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7473029 |
In a thermoanalytical sensor with a substrate and a thermocouple arrangement that is formed at a measurement position on the substrate, an increase in sensitivity can be achieved by way of a special geometry of the thermocouple arrangeme...
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7342169 |
A thermoelectric structure and device including at least first and second material systems having different lattice constants and interposed in contact with each other, and a physical interface at which the at least first and second mate...
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7205472 |
Method for manufacturing thermoelectric converters, consisting in weaving electroconducting threads ( 12, 14 ) of two different natures, parallel and arranged alternately, with threads ( 10 ) made of an electrically insulating material i...
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6994468 |
The invention relates to a heat flux comparator comprising two substantially planar and mutually parallel input faces, capable of receiving each a heat flux, and comprising a thermoelectric circuit including at least a strip of a first m...
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6987223 |
A thermopile structure containing improved heat sinks for thermocouples in the detectors is described. The heat sinks are provided without additional processing. The heat sinks are added by using “dummy traces” to the polysilicon mas...
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6958443 |
Disclosed is a foil segment for a thermoelectric generator comprising a top plate disposed in spaced relation above a bottom plate. An array of the foil segments is perpendicularly disposed in side-by-side arrangement between and in ther...
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6935776 |
A sample holder for differential thermal analysis has a substrate with a planar surface provided with a sample position for a sample material and a reference position for reference material. The substrate allows heat flow between a heat ...
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6932504 |
A self-detecting type cantilever for an atomic force microscope (AFM) has an electro-flexural conversion element for converting a flexural amount of the cantilever into an electric current or voltage, a temperature measurement element di...
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6894215 |
A thermoelectric module with a simple structure with less breakage by thermal stress is provided. For this purpose, the thermoelectric module includes p-type and n-type thermoelectric elements ( 13, 14 ) which are alternately placed, and...
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6872879 |
A thermoelectric generator comprising a plurality of semi-conductor elements of type n an type p alternatingly disposed and connected at the ends thereof to form a plurality of thermocouples on two opposite faces of the generator, said e...
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6870086 |
In a thermo pile infrared ray sensor, an opening portion is formed by etching a substrate from a second surface after an n-type poly-Si layer and a thin aluminium layer are formed so that first and second connection portions are formed b...
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6821015 |
A sensor designed for measurement of conducted heat flux passing through a solid object consists of a thin film thermopile deposited on a planar substrate whose thermal properties match those of the solid object. The thermopile is protec...
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6740806 |
A combined thermocouple and thermopile capable of producing multiple EMF signals. The combined thermocouple and thermopile construction is particularly adapted for use as an electric generator capable of producing multiple EMF signals an...
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6737331 |
A nanoscale force sensing device includes a probe having a tip with multiple isolated channels which can receive different materials. The device may be either straight or cantilevered and may be mounted to permit detection of surface for...
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6713833 |
A thermopile on an electrically insulating substrate. A pattern is arranged on this substrate of parts which consist of a first conductive material, to which a second conductive material is applied, and parts which consist only of the fi...
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6713669 |
A thermoelectric conversion component includes a substrate having a cavity. An insulating film is formed on the upper surface of the substrate. A small heat-capacity region is formed in the center of the insulating film, and a large heat...
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6703554 |
An infrared detecting device possible to improve SN ratio, which is provided with a semiconductor substrate, a diaphragm set on the semiconductor substrate, a thermopile formed on the diaphragm by arranging a plurality of thermocouples c...
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6672076 |
An improved efficiency thermoelectric system is disclosed wherein convection is actively facilitated through a thermoelectric array. Thermoelectrics are commonly used for cooling and heating applications. Thermal power is convected throu...
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6655834 |
A sensor, in particular thermal sensor, having a silicon element and a largely self-supporting membrane layer equipped with at least one sensor element, is proposed. The membrane layer is furthermore spaced away from the silicon element ...
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6610918 |
A nondestructive inspection device (or method) is basically configured such that a laser beam (1300 nm) is irradiated on a surface (or back) of a semiconductor device chip to scan. Due to irradiation of the laser beam, a defect position ...
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6511860 |
Method for manufacturing a thermopile on an electrically insulating substrate. A pattern is arranged on this substrate of parts which consist of a first conductive material, to which a second conductive material is applied, and parts whi...
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6342667 |
A method for forming thermal isolation for a micro thermopile device comprises steps of forming a narrow etching window on the membrane and forming a plurality of micro connection structures each crossing the narrow etching window and co...
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6339187 |
A SiO 2 layer is formed on a heat sink section having a cavity by thermal oxidation and an aluminum oxide layer is formed on the SiO 2 layer by an electron beam evaporation process at a substrate temperature of 60° C. or less and at a...
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6335478 |
A thermopile infrared sensor includes a substrate, at least one thermocouple cantilever beam comprising at least one thermocouple, and a suspending membrane. The cantilever beam is formed above the substrate. The cantilever beam has a fi...
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6305840 |
Thermopile detector and method for fabricating the same, the method including the steps of (1) forming a diaphragm film on a substrate, (2) forming thermocouples in a given region on the diaphragm film, (3) forming a protection film on t...
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6278051 |
A thin sensor for heat flux and temperature, designed for adhesive attachment to a surface, is manufactured on a flexible insulated metallic substrate. The sensor exhibits a combination of high sensitivity for heat flux and low resistanc...
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6084174 |
A thermocouple array includes a dielectric layer having via openings therethrough, a first patterned conductive layer facing one surface of the dielectric layer, and a second patterned conductive layer facing another surface of the diele...
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6072165 |
A thin film thermocouple having junctions (2, 7) of metal and semiconducting metal oxides such as tin oxide/silver, and used as surface temperature sensors in conjunction with thin film heating elements (1) to control temperature.
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6040579 |
Thermoelectric sensor (12) formed by a membrane (14) including a plurality of thermoelectric elements (20) formed of a plurality of thermoelectric couples and forming a plurality of elementary cells. Each elementary cell is thermally ins...
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6029620 |
An engine block containing thermoelectric materials that generates a direct current during operation and, in so doing, provides for at least some of the necessary engine cooling requirements and for at least some of the electric power re...
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5990412 |
A thin sensor for heat flux and temperature, designed for adhesive attachment to a surface, is manufactured on a flexible insulated metallic substrate, using conductive and dielectric inks. The sensor exhibits a combination of high sensi...
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5982014 |
A microfabricated thermopile optimized as a differential temperature sensor provides differential temperature sensing between opposite edges of the device. A plurality of the thermopile sensors are stacked to increase the number of coupl...
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5975757 |
An apparatus and method for providing a topographical and thermal image of a semiconductor device. A probe (10) is made from a first ribbon of material (11) and a second ribbon of material (12) which forms a thermocouple junction (13). A...
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5956569 |
The present invention provides a structure and a method of fabricating a thermoelectric Cooler directly on the backside of a semiconductor substrate. The thermoelectric (TE) cooler (thermoelectric cooler) disperses heat from an integrate...
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5952728 |
A thermoelectric conversion module having a large capacity and a curved surface which can be secured to a corresponding curved surface of a base member is manufactured by inserting N type and P type semiconductor strips into through hole...
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5922988 |
A thermoelectric material which exhibits an excellent thermoelectric performance even when it is used at elevated temperatures is shown and described. A thermoelectric material is provided having conductive layers made of a first semicon...
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5909004 |
A thermocouple array includes a dielectric layer having via openings therethrough, a first patterned conductive layer facing one surface of the dielectric layer, and a second patterned conductive layer facing another surface of the diele...
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5886292 |
A thermoelectric material having excellent thermoelectric performance is shown and described. A thermoelectric material is formed having a plurality of conductive layers and a plurality of barrier layers that are alternatingly formed one...
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5864087 |
A thermoelectric device is provided which is good in terms of responsibility to heat, by which a relatively large electric power can be produced, which is good in terms of durability, and which can be manufactured at reduced cost. The th...
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5841064 |
A Peltier effect module comprising a plurality of Peltier effect elements arranged in parallel between a pair of substrates where the Peltier effect elements are connected to connection electrodes disposed on the substrates. The array of...
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5837929 |
A method of making a microelectronic thermoelectric device comprises the steps of providing a substrate of a predetermined material, creating thermally isolated, alternating P-type and N-type semiconductor materials on the substrate, ele...
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5837928 |
A thermoelectric radiator for generating a direct current while providing at least a portion of the necessary cooling is formed with a first and second plurality of interdigitated thermoelectric lamella which are electrically joined and ...
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5824947 |
A thermoelectric device fabricated of at least two dissimilar thermoelements and at least one of the thermoelements has a conductor in parallel therewith increasing the Figure of Merit. The thermoelements are also surrounded by a conduct...
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5783805 |
Electrothermal conversion elements, apparatus and methods for use in comparing, calibrating and measuring electrical signals utilizing a thin film heater on a thin, low mass, low thermal conductivity substrate and low mass thermoresistiv...
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5772325 |
A probe (10) is formed to provide a topographical and thermal image of a semiconductor device. The probe (10) is made from a first ribbon of material (11) and a second ribbon of material (12) which forms a thermocouple junction (13). A p...
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5747418 |
An apparatus and method for producing electricity from heat. The present invention is a thermoelectric generator that uses materials with substantially no electrical resistance, often called superconductors, to efficiently convert heat i...
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5734122 |
Apparatus is disclosed in which a pair of elongated solid cylindrical metal conductors mounted with their central axes mutually parallel are connected at their ends to form a closed electrical circuit path, there being heat sinks at spac...
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5726380 |
A thermo-electric power generating element has the structure that two kinds of metal sheets, or foils, which form a thermocouple combination are laminated together and alternately connected at one end and the other end so as to form a pl...
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5712886 |
The detection device includes at least one thermocouple (10) arranged aligned with the bottom head of the vessel of the nuclear reactor, having a first branch (9) made of a first metallic material and at least one second branch (11) made...
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5712448 |
A cooling device for lowering the temperature of a heat-dissipating device. The cooling device includes a heat-conducting substrate (composed, e.g., of diamond or another high thermal conductivity material) disposed in thermal contact wi...
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