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Patent Searching and Data


Document Type and Number:
Japanese Patent JP2002202606
Kind Code:
A5
Application Number:
JP2000402245
Publication Date:
January 12, 2006
Export Citation:
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International Classes:
G03F7/039; C08F220/00; C08F222/00; C08F232/00; C08K5/00; C08L33/00; C08L35/00; C08L45/00; G03F7/004; G03F7/033; H01L21/027