Title:
【発明の名称】電子ビームの照射によるガス処理方法及び装置
Document Type and Number:
Japanese Patent JP2000515808
Kind Code:
A
Inventors:
Masahiro Izutsu
Yoshihisa Iizuka
Kazuaki Hayashi
Yoshihisa Iizuka
Kazuaki Hayashi
Application Number:
JP50868598A
Publication Date:
November 28, 2000
Filing Date:
July 24, 1997
Export Citation:
Assignee:
EBARA CORPORATION
International Classes:
B01D53/60; B01D53/32; B01D53/74; B01J19/08; (IPC1-7): B01D53/32; B01D53/60; B01D53/74; B01J19/08
Attorney, Agent or Firm:
Isamu Watanabe (2 outside)