Title:
【発明の名称】エアロゲルの製造法と装置
Document Type and Number:
Japanese Patent JP2002521302
Kind Code:
A
Abstract:
A method of producing an aerogel layer on a substrate is described. A precursor mixture is provided by mixing at least one material selected from the group consisting of silicates, metal alcolates, aluminates and borates with a solvent. The precursor mixture is used to form a lyosol. The precursor mixture or the lyosol formed therefrom is then applied to the substrate wherein a layer of the lyosol is formed on the substrate. A gel is formed from the lyosol by chemical conversion at a temperature at which the solvent is present in a liquid state. At a pressure between 0.5-2.0 torr the ambient temperature is reduced by about 3-70k below the point at which the solvent is converted into a solid state. The solvent is then converted into a gaseous state in a drying chamber while reducing the pressure of the solvent below the triple point and removing solvent from the gel layer.
Inventors:
Gessner, thomas
Schulz, Stefan, Yi.
Binkler, Tralph
Schulz, Stefan, Yi.
Binkler, Tralph
Application Number:
JP2000562303A
Publication Date:
July 16, 2002
Filing Date:
July 30, 1999
Export Citation:
Assignee:
Gessner, thomas
Schulz, Stefan, Yi.
Binkler, Tralph
Schulz, Stefan, Yi.
Binkler, Tralph
International Classes:
C01B13/32; B01J13/00; C01B33/12; C01B33/158; H01L21/316; (IPC1-7): C01B13/32; B01J13/00; C01B33/12; C01B33/158
Attorney, Agent or Firm:
Toshi Inoguchi