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Document Type and Number:
Japanese Patent JP2001356480
Kind Code:
A5
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Application Number:
JP2000176604
Publication Date:
June 07, 2007
Export Citation:
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International Classes:
G03F7/039; C08F8/00; C08F214/18; C08F218/04; C08K5/00; C08L27/12; C08L31/02; C08L45/00; H01L21/027



 
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