Title:
【発明の名称】マイクロレンズ及びマイクロコラムの精密位置合せ及び組立て
Document Type and Number:
Japanese Patent JP2002536801
Kind Code:
A
Abstract:
A method and the associated apparatus for alignment and assembly of microlenses and microcolumns in which aligning structures such as rigid fibers are used to precisely align multiple microlens components. Alignment openings are formed in the microlens components and standard optical fibers are threaded through the openings in each microlens component as they are stacked. The fibers provide sufficient stiffness and stability to the structure to precisely align the apertures of the microlens components and thereby allow for increased assembly efficiency over traditional microlens and microcolumn bonding techniques.
Inventors:
Lee, Kim, Wai.
Kim, hoseo
Richton, Stefan, A.
Chan, Tai Ho, Philip
Kim, hoseo
Richton, Stefan, A.
Chan, Tai Ho, Philip
Application Number:
JP2000597822A
Publication Date:
October 29, 2002
Filing Date:
February 07, 2000
Export Citation:
Assignee:
Etec Systems, Inc.
International Classes:
H01J9/14; H01J9/18; H01J37/04; H01J37/12; (IPC1-7): H01J9/18; H01J9/14; H01J37/04; H01J37/12
Attorney, Agent or Firm:
Yoshiki Hasegawa (1 person outside)