Title:
【発明の名称】ガス状媒体のプラズマアシスト処理
Document Type and Number:
Japanese Patent JP2002538361
Kind Code:
A
Abstract:
A reactor for the plasma-assisted processing of a gaseous medium, including a pair of electrodes having facing surfaces the separation of which is substantially uniform, with a body of dielectric material positioned between them and defining a plurality of gas passages extending through the space between the electrodes.
Inventors:
Inman Michael
Application Number:
JP2000602373A
Publication Date:
November 12, 2002
Filing Date:
February 28, 2000
Export Citation:
Assignee:
Accentus Public Limited Company
International Classes:
B01D53/32; B01D53/92; B01D53/94; B01J12/00; B01J15/00; B01J19/08; B01J19/24; F01N3/01; F01N3/08; F01N3/28; H05H1/24; (IPC1-7): F01N3/08; B01D53/86; B01J19/08; B01J35/04; F01N3/10; F01N3/28
Attorney, Agent or Firm:
Minoru Nakamura (9 outside)