Title:
【発明の名称】標本の表面構造の検査および/または変更の方法
Document Type and Number:
Japanese Patent JP2002529902
Kind Code:
A
Abstract:
In a method of examining the surface structures of a sample or of modifying the surface structures of a sample by means of a beam impinging on the surface structure of the sample, gas is supplied discontinuously, preferably in a pulsed mode, at least in the area of impingement of the beam on the surface structure of the sample.
Inventors:
Brenger Wilhelm
Application Number:
JP2000581672A
Publication Date:
September 10, 2002
Filing Date:
October 25, 1999
Export Citation:
Assignee:
Fraunhofer-Gesellschaft Tool Felderung del Angewanten Forsung Eingetler Genel Fehlein
International Classes:
G01N1/28; H01J37/02; H01J37/20; H01J37/28; G01N23/225; (IPC1-7): H01J37/20; G01N1/28; G01N23/225; H01J37/28
Attorney, Agent or Firm:
Okada