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Matches 1 - 50 out of 12,835

Document Document Title
WO/2018/225307A1
An X-ray generation device is provided with: an X-ray tube including an electron gun which generates an electron beam and a target which generates an X-ray due to the entry of the electron beam; a power supply unit including a booster un...  
WO/2018/224369A1
The present invention relates to an apparatus (10) for generating X-rays. It is described to produce (210) with at least one power supply (40) a voltage between a cathode (20) and an anode (30). The cathode is positioned relative to the ...  
WO/2018/220761A1
An extreme UV light generation system may comprise: a first area that includes a light path adjustment unit that adjusts the light path of laser light emitted from an oscillator; a second area that includes a chamber having a plasma gene...  
WO/2018/219578A1
A radiation source comprising a fuel emitter configured to provide droplets of fuel to a plasma formation region; and a laser system configured to supply a laser beam; wherein the laser system comprises a delay line configured to delay a...  
WO/2018/213867A1
A device and method for creating controlled radio frequency (RF) modulated X-ray radiation is described. The device includes an anode housed within a vacuum enclosure which acts to accelerate and convert an electron beam into X-ray radia...  
WO/2018/216266A1
An X-ray control circuit adjusts the frequency of alternating-current power converted by an inverter in such a way that a tube voltage value detected by a tube voltage detector matches a preset target tube voltage value. With a storage b...  
WO/2018/211551A1
This target measuring device is provided with: a photographing unit (80) that photographs an image of a target outputted from a target supply unit; a moving unit (82) that moves at least a part of the photographing unit; and a control un...  
WO/2018/211569A1
An extreme ultraviolet light generation device comprises: a chamber (2) that includes therein a plasma generation region (22) for forming a plasma from the droplets of a target substance; an EUV-light collector mirror (23) that has a ref...  
WO/2018/213794A1
According to some aspects, a carrier configured for use with a broadband x-ray source comprising an electron source and a primary target arranged to receive electrons from the electron source to produce broadband x-ray radiation in respo...  
WO/2018/208388A1
Disclosed is an EUV system in which a source control loop is established to maintain and optimize debris flux while not unduly affecting optimum EUV generation conditions. One or more temperature sensors, e.g., thermocouples may be insta...  
WO/2018/207413A1
The current value of a target current (A) detected by a target current detection unit (22), and the current value of an emission current (B) detected by an emission current detection unit (23) are compared with each other by a second com...  
WO/2018/203369A1
An extreme ultraviolet light generation apparatus according to one aspect of the present invention is provided with: a chamber in which extreme ultraviolet light is generated when tin is irradiated with a laser beam; a hydrogen gas suppl...  
WO/2018/203370A1
A target supply device according to one aspect of the present disclosure comprising a vibration element that applies vibration to a target substance outputted from a nozzle 80 so that droplets are formed, a droplet detection unit that de...  
WO/2018/195089A1
A control mechanism for a high-voltage generator for supplying voltage and current to an electronic radiation source in high-temperature environments is provided, the control mechanism including at least one voltage feedback loop for mon...  
WO/2018/184554A1
Provided are an x-ray tube device and a spring pin (404) for use in an x-ray tube device. The x-ray tube device comprises: an outer tubular assembly (10) having an anode end (120) and a cathode end (130); an anode end cover assembly (20)...  
WO/2018/179417A1
This extreme ultraviolet light generation device is provided with: a chamber; an EUV light collecting mirror positioned inside of the chamber; and a hydrogen gas discharge section positioned inside of the chamber, said hydrogen gas disch...  
WO/2018/179068A1
An EUV light generation device 1 comprises: a plurality of EUV light sensors that measures, from mutually differing directions, the energy of EUV light generated by irradiating laser light on a target 27 supplied in a prescribed region i...  
WO/2018/177768A1
The invention describes a method and a device for creating a phase modulated ultrashort laser pulse (12), comprising the following steps: - an initial ultrashort laser pulse (1) is split into a first laser pulse (3) and a second laser pu...  
WO/2018/172012A1
A lithographic system (100) comprises an EUV radiation source for generating EUV radiation; and a lithographic scanning apparatus that uses the EUV radiation for illuminating a pattern to image the pattern onto a substrate; and control s...  
WO/2018/175023A1
A system for an EUV light source includes a metrology light source configured to emit a metrology light beam; and an optical beam combiner positioned to receive the metrology light beam and at least one other light beam and to direct the...  
WO/2018/163380A1
This droplet discharge device may be provided with: a droplet discharge unit that discharges at intervals, through an opening of a nozzle connected to a tank, a droplet of a target material stored in the tank; a speed sensor that measure...  
WO/2018/162437A1
The invention relates to a cooling device for x-ray tubes in x-ray generators, comprising a housing with a central receiving device for receiving an x-ray tube with an inlet opening for supplying a gaseous coolant, an outlet opening for ...  
WO/2018/157182A1
The invention relates to a scanning object carrier (1), which is provided for installation on a scanner rocker (2) of a scanning device (3) for scanning at least one, in particular dental, object (20), wherein the scanning object carrier...  
WO/2018/158053A1
A radiation source arrangement causes interaction between pump radiation (340) and a gaseous medium (406) to generate EUV or soft x-ray radiation by higher harmonic generation (HHG). The operating condition of the radiation source arrang...  
WO/2018/160730A1
A new and improved anatomical imaging system which includes a new and improved movement system, wherein the movement system comprises an omnidirectional powered drive unit and wherein themovement system can substantially eliminate latera...  
WO/2018/150530A1
This extreme ultraviolet light generating device is provided with: (A) a chamber; (B) an optical unit; (C) a chamber reference member that is provided with a housing chamber for housing the optical unit; (D) a height positioning mechanis...  
WO/2018/138918A1
The extreme UV light generation device according to one aspect of the present disclosure comprises a chamber; a target supply unit which supplies droplets of a target substance into a plasma generation region inside the chamber; a first ...  
WO/2018/136683A1
An ignition facilitated electrodeless sealed high intensity illumination device is configured to receive a laser beam from a continuous wave (CW) laser light source. A sealed chamber is configured to contain an ionizable medium. The cham...  
WO/2018/134347A1
An X-ray source arrangement (10) for generating X-ray radiation (102), a method for operating the X-ray source arrangement (10), and an X-ray imaging apparatus (100) are provided. The X-ray source arrangement (10) comprises an X-ray tube...  
WO/2018/134861A1
A Thomson scattering measurement system according to the present disclosure includes: a transfer optical system that is provided on the optical path of a group of slit light beams extracted through a slit array, and transfers the group o...  
WO/2018/131146A1
This extreme ultraviolet light generation system is provided with: a target supply unit; a prepulse laser that outputs prepulse laser light; a main pulse laser that outputs main pulse laser light; a light collecting optical system that c...  
WO/2018/132284A1
A system can have an x-ray source that generates a series of individual x-ray pulses for multi-energy imaging. A first x-ray pulse can have a first energy level and a subsequent second x-ray pulse in the series can have a second energy l...  
WO/2018/131123A1
Provided is an extreme ultraviolet light generation system comprising: a target supplying unit that outputs a target toward a prescribed region; a drive laser that outputs drive laser light during a period in which a burst signal input f...  
WO/2018/127565A2
A radiation source including a chamber including a plasma formation region, a radiation collector arranged in the chamber, the radiation collector configured to collect radiation emitted at the plasma formation region and to direct the c...  
WO/2018/127565A3
A radiation source including a chamber including a plasma formation region, a radiation collector arranged in the chamber, the radiation collector configured to collect radiation emitted at the plasma formation region and to direct the c...  
WO/2018/128740A1
A system for an extreme ultraviolet (EUV) light source includes a light-generation system configured to emit one or more light beams onto a beam path; one or more optical amplifiers, each of the one or more amplifiers including a gain me...  
WO/2018/112039A1
A diagnostic system for monitoring a status of a CT system includes at least one radiation detector configured to monitor a CT component and generate signals representing measurement data associated with the CT component. The system also...  
WO/2018/108468A1
An EUV radiation source (42, 300) is used for example in a lithographic apparatus or inspection apparatus. For generating EUV radiation (302), laser radiation (304) in a second waveband is directed to a target of liquid tin fuel (69) to ...  
WO/2018/104497A1
The invention relates to a system (1) for detecting image parameters during the exposure of films (2), especially radiographic films. The object of the invention is to provide a system which makes it possible to simply and rapidly obtain...  
WO/2018/092227A1
A carriage for replacing a target generation device comprises: A. a linear movement mechanism that holds a target generation device for outputting a target substance and moves the target generation device linearly in the output direction...  
WO/2018/093164A1
A digital light source device according to the disclosed present invention comprises: a hollow body unit which has a space therein; a source unit which emits electrons from inside the body unit; and an anode unit which generates X-rays o...  
WO/2018/091280A1
Device (12) comprising a multileaf collimator (1), said multileaf collimator comprising an array (2) of leaves (3) and slits (4), said array comprising an alternation of leaves and slits and extending in a longitudinal direction (5), sai...  
WO/2018/092174A1
This X-ray generator (100) has an X-ray tube (20), a drive circuit (40) driving the X-ray tube (20), a voltage generation circuit (30) generating the electron-acceleration voltage to be applied to the X-ray tube (20), and a control unit ...  
WO/2018/086870A1
A radiation system comprising a fuel emitter configured to provide fuel to a plasma formation region, an excitation device arranged to provide an excitation beam at the plasma formation region to convert at least a part of the fuel into ...  
WO/2018/085071A1
A method and apparatus tor control of a dose of extreme ultraviolet (EUV) radiation generated fay a laser produced plasma (LPP) EUV Sight source. Each laser pulse is modulated to be of a width that is determined to he sufficient to allow...  
WO/2018/083727A1
An extreme UV light generation device is provided with: a target supply unit that outputs a target toward a prescribed region; a laser system that outputs a first laser light irradiated on the target, a second laser light irradiated on t...  
WO/2018/078676A1
This X-ray generator comprises an X-ray tube, a drive circuit for driving the X-rays, a voltage generation circuit for generating an electron acceleration voltage to be applied to the X-ray tube, and a control unit communicating with the...  
WO/2018/079176A1
In an X-ray generating apparatus 101 in which an X-ray tube 102 is anode-grounded to a protruding portion 107c of a container 107, electrical discharge between the X-ray tube 102 and the container 107 is reduced. The container 107 includ...  
WO/2018/072834A1
The invention relates to computer implemented method for monitoring the functional state of a system (106) for the computer-tomographic examination of workpieces (104), wherein the computer-tomographic examination of a workpiece (104) co...  
WO/2018/072913A1
It is the objective of the present invention to provide a compact and cost effective light source with a small foot print that can host more than one insertion device. Exemplarily –but not limited to –a compact source for metrology a...  

Matches 1 - 50 out of 12,835