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Patent Searching and Data


Document Type and Number:
Japanese Patent JP2002341539
Kind Code:
A5
Application Number:
JP2001149620
Publication Date:
January 19, 2006
Export Citation:
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International Classes:
G03F7/039; C08F220/10; C08F232/00; C08F234/00; C08K5/16; C08K5/34; C08K5/36; C08L33/04; C08L45/00; G03F7/004; H01L21/027