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Matches 351 - 400 out of 12,833

Document Document Title
WO/2014/206706A1
A radiation source generates extreme ultraviolet radiation. The radiation source comprises a plasma formation site located at a position in which a fuel will be contacted by a beam of radiation to form a plasma. A receiving structure is ...  
WO/2014/205410A1
The generation of EUV light includes rotating a cylinder at least partially coated with a plasma-forming target material, directing pulsed illumination to a first set of helically-arranged spots traversing a material-coated portion of th...  
WO/2014/203804A1
An extreme ultraviolet light generating system of the present invention may be provided with: a laser apparatus that supplies pulsed laser light to the inside of a chamber where EUV light is generated; a light shutter that is disposed on...  
WO/2014/205429A1
A gas bearing assembly including: a stator, a spindle rotatable about an axis, a first space between the spindle and the stator and arranged to receive a bearing gas at a first pressure, to support rotation of the spindle about the axis,...  
WO/2014/197023A3
A device for producing x-rays includes: a housing (101) that includes a folded high-voltage multiplier (104) coupled to a filament transformer (108), the transformer coupled to an x-ray tube (106) for producing the x-rays. A method of fa...  
WO/2014/197023A2
A device for producing x-rays includes: a housing that includes a folded high-voltage multiplier coupled to a filament transformer, the transformer coupled to an x-ray tube for producing the x-rays. A method of fabrication and an x-ray s...  
WO/2014/196914A1
The present invention relates to an arrangement (205, 2051, 2052, 2053, 2054, 2055, 305, 405) for measuring a X-ray dose parameter. The arrangement comprises a detector (3051, 3052) for detecting said x-ray dose. The arrangement is confi...  
WO/2014/192872A1
This extreme ultraviolet generation system may include: a chamber; a target generation unit that is configured to output a target toward a plasma generation region in the chamber; a laser system that generates first prepulse laser light,...  
WO/2014/189571A2
A method includes creating a gas flow in a gas cell (110) and cooling a portion of the gas flow to create a thermally-induced temperature gradient in the gas flow. The method also includes directing at least one laser beam (104) through ...  
WO/2014/187586A1
The invention relates to an X-ray source (1) having an outer housing (3) that can be evacuated, comprising at least one radiation exit window (5), an electron source (7) for emitting an electron beam and an anode (13) for producing X-ray...  
WO/2014/189571A3
A method includes creating a gas flow in a gas cell (110) and cooling a portion of the gas flow using a cryocooler (112) to create a thermally-induced temperature gradient in the gas flow. The method also includes directing at least one ...  
WO/2014/188176A1
An X-ray source comprising: an elongate tubular housing adapted to be fitted Into a port of and extend into a chamber containing a sample to be analysed, said housing containing: an electron gun and a target mounted in the housing, the e...  
WO/2014/189055A1
To stabilize a state of a droplet to be outputted to the inside of a chamber. This extreme ultraviolet light generating apparatus may be provided with: a target supplying unit, which outputs, as a droplet, a target to the inside of a cha...  
WO/2014/184588A1
An x-ray / gamma ray imaging apparatus includes a pixellated x- ray / gamma ray detector (3) comprising a member configured to detect incident x-ray / gamma ray wavelength photons a position for a body under test (2), an x-ray or gamma r...  
WO/2014/178177A1
To cause a stable emission of extreme UV radiation from a laser-produced plasma, an extreme UV radiation light source device is disclosed, wherein a liquid or a solid raw material is supplied stably with fewer scattering of debris into t...  
WO/2014/171689A1
A detachable X-ray generating device proposed in the present invention comprises: an X-ray generating unit including an X-ray generating tube for irradiating an X-ray and a first connecting portion connected to the X-ray generating tube ...  
WO/2014/171497A1
The present invention provides a light source apparatus and method for further improving the generation efficiency of EUV light. Using an EUV light source apparatus (1), a "first state" and a "second state" are alternately achieved. In t...  
WO/2014/166468A1
The aim of the invention is to provide an arrangement for an electron beam x-ray computer tomography, said arrangement making do without the considerable axial extension of the electron emitter and largely omitting electron-optical beam ...  
WO/2014/169071A1
The present disclosure is directed to a system for protecting a reflective optic and/or any other surface in a plasma-based illumination system from debris by actively flowing gas against the debris flow direction. According to various e...  
WO/2014/162628A1
A rotating positive electrode X-ray tube unit (5) is provided with a rotating positive electrode X-ray tube (30) and a flow-path-forming body. The rotating positive electrode X-ray tube (30) has a negative electrode, a positive electrode...  
WO/2014/161698A1
A source collector apparatus for use in a lithographic apparatus comprises a fuel droplet generator (4) configured in use to generate a stream of fuel droplets (6) directed from an outlet of the fuel droplet generator towards a plasma fo...  
WO/2014/158464A1
An EUV light source target material handling system is disclosed which may comprises droplet generator having a target material reservoir in which the target material may he replenished while a nozzle portion of the droplet generator is ...  
WO/2014/154433A1
A radiation collector comprising a first collector segment comprising a plurality of grazing incidence reflector shells configured to direct radiation to converge in a first location at a distance from the radiation collector, a second c...  
WO/2014/155776A1
It has been very difficult to accumulate strong laser in the conventional optical resonator, because firstly it has been very difficult to control a resonator length less than 1 dstrok; in resonation position which is required for the la...  
WO/2014/158464A8
An EUV light source target material handling system is disclosed which may comprises droplet generator having a target material reservoir in which the target material may he replenished while a nozzle portion of the droplet generator is ...  
WO/2014/149436A1
Techniques are described that enhance power from an extreme ultraviolet light source with, feedback from a target material that has been modified prior to entering a target location into a spatially-extended target distribution or expand...  
WO/2014/151454A1
Contrast agents for x-ray imaging including stabilized metal nanoparticles and encapsulated nanoparticles, as well as methods for imaging tissue with these agents, are disclosed. Also disclosed are methods of dual energy x-ray imaging us...  
WO/2014/149435A1
A system for an extreme ultraviolet light source includes one or more optical elements positioned to receive a reflected amplified light beam and to direct the reflected amplified light beam into first, second, and third channels, the re...  
WO/2014/147901A1
An extreme ultraviolet light generating device is provided with: a chamber that contains a prescribed gas inside thereof; a light converging optical system that is disposed in a light path for pulse laser light output by a laser device a...  
WO/2014/143504A1
Techniques for generating EUV light include directing a first pulse of radiation toward a target material droplet to form a modified droplet, the first pulse of radiation having an energy sufficient to alter a shape of the target materia...  
WO/2014/143694A1
An x-ray device utilizes a band of material to exchange charge through tribocharging within a chamber maintained at low fluid pressure. The charge is utilized to generate x-rays within the housing, which may pass through a window of the ...  
WO/2014/139713A1
Disclosed are apparatus, systems, and methods for operating a radiation source that jets up a fuel for plasma generation and for recycling of the unused fuel. For an illumination system of a lithographic apparatus, a radiation source is ...  
WO/2014/140099A3
Disclosed herein are a high-voltage generator (120) for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target (500), and an x-ray source. Th...  
WO/2014/137331A1
Examples of electronic circuits and methods are provided. A power adapter is coupled to load device such that a power node and a signal node and a ground node are common to both entities. A supply voltage is regulated and provided by the...  
WO/2014/138673A1
A method for regulating output of a high voltage generator includes monitoring a voltage output of the generator and comparing it to a voltage setpoint to generate an error signal. A load on the generator is monitored to generate a load ...  
WO/2014/133797A1
A sealed cold cathode X-ray tube for use in small X-ray source devices is provided. In one embodiment, a scaled cold cathode X-ray tube includes an elongate member, a cathode emitter, and an anode. The sealed cold cathode X-ray tube is f...  
WO/2014/125939A1
Provided is a wireless communication device and system and a radiography system which are capable of conducting stable wireless communication. This radiography system comprises a radiation delivery device, a radiation image detection dev...  
WO/2014/124938A1
The invention relates to an x-ray device (10a-b), comprising at least one high-voltage supply unit (22a-b), at least one x-ray radiation unit (20a-b) for producing an x-ray beam (48a-b), at least one focusing unit (24a-b) for focusing th...  
WO/2014/126667A2
A method and apparatus for controlling the seed laser in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system are disclosed, in one embodiment, a seed laser generates both pre-pulses and main pulses which are amplified an...  
WO/2014/124769A1
A method of manufacturing a multi-layer mirror (500) comprising a multi-layer stack of pairs of alternating layers of a first material (510) and silicon (520), the method comprising depositing a stack of pairs of alternating layers of th...  
WO/2014/123835A1
There is provided an x-ray source (10) comprising: an enclosure body (12); a target (14) permanently fixed to or forming part of the enclosure body (12); an electron beam source within the enclosure body (12), the electron beam source (1...  
WO/2014/121873A1
A radiation source apparatus is configured to generate a beam of radiation by excitation of a fuel into a plasma. The apparatus comprises a receiving structure (504) for capturing fuel debris during operation and a heating arrangement (5...  
WO/2014/119079A1
Provided is an X-ray radiation source (2) in which, among the wall sections of a housing (51) for an X-ray tube (21), facing wall sections (51b) formed from alkali-containing glass are arranged to face a high-voltage area (VH) of a power...  
WO/2014/119080A1
Provided is an X-ray radiation source (2) in which, among the wall sections of a housing (51) for an X-ray tube (21), facing wall sections (51b) formed from alkali-containing glass are sandwiched by a filament (52) and an electric field ...  
WO/2014/119227A1
A radiation generating apparatus (1) includes a radiation tube (2) including an electrically insulating tubular member, a cathode (31) provided at one of two openings of the tubular member, and an anode (33) provided at the other opening...  
WO/2014/118999A1
The present invention provides a burst-laser generator using an optical resonator which produces high pulse-strength of burst-laser in order to conduct laser Compton scattering, comprising: a self-oscillation amplifying optical loop-path...  
WO/2014/118998A1
The present inventers provide an optical resonator which produces high strength of polarized laser beam so as to conduct laser Compton scattering, comprising: the 2-D-4-mirror optical resonator (A) includes the 2-D-4-mirror optic system ...  
WO/2014/121097A1
The present specification discloses a radiographic inspection system for screening an area. The inspection system has a container that defines an enclosed volume, a radiation source positioned within the enclosed volume, a detector array...  
WO/2014/116371A1
A first temperature distribution that represents a temperature of an element adjacent to and distinct from a first optical element that is positioned to receive an amplified light beam is accessed. The accessed first temperature distribu...  
WO/2014/111869A3
An apparatus to deliver conformal radiotherapy using external beam Cobalt 60 source is disclosed. The apparatus comprises an enclosed circular gantry placed above the bearings along with an integrated in house X-ray unit with the X-ray d...  

Matches 351 - 400 out of 12,833