Title:
【発明の名称】クラスタツール
Document Type and Number:
Japanese Patent JP2002508586
Kind Code:
A
Abstract:
A cluster tool for testing substrates and locating defects on the substrates utilizing a plurality of tools coupled via an automation platform. The cluster tool includes an interface receiving storage device(s) having, each, more than one substrate contained therein. An inspection tool capable of inspecting the substrates and delivering defect map indicative of suspected locations on each of the substrates. The automation platform is coupled to the interface to the inspection tool, and to a review tool, and is capable of transferring substrates between the tools.
Inventors:
Girado, armory
Application Number:
JP2000538374A
Publication Date:
March 19, 2002
Filing Date:
March 18, 1999
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/66; H01L21/00; H01L21/677; (IPC1-7): H01L21/66; H01L21/68
Attorney, Agent or Firm:
Yoshiki Hasegawa (1 person outside)