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Matches 351 - 400 out of 12,963

Document Document Title
WO/2015/068230A1
In the extreme UV light generation device according to an example of the present invention, droplets, whereof the charges are controlled by a charging electrode, may include a plurality of groups, each of which comprising consecutive dro...  
WO/2015/067461A1
An X-ray imaging device (1) and methods for operating such device are presented. In an embodiment, the device (1) comprises an X- ray source (5), an arrangement (12) of a first grating (13), a second grating (15) and a third grating (17)...  
WO/2015/063825A1
This EUV-light generation device, which allows efficient target retrieval, may be provided with the following: a chamber in which EUV light is generated when a target inside said chamber is exposed to laser light; a target-feeding unit t...  
WO/2015/055374A1
A radiation source for a lithographic apparatus, in particular a laser-produced plasma source includes a fan unit surrounding but not obstructing the collected radiation beam that is operated to generate a flow in a buffer gas away from ...  
WO/2015/053835A1
An x-ray source comprises an x-ray tube and a power supply carried by an electrically-conductive case. An exterior of the case can include a socket. An electrically-conductive cap can attach to an anode of the x-ray tube and can carry th...  
WO/2015/045102A1
One example of the present invention is a laser device. The laser device may contain a master oscillator which emits a pulsed laser beam, and a plurality of light amplifiers which are disposed in the optical path of the pulsed laser beam...  
WO/2015/047725A1
Methods and apparatuses for creating and utilizing dual laser curtains from a single laser source in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system: to control droplet release and/or Irradiation are disclosed. A fir...  
WO/2015/045098A1
[Problem] To acquire high-output laser light. [Solution] The present invention may be provided with: a first polarization device having a polarization axis in a direction substantially matching the polarization direction of laser light o...  
WO/2015/047473A3
A low-power, compact piezoelectric particle emitter for emitting particles such as X-rays and neutrons. A piezoelectric transformer crystal receives an input voltage at an input end and generates a higher output voltage at an output elec...  
WO/2015/043833A1
The invention relates to an optical assembly, in particular a plasma light source (1') or an EUV lithography system, comprising a housing (2), which encloses a housing interior (3), a vacuum-generating unit for generating a vacuum in the...  
WO/2015/040829A1
The present invention provides an X-ray generating tube including a transmission target having a minute focal spot. The X-ray generating tube includes a transmission target having a first surface and a second surface opposite to the firs...  
WO/2015/040674A1
This target supply apparatus is provided with: a tank, which has a cylindrically formed main body section, one end section that closes one end of the main body section, said one end being in the axis direction of the main body section, a...  
WO/2015/041260A1
 The present invention makes it possible to generate stable EUV light in an appropriate state. This extreme ultraviolet light generation device may be provided with: a chamber in which a target supplied to an inner plasma generation ...  
WO/2015/039595A1
A curved array distributed X-ray device, having: a vacuum box (3), sealed about the periphery and the interior thereof being a high vacuum; a plurality of electron emission units (1), configured on the wall of the vacuum box (3) in such ...  
WO/2015/039604A1
Disclosed are a device and method for generating a flattened X-ray radiation field, and the device for generating a flattened X-ray radiation field is provided with: a plurality of electron accelerators (1, 1a, 1b), used for generating h...  
WO/2015/039602A1
An X-ray device comprising: a vacuum chamber (3) that is sealed at the periphery and contains a high vacuum; multiple electron emission units (1) each independent from the others and arranged into a linear array on the chamber wall of on...  
WO/2015/040829A4
The present invention provides an X-ray generating tube including a transmission target having a minute focal spot. The X-ray generating tube includes a transmission target having a first surface and a second surface opposite to the firs...  
WO/2015/036024A1
The invention relates to a beam guiding apparatus (6), comprising: a vacuum chamber (12), in which a target material (8) is introducible into a target region (7) for generating EUV radiation, wherein the vacuum chamber (12) includes a fi...  
WO/2015/036025A1
The invention relates to a beam guiding apparatus (6), comprising: a vacuum chamber (12), in which a target material (8) is introducible into a target region (7) for generating EUV radiation, wherein the vacuum chamber (12) includes a fi...  
WO/2015/034613A1
A CT system includes an x-ray source, a high-voltage (HV) tank coupled to the x-ray source, and an inverter coupled to the HV tank. The inverter includes an H-bridge configuration of switches comprising a first leg and a second leg, wher...  
WO/2015/034992A1
An electrical transformer is provided. The transformer may include a first winding, a second winding, and a highly resistive magnetic core. The highly resistive magnetic core may provide galvanic isolation between the core material and b...  
WO/2015/033572A1
The present invention discloses a rotation-type foil trap in which even when an EUV light source is undergoing high input operation, and without reducing the transmissivity of extreme ultraviolet light (EUV), foil temperature increases a...  
WO/2015/032664A1
Rotating anode X-ray tubes degrade over time because of the action of the electron beam altering the surface of the focal spot area of a rotating anode. This causes a degradation in a resulting object image, when the source is used in an...  
WO/2015/028103A1
The invention relates to a beam guiding apparatus (3) for guiding a laser beam (4) from a radiation source (2) towards a target area (5) in which a target material (6) for generating EUV radiation (7) can be placed, comprising: a focussi...  
WO/2015/029137A1
This extreme ultraviolet light generation apparatus may be provided with: a chamber; a target supply unit that is configured to output a target to a predetermined region in the chamber; a light collecting optical system that is configure...  
WO/2015/028211A1
A radiation source includes a nozzle configured to direct a stream of fuel droplets along a droplet path towards a plasma formation location, and is configured to receive a gaussian radiation beam having gaussian intensity distribution, ...  
WO/2015/025218A1
The invention relates to a method and to devices for cooling radiation sources based on a plasma. The problem addressed by the invention is that of implementing of robust and effective cooling of plasma-based radiation sources without cu...  
WO/2015/020981A3
Systems and methods are described for determining a minimum radiation dose for a computed tomography (CT) scanning device. The method includes receiving a first input indicative of a selected minimum detectable contrast and a second inpu...  
WO/2015/019187A3
Extreme ultraviolet light, EUV, is produced in a laser-produced plasma, LPP, EUV light source when laser light strikes a target. Measuring reflected light (110) from the target by a Return Beam Diagnostics, RBD, module provides data on E...  
WO/2015/016117A1
In order to provide a simply configured X-ray CT device in which the standby time until X-ray irradiation is permissible is reduced without detection of positive electrode rotation frequency, a control unit (23) selects a rated positive-...  
WO/2015/015922A1
Disclosed is a filter wherein: the filter may be provided with a first member having a flow channel formed on a first surface, and a second member that is disposed such that a second surface covers the flow channel; the first member may ...  
WO/2015/014531A1
Disclosed is component for a radiation source, said radiation source being operable to generate radiation from a fuel, said component having a surface comprising a plurality of first regions that have a high wettability by said fuel, sep...  
WO/2015/013185A1
An EUV light source includes a rotatable, cylindrically-symmetric element having a surface coated with a plasma-forming target material, a drive laser source configured to generate one or more laser pulses sufficient to generate EUV ligh...  
WO/2015/005380A1
Increasingly miniaturizing a Cockcroft-Walton high-voltage generation device carries the risk of discharges from connection points between components, i.e. insufficient insulation reliability. This Cockcroft-Walton circuit (1) comprises ...  
WO/2015/004972A1
 This X-ray detection signal processing unit (5A) is provided with a preamplifier (50) for amplifying a signal outputted by an X-ray detection unit (4), a buffer amplifier (51), a coaxial cable (55), a preamplifier power source (56) fo...  
WO/2015/001144A1
The invention relates to a device comprising: a chassis (1) supporting the assembly; a telescopic column (2) including a lower fixed segment (5) that rotates about a vertical axis and at least one upper mobile segment (6); and a telescop...  
WO/2015/001139A1
The invention relates to an X-ray machine having a tape measure or measuring tape (5) attached to or incorporated in the X-ray emission unit comprising an X-ray tube (3) and a collimator (4), said tape measure being located on the tube i...  
WO/2014/210190A3
A method of detecting a possible collision in a medical procedure, includes: obtaining a reference depth image; obtaining an input depth image; determining a composite image using at least a part of the reference depth image and at least...  
WO/2014/206935A1
The invention relates to an EUV radiation generating device (30), comprising: at least one radiation source (31) for generating a first and second entrance beam (3a, 3b), and a beam influencing optical unit (1) for influencing the first ...  
WO/2014/206706A1
A radiation source generates extreme ultraviolet radiation. The radiation source comprises a plasma formation site located at a position in which a fuel will be contacted by a beam of radiation to form a plasma. A receiving structure is ...  
WO/2014/205410A1
The generation of EUV light includes rotating a cylinder at least partially coated with a plasma-forming target material, directing pulsed illumination to a first set of helically-arranged spots traversing a material-coated portion of th...  
WO/2014/203804A1
An extreme ultraviolet light generating system of the present invention may be provided with: a laser apparatus that supplies pulsed laser light to the inside of a chamber where EUV light is generated; a light shutter that is disposed on...  
WO/2014/205429A1
A gas bearing assembly including: a stator, a spindle rotatable about an axis, a first space between the spindle and the stator and arranged to receive a bearing gas at a first pressure, to support rotation of the spindle about the axis,...  
WO/2014/197023A3
A device for producing x-rays includes: a housing (101) that includes a folded high-voltage multiplier (104) coupled to a filament transformer (108), the transformer coupled to an x-ray tube (106) for producing the x-rays. A method of fa...  
WO/2014/197023A2
A device for producing x-rays includes: a housing that includes a folded high-voltage multiplier coupled to a filament transformer, the transformer coupled to an x-ray tube for producing the x-rays. A method of fabrication and an x-ray s...  
WO/2014/196914A1
The present invention relates to an arrangement (205, 2051, 2052, 2053, 2054, 2055, 305, 405) for measuring a X-ray dose parameter. The arrangement comprises a detector (3051, 3052) for detecting said x-ray dose. The arrangement is confi...  
WO/2014/192872A1
This extreme ultraviolet generation system may include: a chamber; a target generation unit that is configured to output a target toward a plasma generation region in the chamber; a laser system that generates first prepulse laser light,...  
WO/2014/189571A2
A method includes creating a gas flow in a gas cell (110) and cooling a portion of the gas flow to create a thermally-induced temperature gradient in the gas flow. The method also includes directing at least one laser beam (104) through ...  
WO/2014/187586A1
The invention relates to an X-ray source (1) having an outer housing (3) that can be evacuated, comprising at least one radiation exit window (5), an electron source (7) for emitting an electron beam and an anode (13) for producing X-ray...  
WO/2014/189571A3
A method includes creating a gas flow in a gas cell (110) and cooling a portion of the gas flow using a cryocooler (112) to create a thermally-induced temperature gradient in the gas flow. The method also includes directing at least one ...  

Matches 351 - 400 out of 12,963