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Matches 1 - 50 out of 12,708

Document Document Title
WO/2018/127565A2
A radiation source including a chamber including a plasma formation region, a radiation collector arranged in the chamber, the radiation collector configured to collect radiation emitted at the plasma formation region and to direct the c...  
WO/2018/128740A1
A system for an extreme ultraviolet (EUV) light source includes a light-generation system configured to emit one or more light beams onto a beam path; one or more optical amplifiers, each of the one or more amplifiers including a gain me...  
WO/2018/112039A1
A diagnostic system for monitoring a status of a CT system includes at least one radiation detector configured to monitor a CT component and generate signals representing measurement data associated with the CT component. The system also...  
WO/2018/108468A1
An EUV radiation source (42, 300) is used for example in a lithographic apparatus or inspection apparatus. For generating EUV radiation (302), laser radiation (304) in a second waveband is directed to a target of liquid tin fuel (69) to ...  
WO/2018/104497A1
The invention relates to a system (1) for detecting image parameters during the exposure of films (2), especially radiographic films. The object of the invention is to provide a system which makes it possible to simply and rapidly obtain...  
WO/2018/092227A1
A carriage for replacing a target generation device comprises: A. a linear movement mechanism that holds a target generation device for outputting a target substance and moves the target generation device linearly in the output direction...  
WO/2018/093164A1
A digital light source device according to the disclosed present invention comprises: a hollow body unit which has a space therein; a source unit which emits electrons from inside the body unit; and an anode unit which generates X-rays o...  
WO/2018/091280A1
Device (12) comprising a multileaf collimator (1), said multileaf collimator comprising an array (2) of leaves (3) and slits (4), said array comprising an alternation of leaves and slits and extending in a longitudinal direction (5), sai...  
WO/2018/092174A1
This X-ray generator (100) has an X-ray tube (20), a drive circuit (40) driving the X-ray tube (20), a voltage generation circuit (30) generating the electron-acceleration voltage to be applied to the X-ray tube (20), and a control unit ...  
WO/2018/086870A1
A radiation system comprising a fuel emitter configured to provide fuel to a plasma formation region, an excitation device arranged to provide an excitation beam at the plasma formation region to convert at least a part of the fuel into ...  
WO/2018/085071A1
A method and apparatus tor control of a dose of extreme ultraviolet (EUV) radiation generated fay a laser produced plasma (LPP) EUV Sight source. Each laser pulse is modulated to be of a width that is determined to he sufficient to allow...  
WO/2018/083727A1
An extreme UV light generation device is provided with: a target supply unit that outputs a target toward a prescribed region; a laser system that outputs a first laser light irradiated on the target, a second laser light irradiated on t...  
WO/2018/078676A1
This X-ray generator comprises an X-ray tube, a drive circuit for driving the X-rays, a voltage generation circuit for generating an electron acceleration voltage to be applied to the X-ray tube, and a control unit communicating with the...  
WO/2018/079176A1
In an X-ray generating apparatus 101 in which an X-ray tube 102 is anode-grounded to a protruding portion 107c of a container 107, electrical discharge between the X-ray tube 102 and the container 107 is reduced. The container 107 includ...  
WO/2018/072834A1
The invention relates to computer implemented method for monitoring the functional state of a system (106) for the computer-tomographic examination of workpieces (104), wherein the computer-tomographic examination of a workpiece (104) co...  
WO/2018/072913A1
It is the objective of the present invention to provide a compact and cost effective light source with a small foot print that can host more than one insertion device. Exemplarily –but not limited to –a compact source for metrology a...  
WO/2018/069976A1
A target supply apparatus according to an aspect of the present invention is provided with: a nozzle through which a target is outputted; a plurality of vibrators including a first vibrator that vibrates the nozzle; a detection unit that...  
WO/2018/066135A1
This charged particle beam device has: a partition wall section for forming a depressurized or vacuum region; an ejection source, which is disposed in the depressurized or vacuum region, and which ejects charged particles to the inside o...  
WO/2018/065828A1
The present invention relates to a Portable Molecular Quantum Dot Cellular Automata (QCA) X-Ray System (1) comprising of a QCA X-ray generator, a X-ray detector and a Q- ray image analyzer, more particularly, to propose a QCA X-ray gener...  
WO/2018/061212A1
[Problem] To prevent oxidation of molten tin in a chamber device that includes a chamber, and a target generation device for supplying tin, i.e., a target material, to a predetermined region in the chamber. [Solution] Disclosed is a cham...  
WO/2018/061660A1
A transformer (105a) is provided with: an iron core (201); a primary winding wire (211) to which an AC voltage is inputted; a secondary winding wire (212) from which an AC voltage is outputted, wherein a high DC voltage is applied to the...  
WO/2018/055744A1
The laser device (200) according to an aspect of the present disclosure is a laser device (200) provided with one or more amplification units (204) for amplifying laser light emitted from a laser oscillator (202), and an amplification co...  
WO/2018/057399A1
An optical source for an extreme ultraviolet (EUV) photolithography tool includes a light-generation system including a light-generation module; an optical amplifier including a gain medium associated with a gain band, the gain medium co...  
WO/2018/052799A1
A method is described for measuring a moving property of a current target as it travels along a trajectory toward a target space. The method includes: detecting a plurality of two- dimensional representations of light that are produced d...  
WO/2018/052909A1
A method is described for measuring a moving property of a target. The method includes: forming a remaining plasma that at least partially coincides with an extended target region, the remaining plasma being a plasma formed from an inter...  
WO/2018/042565A1
This droplet collection device is provided with: a collecting container which is provided to an outer wall surface side of a wall of a chamber, and which is formed so as to communicate with the inside of the chamber via an opening provid...  
WO/2018/042627A1
A target generating device according to one aspect of the invention comprises a tank for housing a target substance, a heater disposed in the tank, a nozzle communicating with the interior of the tank, a lid part having a gas introductio...  
WO/2018/042563A1
This droplet collection device is provided with: a collecting container which is provided to an outer wall surface side of a wall of a chamber, and which is formed so as to communicate with the inside of the chamber via an opening provid...  
WO/2018/034020A1
This soft X-ray source is provided with: a laser device 36 which generates a plasma containing an element included in a target 32 by irradiating the target with a laser beam 60, and causes soft X-rays 62 to radiate from the plasma; and a...  
WO/2018/029863A1
This droplet detector (8) may comprise: an irradiation unit (41) for emitting pulsed light (DPL) at a predetermined period and irradiating a plurality of pulsed light (DPL) onto a droplet (DL) moving in a detection region on a trajectory...  
WO/2018/029759A1
An extreme ultraviolet light generation method according to one aspect of the present application, wherein a droplet is outputted to a first laser irradiation region that is a different region from a plasma generation region, the droplet...  
WO/2018/030122A1
An extreme ultraviolet light generation method according to one aspect of the present application, wherein a droplet is outputted to a first laser irradiation region that is a different region from a plasma generation region, the droplet...  
WO/2018/025560A1
Provided are a high-voltage generating device with which it is possible to improve the reliability of insulation in a DC generation circuit, and an x-ray high-voltage generator in which the high-voltage generating device is used. For thi...  
WO/2018/020257A1
In examples, it is disclosed an inspection system comprising: a secondary source of radiation configured to generate secondary electromagnetic radiation for inspection of a load in response to being irradiated by primary electromagnetic ...  
WO/2018/019494A1
A debris mitigation system for use in a radiation source. The debris mitigation system comprises a contamination trap. The contamination trap comprises a debris receiving surface arranged to receive liquid metal fuel debris emitted from ...  
WO/2018/016034A1
An extreme UV light generation device may comprise: a chamber which has a plasma generation region inside and in which a target substance is supplied to the plasma generation region from outside; a discharge port provided to the chamber;...  
WO/2018/016310A1
In this invention, the influence of noise caused by an X-ray high voltage device is reduced to increase the speed and reliability of communications between each of the units in an X-ray imaging device without increasing the size and the ...  
WO/2018/013763A1
Systems and methods are used to increase the penetration and reduce the exclusion zone of radiographic systems. An X-ray detection method irradiates an object with X-ray fanlets including vertically moving fan beams, each fanlet having a...  
WO/2018/011953A1
This optical element angle adjustment device is provided with: a first hinge, i.e., an elastic hinge that connects a first plate and a second plate to each other; an optical element holding section attached to the first plate and/or the ...  
WO/2018/002977A1
An X-ray generation device (1) is provided with: an X-ray tube (10) having a housing (13), a target (11) that is an anode disposed inside the housing (13), and a filament (12) that is a cathode disposed inside the housing (13), the X-ray...  
WO/2017/221478A1
An emitter (3) and a target (7) are arranged oppositely in a vacuum chamber (1), and a guard electrode (5) is provided on the outer peripheral side of the electron generating unit (31) of the emitter (3). An emitter support unit (4), whi...  
WO/2017/221479A1
An emitter (3) and a target (7) are arranged oppositely in a vacuum chamber (1), and a guard electrode (5) is provided on the outer peripheral side of the electron generating unit (31) of the emitter (3). An emitter support unit (4), whi...  
WO/2017/221159A1
Apparatus and methods are described including an endoluminal device (26) configured to move along a portion of a lumen of a subject's body, an extraluminal imaging device (20), and at least one computer processor (28). While the endolumi...  
WO/2017/217051A1
In this invention, an emitter (3) and a target (7) are disposed face-to-face in a vacuum chamber (1), and a guard electrode (5) is provided on the outer peripheral side of an electron-generating portion (31) of the emitter (3). The guard...  
WO/2017/216847A1
A chamber device according to one aspect of the present invention is provided with a chamber (18) in the interior of which plasma is generated, a light source (52), and an incidence window (61) through which light generated by the light ...  
WO/2017/217228A1
Disclosed is an X-ray generator allowing a high-brightness X-ray to be obtained through a simple configuration. This X-ray generator (100) comprises: a chamber (11); a disc-shaped rotating body (21) disposed inside the chamber (11); a st...  
WO/2017/212683A1
[Problem] To attempt to provide a laser-driving light source device provided with a laser source, and a plasma container on which laser light from the laser source is condensed and made to be incident to generate plasma, wherein excitati...  
WO/2017/208340A1
An extreme ultraviolet light generation device is provided with a laser device (20) that emits pulsed laser light, a target detection device that detects a target substance supplied in a chamber as an irradiation target of the laser ligh...  
WO/2017/207383A1
The present invention relates to an apparatus for generating X-rays. It is described to produce (210) with a power supply (30) a voltage. A cathode (22) of an X-ray source (20) is positioned (220) relative to an anode (24) of the X-ray s...  
WO/2017/203988A1
Disclosed is a high-temperature plasma starting material supply device (tin filling mechanism) which uses a relatively simple configuration to supply a high-temperature plasma starting material in which impurities have been suppressed, a...  

Matches 1 - 50 out of 12,708