Title:
【発明の名称】低温エーロゾルの製造および制御による基材の処理
Document Type and Number:
Japanese Patent JP2002504016
Kind Code:
A
Abstract:
A substrate may be treated by impinging the substrate with a cryogenic aerosol spray wherein the cryogenic aerosol spray is formed by expanding a pressurized liquid or liquid/gaseous stream of one or more cryogens through a nozzle at a given distance from the substrate into a process chamber with a pressure of about 1.6x104 Pascal or less so as to form at least substantially solid aerosol particles of said one or more cryogens downstream from the nozzle by the cooling resulting from the expansion and/or evaporation to form an at least substantially solid particle containing aerosol.
Inventors:
Patrin, John, Sea.
Heitzinger, John, M.
Heitzinger, John, M.
Application Number:
JP50325599A
Publication Date:
February 05, 2002
Filing Date:
June 11, 1998
Export Citation:
Assignee:
FSI International Inc.
International Classes:
B08B5/02; B08B3/08; H01L21/304; H01L21/306; F25D3/10; (IPC1-7): B08B5/02; B08B3/08; H01L21/304
Attorney, Agent or Firm:
Nobuo Kaida (1 person outside)