Title:
【発明の名称】ガスを送出する装置及び方法
Document Type and Number:
Japanese Patent JP2001509645
Kind Code:
A
Abstract:
A gas delivery method and apparatus for directing a purge gas to the edge of a substrate at an angle to a linear divergence from the center of the substrate. The apparatus directs a purge gas from a supply source over a deflection surface, having one or more grooves angled relative to a linear divergence from the center of the substrate, to the edge of the substrate. Preferably, the gas is delivered to the edge of the substrate at an angle between about 10 and 90 degrees to a linear divergence from the center of the substrate.
Inventors:
Yudovsky, Joseph
Tsai, Kenneth
Steve Ganajeem
Shastinsky, Semyon
Tsai, Kenneth
Steve Ganajeem
Shastinsky, Semyon
Application Number:
JP2000502523A
Publication Date:
July 24, 2001
Filing Date:
July 10, 1998
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C23C14/34; C23C16/448; H01L21/205; H01L21/3065; H01L21/302; H01L21/687; (IPC1-7): H01L21/205; C23C14/34; C23C16/448; H01L21/3065
Attorney, Agent or Firm:
Yoshiki Hasegawa (2 outside)