Document Type and Number:
Japanese Patent JP2002099087
Kind Code:
A5
Application Number:
JP2000290654
Publication Date:
January 12, 2006
Export Citation:
International Classes:
G03F7/039; C08F220/18; C08F222/40; C08F232/00; C08K5/00; C08L45/00; G03F7/004; H01L21/027