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Matches 201 - 250 out of 12,833

Document Document Title
WO/2016/098193A1
The present invention can prevent reduction in output of EUV light. This extreme ultraviolet light generation device may be provided with: a chamber 2 in which extreme ultraviolet light is generated from plasma occurred by irradiating, w...  
WO/2016/099758A1
A laser produced plasma extreme ultraviolet laser source comprising at least one variable radius mirror. The at least one variable radius mirror to adjust a beam diameter of a main pulse at a specified distance from a pre-pulse focal pla...  
WO/2016/099758A8
A laser produced plasma extreme ultraviolet laser source comprising at least one variable radius mirror. The at least one variable radius mirror to adjust a beam diameter of a main pulse at a specified distance from a pre-pulse focal pla...  
WO/2016/100393A1
The present disclosure is directed to plasma-based light sources. Systems and methods are described for protecting components of the light source from plasma generated debris which can include target material gas, atomic vapor, high ener...  
WO/2016/098240A1
A beam adjustment device in an extreme ultraviolet light generation device of the present invention may include a first pair comprising a first concave mirror and a first convex mirror arranged on a light path for a pulse laser light, a ...  
WO/2016/099622A1
Tube amplifier system including a plurality of conductor walls extending parallel to a longitudinal axis and defining an interior space therebetween. The tube amplifier system also including a shorting deck that extends transverse to the...  
WO/2016/098543A1
A beam adjustment device in an extreme ultraviolet light generation device of the present invention may include a first pair comprising a first concave mirror and a first convex mirror arranged on a light path for a pulse laser light, a ...  
WO/2016/087394A1
The invention relates to a system (31) for generating spectral computed tomography projection data. A spectral projection data generation device (6) comprising an energy-resolving detector generates spectral computed tomography projectio...  
WO/2016/084356A1
Disclosed is a liquid level detection device for appropriately detecting the liquid level (contained amount) of a high-temperature plasma source material in a liquid state, such as molten tin, within a reservoir containing the high-tempe...  
WO/2016/083647A1
The invention relates to a quality control device (1) for apparatus emitting ionising radiation, comprising : a plate (2) that has a face consisting of a fluorescent or phosphorescent material; a pair of horizontal delimiting strips (3a)...  
WO/2016/084167A1
The vibrator unit according to an embodiment of the present invention is a vibrator unit (310, 320, 330) for applying vibration onto a target material (271) that is supplied inside a target flow path (FL), and equipped with a vibrating e...  
WO/2016/079838A1
An extreme ultraviolet light generating device that generates extreme ultraviolet light by generating plasma by irradiating a target with pulsed laser light outputted from a laser device may be provided. This extreme ultraviolet light ge...  
WO/2016/072431A1
An excitation unit according to one embodiment of the present invention applies vibrations to a target material that has been supplied inside of a target flow path. The excitation unit may be provided with the following: a vibration tran...  
WO/2016/071972A1
A target generation device (26) according to one embodiment of the present disclosure may comprise: a filter structure (110, 110A, 110B, 120, 130, 150, 160); a flange (301) which accommodates the filter structure and in which exists a fl...  
WO/2016/072025A1
An excitation unit according to one embodiment of the present invention is an excitation unit (310, 320) that applies vibrations to a target material (271) that has been supplied inside of a target flow path (FL). The vibration unit may ...  
WO/2016/067343A1
The purpose of the present invention is to output laser light having desired characteristics at a desired timing. This laser device is a laser device to be used in tandem with an extreme ultraviolet light generation device that generates...  
WO/2016/067432A1
An X-ray device 1 according to the present invention is provided with a timer 31A for monitoring a nonoperation time indicating the time from the previous signal applied to a control circuit 31 to the next applied signal. Further, if the...  
WO/2016/063409A1
This extreme ultraviolet light generation system may include a laser system and a control unit. The laser system may generate a mist target by irradiating a first target with first pulsed laser light and diffusing the first target, and m...  
WO/2016/059827A1
This transformer is provided with: an iron core (31); a winding part (21, 22) which has a winding wound around the iron core and is installed at the outer circumference of the iron core; and an insulating member (1b, 2b, 3b) which has a ...  
WO/2016/059768A1
Disclosed are a foil trap capable of properly capturing debris without the overall structure thereof being made unnecessarily larger, and an extreme-ultraviolet light source apparatus for mask inspection provided with the foil trap. A de...  
WO/2016/058746A1
A radiation source (SO), which is operable to produce pulses of radiation, comprises: a wall (9,21) with an aperture (8,22); a radiation collector; a rotatable shield (200); and a drive mechanism (230) arranged to rotate the shield about...  
WO/2016/059674A1
In one aspect of this invention, the target material (271) is used for a target generation device (26, 120, 140, 51, 112) of an extreme UV generation device (1), wherein the concentration of dissolved oxygen may be less than or equal to ...  
WO/2016/056639A1
 In the present invention, a ferroelectric body is irradiated with ultraviolet (UV) light, and the ferroelectric body is caused to stably generate electric potential. A method for radiating charged particles, in which the UV-light-rece...  
WO/2016/045905A1
Disclosed is a high-voltage generator for an x-ray apparatus. The generator comprises a voltage multiplier having a high-voltage output terminal and first and second alternating-current input terminals, an output transformer coil (12) ha...  
WO/2016/047437A1
This mobile X-ray imaging device comprises an X-ray high voltage generator and an X-ray tube assembly. The X-ray high voltage generator comprises a storage battery, a capacitor, and a recovering unit that recovers electrical power accumu...  
WO/2016/043318A1
 Provided is a light source device and a method with which the efficiency of generating EUV light can be further improved. [Solution] According to this EUV light source device, a noble gas is supplied into a space inside a hollow body ...  
WO/2016/043313A1
Provided is an EUV light source system that can achieve further improvements in the irradiance of EUV light. Plasma is formed in an interior space of a hollow body (2) as a result of the energy of standing waves that are formed in an int...  
WO/2016/038506A1
An extreme ultraviolet (EUV) radiation source pellet(8) includes at least one metal particle (30) embedded within a heavy noble gas cluster (20) contained within a noble gas shell cluster (10). The EUV radiation source assembly can be ac...  
WO/2016/038657A1
This transmission system for transmitting a pulsed laser beam into an extreme UV light chamber may contain: an optical path adjustment device whereby the optical path of a first pre-pulsed laser beam and the optical path of a second pre-...  
WO/2016/034409A1
The present invention relates to a high voltage generator (100) for supplying an X-ray tube (200), the high voltage generator (100) comprising: a voltage regulator device (100-1), which is configured to provide a DC voltage; a plurality ...  
WO/2016/030485A1
Disclosed is a laser-driven photon source comprising drive optics which focus drive radiation so as to maintain a plasma. The point spread function of the drive optics has a point spread function (75) which is configured such that a spec...  
WO/2016/032683A1
The present invention discloses a method for removing streaks from detector cells with performance difference, specifically a method for removing streaks from detector cells with performance difference and streaks caused by other reasons...  
WO/2016/027346A1
This extreme ultraviolet light generation system may be provided with: a chamber; a target supply unit configured to supply a target to a predetermined region in the chamber, said target having an atomic density of 8.0×1017-1.3×1018 at...  
WO/2016/022267A1
A droplet generation system for use with a laser produced plasma (LPP) extreme ultraviolet (EUV) source plasma chamber is described. During EUV generation, oscillations can occur as a function of droplet time-of-flight within the plasma ...  
WO/2016/012192A1
A radiation source arranged to receive an initiating radiation beam. The radiation source comprises a polarisation adjustment apparatus and a focussing unit configured to focus the initiating radiation beam to be incident on a fuel targe...  
WO/2016/013114A1
To improve energy stability of EUV light. This extreme ultraviolet light generation apparatus may be provided with: a chamber wherein extreme ultraviolet light is generated from plasma generated by irradiating a target with laser light, ...  
WO/2016/013102A1
A target sensor used in this extreme ultraviolet light generation apparatus may include: a plurality of sensor elements that respectively output sensor signals which change corresponding to quantities of light received by light receiving...  
WO/2016/013550A1
 The present invention improves the energy stability of EUV light. An extreme UV light generation device is provided with a chamber in which extreme UV light is generated from a plasma produced by directing a laser beam at a target sup...  
WO/2016/013515A1
An extreme ultraviolet light generation device that uses a target sensor that may contain multiple sensor elements each of which outputs a sensor signal that changes in accordance with the amount of light received on a light-receiving su...  
WO/2016/007312A2
An initial pulse of radiation is generated; a section of the initial pulse of radiation is extracted to form a modified pulse of radiation, the modified pulse of radiation including a first portion and a second portion, the first portion...  
WO/2016/005006A1
The device relates to a driver laser arrangement (12) for an EUV radiation generation apparatus (1), comprising: a radiation source (2) for generating pulsed laser radiation (7) having a laser frequency (fL), and an amplifier arrangement...  
WO/2016/007312A3
An initial pulse of radiation is generated; a section of the initial pulse of radiation is extracted to form a modified pulse of radiation, the modified pulse of radiation including a first portion and a second portion, the first portion...  
WO/2016/006162A1
Disclosed are a debris trap device equipped with a rotary foil trap and cover member and capable of trapping debris stably with minimal defects in the rotary foil trap, and extreme ultraviolet light source equipment including the debris ...  
WO/2016/006100A1
This extreme ultraviolet light generation device generates extreme ultraviolet light by bringing a target into a plasma state by irradiating the target with pulsed laser light. The extreme ultraviolet light generation device may be provi...  
WO/2016/001973A1
A target supply device (7A) may be provided with: a tank (84A) that contains a metallic target material (270); a nozzle (86A) having a nozzle hole (822A) through which the target material (270) is outputted from the tank (84A); a filter ...  
WO/2016/003957A3
Spectral estimation and poly-energetic reconstructions methods and x-ray systems are disclosed. According to an aspect, a spectral estimation method includes using multiple, poly- energetic x-ray sources to generate x-rays and to direct ...  
WO/2016/003513A3
Coherent electronic current is generated by generating and transmitting an electron bunch along a longitudinal axis. The electron bunch is then directed onto a target, wherein the target imparts a transverse spatial modulation to the ele...  
WO/2015/196912A1
Provided in the present invention is a B/S architecture-based radiograph inspection system characterized in being provided with: a client that launches an image operation request and is capable of displaying an image operation result dir...  
WO/2015/199218A1
Provided is a high voltage device in which the rise and fall times of the output voltage can be reduced while suppressing the switching loss during the normal period. The high voltage device is equipped with: an inverter connected betwee...  
WO/2015/185762A1
A multiple energy single electron beam generator (1) comprising a generator system (2) adapted to deliver a first beam of electrons (13) at a first energy (E1) along a first axis (A1) at a first output (14) and a second beam of electrons...  

Matches 201 - 250 out of 12,833