Title:
【発明の名称】第1の測定量の第2の測定量に対する依存性を決定するための方法および装置
Document Type and Number:
Japanese Patent JP2002519706
Kind Code:
A
Abstract:
For determining the dependence of a first measuring quantity (Y) on a second measuring quantity (P) the second measuring quantity (P) is periodically modified with a frequency (f0). The first measuring quantity (Y) changing accordingly is measured. From the obtained measuring signal of the first measuring quantity (Y) the components of the first measuring quantity (Y) are determined with at least a plurality of frequencies. From the components thus determined the first measuring quantity (Y) is reconstructed for at least a plurality of values of the second measuring quantity (P) by signal processing.
Inventors:
Orchelle, Benno
Helm, Yang
Slokka, Bernd
Helm, Yang
Slokka, Bernd
Application Number:
JP2000558402A
Publication Date:
July 02, 2002
Filing Date:
July 02, 1999
Export Citation:
Assignee:
Amekon Gesellschaft Mitt Beschlenktel Haftung
International Classes:
G01R31/26; G01R31/265; H01L21/66; G01B7/34; (IPC1-7): G01B7/34; G01R31/26
Attorney, Agent or Firm:
Fukami Hisaro (5 others)