Title:
【発明の名称】マイクロメカニカル差分圧力センサ装置
Document Type and Number:
Japanese Patent JP2001523814
Kind Code:
A
Abstract:
A micromechanical differential pressure sensor device for measuring a pressure difference between two mutually separated spaces or media, in which two absolute pressure measuring devices are monolithically integrated on a single support substrate, in particular on a semiconductor chip. The absolute pressure measuring devices are preferably fabricated by surface micromachining.
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Inventors:
Wolfgang Werner
Hans-Jerck Teime
Hans-Jerck Teime
Application Number:
JP2000521365A
Publication Date:
November 27, 2001
Filing Date:
November 13, 1998
Export Citation:
Assignee:
Infineon Technologies Actien Gezel Shaft
International Classes:
G01L9/00; G01L9/12; G01L13/00; (IPC1-7): G01L13/00; G01L9/12
Attorney, Agent or Firm:
Toshio Yano (4 outside)