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Matches 251 - 300 out of 12,887

Document Document Title
WO/2016/013102A1
A target sensor used in this extreme ultraviolet light generation apparatus may include: a plurality of sensor elements that respectively output sensor signals which change corresponding to quantities of light received by light receiving...  
WO/2016/013550A1
 The present invention improves the energy stability of EUV light. An extreme UV light generation device is provided with a chamber in which extreme UV light is generated from a plasma produced by directing a laser beam at a target sup...  
WO/2016/013515A1
An extreme ultraviolet light generation device that uses a target sensor that may contain multiple sensor elements each of which outputs a sensor signal that changes in accordance with the amount of light received on a light-receiving su...  
WO/2016/007312A2
An initial pulse of radiation is generated; a section of the initial pulse of radiation is extracted to form a modified pulse of radiation, the modified pulse of radiation including a first portion and a second portion, the first portion...  
WO/2016/005006A1
The device relates to a driver laser arrangement (12) for an EUV radiation generation apparatus (1), comprising: a radiation source (2) for generating pulsed laser radiation (7) having a laser frequency (fL), and an amplifier arrangement...  
WO/2016/007312A3
An initial pulse of radiation is generated; a section of the initial pulse of radiation is extracted to form a modified pulse of radiation, the modified pulse of radiation including a first portion and a second portion, the first portion...  
WO/2016/006162A1
Disclosed are a debris trap device equipped with a rotary foil trap and cover member and capable of trapping debris stably with minimal defects in the rotary foil trap, and extreme ultraviolet light source equipment including the debris ...  
WO/2016/006100A1
This extreme ultraviolet light generation device generates extreme ultraviolet light by bringing a target into a plasma state by irradiating the target with pulsed laser light. The extreme ultraviolet light generation device may be provi...  
WO/2016/001973A1
A target supply device (7A) may be provided with: a tank (84A) that contains a metallic target material (270); a nozzle (86A) having a nozzle hole (822A) through which the target material (270) is outputted from the tank (84A); a filter ...  
WO/2016/003957A3
Spectral estimation and poly-energetic reconstructions methods and x-ray systems are disclosed. According to an aspect, a spectral estimation method includes using multiple, poly- energetic x-ray sources to generate x-rays and to direct ...  
WO/2016/003513A3
Coherent electronic current is generated by generating and transmitting an electron bunch along a longitudinal axis. The electron bunch is then directed onto a target, wherein the target imparts a transverse spatial modulation to the ele...  
WO/2015/196912A1
Provided in the present invention is a B/S architecture-based radiograph inspection system characterized in being provided with: a client that launches an image operation request and is capable of displaying an image operation result dir...  
WO/2015/199218A1
Provided is a high voltage device in which the rise and fall times of the output voltage can be reduced while suppressing the switching loss during the normal period. The high voltage device is equipped with: an inverter connected betwee...  
WO/2015/185762A1
A multiple energy single electron beam generator (1) comprising a generator system (2) adapted to deliver a first beam of electrons (13) at a first energy (E1) along a first axis (A1) at a first output (14) and a second beam of electrons...  
WO/2015/185152A1
The invention relates to a device comprising a drive laser assembly having a beam source for generating a laser beam (7) and having an amplifying assembly for amplifying the laser beam (7), and comprising a unit (15) for monitoring the l...  
WO/2015/185003A1
Disclosed is a collimation modulatable X-ray generator. The X-ray generator comprises an X-ray source assembly including an X-ray tube with a cathode and an anode and a front collimator; a high voltage generator used for supplying the di...  
WO/2015/182317A1
A learning unit (25) in learning mode generates a cluster from a cluster analysis of data formed from frequency constituent data (Fa) and state data (x, y, z, T, θ), obtained from a sensor unit (13). An abnormality calculation unit (26)...  
WO/2015/182092A1
The present invention discloses an extreme ultraviolet light source device with which efficient EUV radiation can be stably obtained. This EUV light source device (100) is provided with a first laser source (31a) which shines a laser lig...  
WO/2015/178228A1
An X-ray generation target (112) is provided with a substrate in one embodiment. Also, in the one embodiment, the X-ray generation target is provided with a plurality of first X-ray nano-targets (112f) that are disposed on the substrate,...  
WO/2015/169937A1
The invention relates to a system and to a method for analyzing a light beam conducted by a beam-conducting optical unit. A system according to the invention comprises a graduated neutral-density filter assembly (120, 520), which is arra...  
WO/2015/171927A1
Ultralow-dose, x-ray or gamma-ray imaging is based on fast, electronic control of the output of a laser-Compton x-ray or gamma-ray source (LCXS or LCGS). X-ray or gamma-ray shadowgraphs are constructed one (or a few) pixel(s) at a time b...  
WO/2015/166524A1
This extreme ultraviolet light generation apparatus may include: a target supply unit that supplies a target from a nozzle; a first illuminating apparatus, which outputs light having first characteristics, and which illuminates the targe...  
WO/2015/167753A2
The structure of materials can be characterized (e.g., via CD-SAXS) by generating a burst of electron bunches in a pulse train and accelerating the electron bunches to relativistic energies. Meanwhile, an optical cavity is filled with a ...  
WO/2015/166526A1
This target-supplying device (7A) is provided with a tank (711A) that stores a target substance (270), a nozzle (718A) that is connected to said tank (711A) and outputs the target substance (270), and a gas-supplying unit (73A) that supp...  
WO/2015/166868A1
This target-supplying device (7A) is provided with a tank (711A) that stores a target substance (270), a nozzle (718A) that is connected to said tank (711A) and outputs the target substance (270), and a gas-supplying unit (73A) that supp...  
WO/2015/158180A1
A medical diagnostic high-frequency X-ray machine and a power supply apparatus. The power supply apparatus can convert a mains alternating current into a direct current by adding alternating-current direct-current converters (121, 421, 5...  
WO/2015/146337A1
The X-ray high-voltage device is provided with a transformer, an inverter for converting a direct current voltage into an alternating current voltage, a rectification circuit for smoothing the alternating current voltage and supplying a ...  
WO/2015/145580A1
The present invention stably supplies a target. This target supply apparatus melts a target and supplies the target to the inside of a chamber, said target generating extreme ultraviolet light when irradiated with laser light in the cham...  
WO/2015/145668A1
 An X-ray generation device in which an electron beam emitted from a cathode reaches a target, whereby X-rays are released, wherein the X-ray generation device has first and second high-voltage power supplies that are serially connecte...  
WO/2015/142926A1
Systems and methods for providing laser sustained plasma light sources are disclosed. Different from conventional laser sustained plasma light sources where one fiber size and one wavelength combination is used in the lamphouse to genera...  
WO/2015/139900A1
A fuel emitter, comprising a first droplet stream generator and a droplet removal apparatus. The first droplet stream generator is arranged to emit a fuel stream comprising droplets separated by a first distance. The droplet removal appa...  
WO/2015/128297A1
A system for an extreme ultraviolet (EUV) light source includes an optical amplifier (206) including a gain medium (207) positioned on a beam path, the optical amplifier configured to receive a light beam at an input and to emit an outpu...  
WO/2015/124372A3
A lithographic system comprising a lithographic apparatus (LA) with an anamorphic projection system (PS), and a radiation source (SO) configured to generate an EUV radiation emitting plasma at a plasma formation location (4), the EUV rad...  
WO/2015/124714A1
The invention relates to a detection device for detecting a propagation direction of an optical beam. The detection device comprises a detector, which can be irradiated with the optical beam. The detection device comprises a focusing opt...  
WO/2015/124372A2
A lithographic system comprising a lithographic apparatus with an anamorphic projection system, and a radiation source configured to generate an EUV radiation emitting plasma at a plasma formation location, the EUV radiation emitting pla...  
WO/2015/120889A1
The invention relates to a device (20) for protecting a vacuum environment against leakage, comprising: an optical component (21) for closing off the vacuum environment in a gas-tight manner, a cooling device (25) for cooling the optical...  
WO/2015/121714A1
The invention discloses an integrated device for carrying out mammography, tomosynthesis and stereotactic biopsy of patient's breast in sitting, standing and lying down position. The patient's breast is positioned on the detector and x-r...  
WO/2015/118862A1
 Disclosed are a foil trap and a light source device that minimizes warping of a foil and reductions in the EUV transmittance of a foil trap caused by an increase in the size of the foil trap and lengthening of the foil. A truncated co...  
WO/2015/114174A1
The invention relates to a high-voltage, high-frequency, high-power transformer which includes a core (1) on which the primary winding (2) is arranged, on which a secondary winding (4) is arranged in an insulated manner, the entire assem...  
WO/2015/112425A3
A radiological imaging device that includes a gantry defining an analysis zone in which at least part of a patient is placed, a source suitable to emit radiation defining a central axis of propagation; a detector suitable to receive the ...  
WO/2015/111512A1
A data processing unit (11) provided with a frequency analyzer (21) for performing vibration frequency analysis, a noise level calculator (23) for calculating the level of noise produced outside an X-ray tube, and a defect sign detector ...  
WO/2015/110238A1
A faceted reflector (32, 32") for receiving an incident radiation beam (2) and directing a reflected radiation beam at a target. The faceted reflector comprises a plurality of facets, each of the plurality of facets comprising a reflecti...  
WO/2015/110380A1
A target material is provided at a target location, the target material including a material that emits extreme ultraviolet light when converted to plasma, and the target material extending in a first extent along a first direction and i...  
WO/2015/108420A1
The present invention relates to an Extreme Ultra Violet light source, to a trap for use in such a light source, to a multilayer mirror for use in such a light source, to a grazing incident mirror for use in such a light source, and to a...  
WO/2015/104225A1
The present invention provides improvements of resolution and contrast in the field of x-ray imaging by using a line emitting, quasi- monochromatic x-ray source for x-ray fluorescence computed tomography. A particular type of x-ray sourc...  
WO/2015/101509A1
A first remaining plasma (227a) that at least partially coincides with a target region (230) is formed; a target including target material (220b) in a first spatial distribution to the target region is provided, the target material inclu...  
WO/2015/097820A1
In one aspect of the present disclosure, a target generating device may cover the periphery of an output port of a nozzle and may include a gas lock cover that guides a gas that is supplied from a gas supply part. The gas lock cover may ...  
WO/2015/097119A1
The invention is a cooking appliance (1) which comprises a carcass (10), a front panel (11) on the carcass (10), a button (5) on the front panel (11), a flow control element (62) which regulates the flow of gas by the turning of a shaft ...  
WO/2015/098031A1
This invention discloses a light-source device that minimizes decreases in the reflectance of a condensing mirror or the transmittance of a debris trap due to debris. In this device, a masking member (6) that has an opening (6a) is provi...  
WO/2015/097888A1
 To make it possible to recover a target efficiently. An extreme UV light generator, which may be provided with: a chamber in which extreme UV light is generated when a target is irradiated in the chamber with laser light; a target fee...  

Matches 251 - 300 out of 12,887