Title:
【発明の名称】ヘテロダイン干渉計のエラー補正方法および装置
Document Type and Number:
Japanese Patent JP2001500616
Kind Code:
A
Abstract:
PCT No. PCT/DE97/01223 Sec. 371 Date Mar. 17, 1999 Sec. 102(e) Date Mar. 17, 1999 PCT Filed Jun. 17, 1997 PCT Pub. No. WO98/12499 PCT Pub. Date Mar. 26, 1998A method and device for enabling determination of periodic errors of a heterodyne interferometer. According to the method, repeated calibration measurement occurs for a constant calibration distance divided up into two distance segments. One of the distance segments is measured with the interferometer and the other is measured by an additional measuring system and does not present a periodical error with regard to the distance measured. Before each calibration measurement the distance segment measured by the interferometer is modified slightly. The second distance segment is modified accordingly in the opposite direction. The sum of the distance segment modifications must correspond to at least one optical wave length of the interferometer around the measuring wave length. Using the various calibration measurement results for the constant calibration distance, the periodic error components are separated and a wavelength dependent error curve is determined in order to correct all interferometer measurements.
Inventors:
Lynn, Kraos
Application Number:
JP51412698A
Publication Date:
January 16, 2001
Filing Date:
June 17, 1997
Export Citation:
Assignee:
Leica Microsystems Wetzlar GM Behr
International Classes:
G01B9/02; (IPC1-7): G01B9/02
Attorney, Agent or Firm:
Asato Kato