Title:
【発明の名称】プラズマ堆積フィルムネットワーク
Document Type and Number:
Japanese Patent JP2001511192
Kind Code:
A
Abstract:
A method of producing radio frequency discharge plasma film layers having a three-dimensional functional film network. The plasma film layers include a first layer, comprising a plurality of a first functional group, and a second layer, comprising a plurality of a second functional group. The employment of three-dimensional film networks with desired functional groups located either on the periphery or both the periphery and interstitial spaces of the networks provides means for significantly increasing the surface functional density.
Inventors:
Coruri, omplakash, es.
Jonathan, Robert, Gee.
Jonathan, Robert, Gee.
Application Number:
JP52298797A
Publication Date:
August 07, 2001
Filing Date:
December 18, 1996
Export Citation:
Assignee:
Tarison Research
International Classes:
H05H1/02; B05D1/36; B05D7/00; B05D7/24; C08F2/46; C08F2/48; C08F8/00; C08G83/00; C23C14/28; H05B6/00; H05B6/46; H05H1/24; (IPC1-7): C08F2/48; C08G83/00; C23C14/28; C23C16/50; H05B6/00; H05H1/02; H05H1/24
Attorney, Agent or Firm:
Fukuda Hideyuki
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