Title:
【発明の名称】ミクロ加工フィルターを有するマイクロポンプ
Document Type and Number:
Japanese Patent JP2000505853
Kind Code:
A
Abstract:
PCT No. PCT/EP97/00624 Sec. 371 Date Jul. 29, 1998 Sec. 102(e) Date Jul. 29, 1998 PCT Filed Feb. 10, 1997 PCT Pub. No. WO97/29283 PCT Pub. Date Aug. 14, 1997The micropump (11) has at least two first plate-forming means (10, 12) together defining a pump chamber (9), and the filter comprises liquid feed means, liquid collection means, second plate-forming means (10), and silicon plate-forming means (12; 15), said second plate-forming means (10) and said silicon plate-forming means (12; 15) facing each other and forming between them a cavity (13) for receiving a liquid, the cavity being partially closed by at least one transverse partition (20; 20') whose height is less than the depth of the cavity (13) and which separates it into an upstream portion and a downstream portion. Said silicon plate-forming means (12; 15) are fixed at least partially in leakproof manner to said second plate-forming means (10), the downstream portion of the cavity (13) communicates with said pump chamber (9), and the assembly comprising all of the plate-forming means (10, 12) constitutes a sandwich structure.
Inventors:
Van Lintel, Harald
Rungi, It, Shan
Rungi, It, Shan
Application Number:
JP52817597A
Publication Date:
May 16, 2000
Filing Date:
February 10, 1997
Export Citation:
Assignee:
Weston Bridge International Limited
International Classes:
B01D35/26; F04B19/00; F04B43/04; (IPC1-7): F04B43/04; B01D35/26
Attorney, Agent or Firm:
Takashi Ishida (4 others)