Title:
【発明の名称】非蒸発性ゲッターによるポンプ装置およびこのゲッターの使用法
Document Type and Number:
Japanese Patent JP2001503830
Kind Code:
A
Abstract:
The invention discloses a pumping device by non-vaporizable getter to create a very high vacuum in a chamber defined by a metal wall capable of releasing gas at its surface, characterized in that it comprises a thin layer of non-vaporizable getter coated on at least almost the whole metal wall surface defining the chamber.
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Inventors:
Benvenuti, Cristoforo
Application Number:
JP50227698A
Publication Date:
March 21, 2001
Filing Date:
June 18, 1997
Export Citation:
Assignee:
Organisation Europaine Pool La Russelle Cheux New Clair
International Classes:
H05H7/00; F04B37/02; H01J7/18; H01J9/18; H01J41/12; H05H13/04; (IPC1-7): F04B37/02; H05H7/00; H05H13/04
Domestic Patent References:
| JPH03147298A | 1991-06-24 | |||
| JPH05306681A | 1993-11-19 | |||
| JPH07233785A | 1995-09-05 | |||
| JPH0514571U | 1993-02-26 | |||
| JPH07508812A | 1995-09-28 | |||
| JPH045480A | 1992-01-09 | |||
| JPH0560065A | 1993-03-09 | |||
| JPH05280499A | 1993-10-26 | |||
| JPH03239869A | 1991-10-25 |
Attorney, Agent or Firm:
Nobuyuki Kaneda (2 others)