Title:
【発明の名称】ペニング真空計
Document Type and Number:
Japanese Patent JP2001525060
Kind Code:
A
Abstract:
The invention relates to a Penning vacuum meter (1), comprising a cathode and an anode. According to the invention, the cathode (11) consists at least mainly of titanium in order to avoid the detrimental effects of the cathode disintegrating.
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Inventors:
Werner Grouse Bry
Gehrhard Custer
Gehrhard Custer
Application Number:
JP54479698A
Publication Date:
December 04, 2001
Filing Date:
February 27, 1998
Export Citation:
Assignee:
Reibold Verkum Gesell Shaft Mitt Beschlenktel Haftung
International Classes:
G01L21/34; H01J41/04; H01J41/06; (IPC1-7): G01L21/34; H01J41/06
Attorney, Agent or Firm:
Toshio Yano (3 outside)