Title:
【発明の名称】脈動のない送出しのための液体送出しシステム
Document Type and Number:
Japanese Patent JP2002532656
Kind Code:
A
Abstract:
A system tot the pulsation-free delivery of liquids, which system may be used for high-purity, liquid chemicals in the semiconductor industry.
Inventors:
Douse Moont, Claus
Fries slah, claus
Yammer, Wilfried
Port, michael
Dicks, Alberto
Tempel, Eberhard
Fries slah, claus
Yammer, Wilfried
Port, michael
Dicks, Alberto
Tempel, Eberhard
Application Number:
JP2000588535A
Publication Date:
October 02, 2002
Filing Date:
December 02, 1999
Export Citation:
Assignee:
Merck Patent Gesellschaft Mitt Beschlenktel Haftung
International Classes:
F04B9/129; F16L55/04; F16L55/05; F04B11/00; F17D1/12; H01L21/02; (IPC1-7): F04B11/00; F17D1/12; H01L21/02
Attorney, Agent or Firm:
Nobuyuki Kaneda (2 others)