
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WO/2021/251046A1 |
Provided is an extreme ultraviolet light source device including: a light source unit that generates plasma that emits extreme ultraviolet light; a first vacuum housing in which the light source unit is disposed; a second vacuum housing ...
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WO/2021/249471A1 |
The present invention relates to a connection device of a high-voltage power supply and an X-ray tube, and a corresponding X-ray source. The connection device comprises a first connecting unit a second connecting unit, the first connecti...
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WO/2021/246254A1 |
The opening edge surface (45a) of an emitter support female screw hole (45) provided in an emitter support (4) extends in the radial direction of the emitter support female screw hole (45). In an emitter support operation hole (32) provi...
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WO/2021/246253A1 |
A vacuum container (11) is configured so that: an opening (21) on one side and an opening (22) on another side in the longitudinal direction of a cylindrical insulating body (2) are sealed with an emitter unit (30) and a target unit (70)...
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WO/2021/247212A1 |
An EUV light source including a vacuum chamber, a droplets injector operatively connected to the vacuum chamber for directing the droplets into the vacuum chamber, droplets produced by the droplets injector wherein the droplets have one ...
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WO/2021/241227A1 |
The present invention is a high voltage generator comprising a Cockcroft-Walton circuit that applies a potential difference to a load (2) upon receiving a supply of AC power from an AC power source (1), wherein three or more substrates a...
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WO/2021/239382A1 |
Systems, apparatuses, and methods are provided for measuring the level of a radiation fuel in an extreme ultraviolet (EUV) radiation system. In one example, a method for measuring the fuel level includes directing an inspection beam thro...
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WO/2021/239357A1 |
An apparatus includes: a vessel comprising an interior space; a material supply system configured to provide targets comprising target material along a path in the interior space; a detection system configured to detect scattered light p...
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WO/2021/233645A1 |
A droplet generator nozzle (800, 820/830) includes a metal body (802, 822), a metal fitting (812, 823/833) arranged adjacent to the metal body, and a capillary (804, 824/834) comprising a first end and a second end. The first end of the ...
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WO/2021/229902A1 |
This extreme ultraviolet light source device comprises: a cathode; an anode; a power supply device; a first support structure that is metal and that supports the cathode; and a second support structure that is metal and that supports the...
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WO/2021/228517A1 |
An EUV radiation source comprising a fuel emitter configured to produce fuel droplets; a laser system configured to illuminate a fuel droplet at a plasma formation region, the laser system comprising: a first laser configured to produce ...
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WO/2021/223953A1 |
An apparatus includes: a mechanically insulating device including a flexible bellows (315) extending between first and second flanges (325, 330) and defining a bellows passageway that extends along an axial direction between openings of ...
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