Login| Sign Up| Help| Contact|

Patent Searching and Data


Matches 1 - 50 out of 12,647

Document Document Title
WO/2018/069976A1
A target supply apparatus according to an aspect of the present invention is provided with: a nozzle through which a target is outputted; a plurality of vibrators including a first vibrator that vibrates the nozzle; a detection unit that...  
WO/2018/066135A1
This charged particle beam device has: a partition wall section for forming a depressurized or vacuum region; an ejection source, which is disposed in the depressurized or vacuum region, and which ejects charged particles to the inside o...  
WO/2018/065828A1
The present invention relates to a Portable Molecular Quantum Dot Cellular Automata (QCA) X-Ray System (1) comprising of a QCA X-ray generator, a X-ray detector and a Q- ray image analyzer, more particularly, to propose a QCA X-ray gener...  
WO/2018/061212A1
[Problem] To prevent oxidation of molten tin in a chamber device that includes a chamber, and a target generation device for supplying tin, i.e., a target material, to a predetermined region in the chamber. [Solution] Disclosed is a cham...  
WO/2018/061660A1
A transformer (105a) is provided with: an iron core (201); a primary winding wire (211) to which an AC voltage is inputted; a secondary winding wire (212) from which an AC voltage is outputted, wherein a high DC voltage is applied to the...  
WO/2018/055744A1
The laser device (200) according to an aspect of the present disclosure is a laser device (200) provided with one or more amplification units (204) for amplifying laser light emitted from a laser oscillator (202), and an amplification co...  
WO/2018/057399A1
An optical source for an extreme ultraviolet (EUV) photolithography tool includes a light-generation system including a light-generation module; an optical amplifier including a gain medium associated with a gain band, the gain medium co...  
WO/2018/052799A1
A method is described for measuring a moving property of a current target as it travels along a trajectory toward a target space. The method includes: detecting a plurality of two- dimensional representations of light that are produced d...  
WO/2018/052909A1
A method is described for measuring a moving property of a target. The method includes: forming a remaining plasma that at least partially coincides with an extended target region, the remaining plasma being a plasma formed from an inter...  
WO/2018/042565A1
This droplet collection device is provided with: a collecting container which is provided to an outer wall surface side of a wall of a chamber, and which is formed so as to communicate with the inside of the chamber via an opening provid...  
WO/2018/042627A1
A target generating device according to one aspect of the invention comprises a tank for housing a target substance, a heater disposed in the tank, a nozzle communicating with the interior of the tank, a lid part having a gas introductio...  
WO/2018/042563A1
This droplet collection device is provided with: a collecting container which is provided to an outer wall surface side of a wall of a chamber, and which is formed so as to communicate with the inside of the chamber via an opening provid...  
WO/2018/034020A1
This soft X-ray source is provided with: a laser device 36 which generates a plasma containing an element included in a target 32 by irradiating the target with a laser beam 60, and causes soft X-rays 62 to radiate from the plasma; and a...  
WO/2018/029863A1
This droplet detector (8) may comprise: an irradiation unit (41) for emitting pulsed light (DPL) at a predetermined period and irradiating a plurality of pulsed light (DPL) onto a droplet (DL) moving in a detection region on a trajectory...  
WO/2018/029759A1
An extreme ultraviolet light generation method according to one aspect of the present application, wherein a droplet is outputted to a first laser irradiation region that is a different region from a plasma generation region, the droplet...  
WO/2018/030122A1
An extreme ultraviolet light generation method according to one aspect of the present application, wherein a droplet is outputted to a first laser irradiation region that is a different region from a plasma generation region, the droplet...  
WO/2018/025560A1
Provided are a high-voltage generating device with which it is possible to improve the reliability of insulation in a DC generation circuit, and an x-ray high-voltage generator in which the high-voltage generating device is used. For thi...  
WO/2018/020257A1
In examples, it is disclosed an inspection system comprising: a secondary source of radiation configured to generate secondary electromagnetic radiation for inspection of a load in response to being irradiated by primary electromagnetic ...  
WO/2018/019494A1
A debris mitigation system for use in a radiation source. The debris mitigation system comprises a contamination trap. The contamination trap comprises a debris receiving surface arranged to receive liquid metal fuel debris emitted from ...  
WO/2018/016034A1
An extreme UV light generation device may comprise: a chamber which has a plasma generation region inside and in which a target substance is supplied to the plasma generation region from outside; a discharge port provided to the chamber;...  
WO/2018/016310A1
In this invention, the influence of noise caused by an X-ray high voltage device is reduced to increase the speed and reliability of communications between each of the units in an X-ray imaging device without increasing the size and the ...  
WO/2018/013763A1
Systems and methods are used to increase the penetration and reduce the exclusion zone of radiographic systems. An X-ray detection method irradiates an object with X-ray fanlets including vertically moving fan beams, each fanlet having a...  
WO/2018/011953A1
This optical element angle adjustment device is provided with: a first hinge, i.e., an elastic hinge that connects a first plate and a second plate to each other; an optical element holding section attached to the first plate and/or the ...  
WO/2018/002977A1
An X-ray generation device (1) is provided with: an X-ray tube (10) having a housing (13), a target (11) that is an anode disposed inside the housing (13), and a filament (12) that is a cathode disposed inside the housing (13), the X-ray...  
WO/2017/221478A1
An emitter (3) and a target (7) are arranged oppositely in a vacuum chamber (1), and a guard electrode (5) is provided on the outer peripheral side of the electron generating unit (31) of the emitter (3). An emitter support unit (4), whi...  
WO/2017/221479A1
An emitter (3) and a target (7) are arranged oppositely in a vacuum chamber (1), and a guard electrode (5) is provided on the outer peripheral side of the electron generating unit (31) of the emitter (3). An emitter support unit (4), whi...  
WO/2017/221159A1
Apparatus and methods are described including an endoluminal device (26) configured to move along a portion of a lumen of a subject's body, an extraluminal imaging device (20), and at least one computer processor (28). While the endolumi...  
WO/2017/217051A1
In this invention, an emitter (3) and a target (7) are disposed face-to-face in a vacuum chamber (1), and a guard electrode (5) is provided on the outer peripheral side of an electron-generating portion (31) of the emitter (3). The guard...  
WO/2017/216847A1
A chamber device according to one aspect of the present invention is provided with a chamber (18) in the interior of which plasma is generated, a light source (52), and an incidence window (61) through which light generated by the light ...  
WO/2017/217228A1
Disclosed is an X-ray generator allowing a high-brightness X-ray to be obtained through a simple configuration. This X-ray generator (100) comprises: a chamber (11); a disc-shaped rotating body (21) disposed inside the chamber (11); a st...  
WO/2017/212683A1
[Problem] To attempt to provide a laser-driving light source device provided with a laser source, and a plasma container on which laser light from the laser source is condensed and made to be incident to generate plasma, wherein excitati...  
WO/2017/208340A1
An extreme ultraviolet light generation device is provided with a laser device (20) that emits pulsed laser light, a target detection device that detects a target substance supplied in a chamber as an irradiation target of the laser ligh...  
WO/2017/207383A1
The present invention relates to an apparatus for generating X-rays. It is described to produce (210) with a power supply (30) a voltage. A cathode (22) of an X-ray source (20) is positioned (220) relative to an anode (24) of the X-ray s...  
WO/2017/203988A1
Disclosed is a high-temperature plasma starting material supply device (tin filling mechanism) which uses a relatively simple configuration to supply a high-temperature plasma starting material in which impurities have been suppressed, a...  
WO/2017/205198A1
A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element configured to focus the pump illumination from the pumping source ...  
WO/2017/200507A1
MULTISENSOR DIGITAL X-RAY RECEIVER has lightproof housing composed of some located at obtuse angles sections closed by a common plano-concave roentgenoparent front wall, and mounted serially under respective planar parts of said wall sec...  
WO/2017/191084A1
An method for generating illuminating radiation in an illumination apparatus for use in an inspection apparatus for use in lithographic processes is described. A driving radiation beam (702) is provided that comprises a plurality of radi...  
WO/2017/187571A1
According to one aspect of the present disclosure, an extreme ultraviolet light sensor unit (160) is provided with: a mirror (121) that reflects extreme ultraviolet light; a filter (122) that passes extreme ultraviolet light reflected by...  
WO/2017/187630A1
A tank (40) may be provided with: a tank body (41) having a space (41S) in the interior thereof and having an opening (41A) communicating with the space (41S); a lid body (42) for covering the opening (41A) of the tank body (41) and the ...  
WO/2017/189193A1
A first target is provided to as interior of a vacuum chamber, a first light beam is directed toward the first target to form a first plasma from target material of the first target, the first plasma being associated 'with, a directional...  
WO/2017/162613A1
The present invention relates to an apparatus for generating X-rays. It is described to produce (210) with a power supply (40) at least two voltages between at least one cathode (20) and an anode (30), wherein the at least two voltages c...  
WO/2017/164251A1
This extreme ultraviolet light generator comprises: a plurality of extreme ultraviolet (EUV) light sensors for measuring EUV light energy from different directions to each other, said EUV light having been generated by irradiating, with ...  
WO/2017/163345A1
This extreme ultraviolet light generation apparatus is provided with: a plurality of EUV light sensors that measures, from different directions, the energy of an extreme ultraviolet light generated by irradiating a target supplied to a p...  
WO/2017/163315A1
[Problem] The purpose of the invention is, with respect to a droplet timing sensor for detecting the timing of droplet passage by receiving a light that has been irradiated from a light source unit onto a droplet in an EUV light generati...  
WO/2017/161376A1
Technology is described for a magnetic lift device for an x-ray tube. In one example, an anode assembly includes an anode, a bearing assembly, a ferromagnetic shaft, and a lift electromagnet. The anode is configured to receive electrons ...  
WO/2017/154111A1
Disclosed is an extreme ultraviolet light generation device that moves, on the basis of a command given from an external device, the generation position of extreme ultraviolet light. The extreme ultraviolet light generation device is pro...  
WO/2017/156033A1
A high energy radiation device may include a band and/or contact rod with surface properties to enhance field emissions or otherwise assist in control of x-ray generation. The high energy radiation device comprises a housing for maintain...  
WO/2017/154528A1
Provided is an extreme ultraviolet light generating apparatus 1 that moves the position at which extreme ultraviolet light is generated on the basis of a command from an exposure device 9 that is an external device, the extreme ultraviol...  
WO/2017/154179A1
[Problem] To allow a simple connection between an optical unit and an optical path pipe. [Solution] The structure connecting the optical path pipe to the side surface (1a) of the optical unit comprises: an extending-contracting pipe (72)...  
WO/2017/143974A1
A method for correcting filament current data of an X-ray tube, comprising acquiring a first to-be-corrected tube current value and a to-be-corrected filament current value corresponding to a first correction point; executing a pay-off o...  

Matches 1 - 50 out of 12,647