Title:
【発明の名称】光学的に使用可能なフッ化物薄膜の製造方法およびそのようにして製造された薄膜
Document Type and Number:
Japanese Patent JP2001515542
Kind Code:
A
Inventors:
Kennel, Etienne
Rovic, Jean-Eve
Laurent, Bernard
Rovic, Jean-Eve
Laurent, Bernard
Application Number:
JP53576299A
Publication Date:
September 18, 2001
Filing Date:
December 30, 1998
Export Citation:
Assignee:
Komitsaria Talenergy Atomique
International Classes:
G02B5/08; C23C14/00; C23C14/06; C23C14/12; G02B1/11; (IPC1-7): C23C14/06; C23C14/12; G02B1/11; G02B5/08
Attorney, Agent or Firm:
Masatake Shiga (1 person outside)