Title:
【発明の名称】適合可能なアプリケータを備えた大面積マイクロ波プラズマ装置
Document Type and Number:
Japanese Patent JP2001518678
Kind Code:
A
Abstract:
A microwave apparatus for sustaining a substantially uniform plasma over a relatively large area. The microwave apparatus comprises a vacuum vessel for sustaining the plasma in a plasma region thereof. The apparatus further comprises a nonevanescent microwave applicator having means for controlling the cutoff frequency thereof. The microwave applicator may comprise a waveguide and a volume of dielectric material disposed within the waveguide. Alternately, the microwave applicator may comprise ridge waveguide.
Inventors:
Doula, Joachim
Application Number:
JP2000513987A
Publication Date:
October 16, 2001
Filing Date:
September 24, 1998
Export Citation:
Assignee:
Energy Conversion Devices Inc.
International Classes:
C23C16/511; H01J37/32; H01L21/205; H01L21/302; H05H1/46; H01L21/3065; (IPC1-7): H05H1/46; H01L21/3065
Attorney, Agent or Firm:
Hidekazu Miyoshi (1 outside)