Title:
【発明の名称】改良研磨パッド及びこれに関連する方法
Document Type and Number:
Japanese Patent JP2001518852
Kind Code:
A
Inventors:
Roberts John V.H.
James David Bee.
Cook Lee Melbourne
James David Bee.
Cook Lee Melbourne
Application Number:
JP54292998A
Publication Date:
October 16, 2001
Filing Date:
April 03, 1998
Export Citation:
Assignee:
Rodel Holdings, Inc.
International Classes:
B24B37/26; B24D3/26; B24D13/14; H01L21/304; (IPC1-7): B24B37/00; H01L21/304
Attorney, Agent or Firm:
Kazuyoshi Tsujimoto