Title:
【発明の名称】マイクロメカニカルセンサを使用する電磁放射および放射線検出器
Document Type and Number:
Japanese Patent JP2001516441
Kind Code:
A
Abstract:
Electromagnetic and nuclear radiation is detected by micromechanical sensors that can be coated with various interactive materials. As the micromechanical sensors absorb radiation, the sensors bend and/or undergo a shift in resonance characteristics. The bending and resonance changes are detected with high sensitivity by any of several detection methods including optical, capacitive, and piezoresistive methods. Wide bands of the electromagnetic spectrum can be imaged with picoJoule sensitivity, and specific absorptive coatings can be used for selective sensitivity in specific wavelength bands. Microcantilevers coated with optical cross-linking polymers are useful as integrating optical radiation dosimeters. Nuclear radiation dosimetry is possible by fabricating cantilevers from materials that are sensitive to various nuclear particles or radiation. Upon exposure to radiation, the cantilever bends due to stress and its resonance frequency shifts due to changes in elastic properties, based on cantilever shape and properties of the coating.
Inventors:
Tandat, Thomas, Gee.
Warmack, Robert, Jay.
Wokter, Eric, A.
Warmack, Robert, Jay.
Wokter, Eric, A.
Application Number:
JP52618497A
Publication Date:
September 25, 2001
Filing Date:
January 17, 1997
Export Citation:
Assignee:
Lockheed Martin Energy Systems, Inc.
International Classes:
G01J1/00; G01J1/04; G01J5/00; G01J5/10; G01J5/40; G01J5/44; G01T1/02; B81B3/00; (IPC1-7): G01T1/02; G01J1/00
Attorney, Agent or Firm:
Yasunori Otsuka (1 person outside)