Title:
【発明の名称】箔マノメータ
Document Type and Number:
Japanese Patent JP2001517313
Kind Code:
A
Abstract:
A pressure gauge device that is operated as a thermal conduction manometer contains a measuring resistor (131) that is arranged in layer form on a self-supporting carrier foil and is in defined thermal contact with a gas whose pressure is to be measured. The thermal contact with the gas is through the carrier foil (11), a thermal conducting layer (123) and optionally through an extra absorber layer (124). The resistance, dependent on gas pressure, of the measuring resistor (131) is detected by a bridge circuit in which each measuring resistor (131) is assigned a reference resistor (136) whose resistance itself is dependent on or independent of pressure.
Inventors:
Mast, Curl-Friedrich
Shram, Gerold
Munch, Martin
Shram, Gerold
Munch, Martin
Application Number:
JP54323198A
Publication Date:
October 02, 2001
Filing Date:
March 19, 1998
Export Citation:
Assignee:
Maxx-Plank-Gezelle Shaft Tool Fürdellung Der Weizsen Schaften Ahuau
International Classes:
G01L11/00; G01L21/12; G01L21/10; (IPC1-7): G01L11/00; G01L21/10
Attorney, Agent or Firm:
Takehiko Suzue (4 outside)