Document Type and Number:
Japanese Patent JP2002023351
Kind Code:
A5
Application Number:
JP2000203595
Publication Date:
August 16, 2007
Export Citation:
International Classes:
G03F7/004; C03C8/20; C03C8/22; G03F7/027; G03F7/038; H01J9/02; H01J11/02