Title:
【発明の名称】走査プローブ顕微鏡チップの使用方法及び該使用方法を実施するための製品又は該使用方法によって製造される製品
Document Type and Number:
Japanese Patent JP2002539955
Kind Code:
A
Abstract:
The invention provides a nanolithographic method, comprising: (i) providing a substrate; (ii) providing a nanoscopic tip coated with a patterning compound; (iii) contacting the coated tip with the substrate so that the patterning compound is applied to the substrate to produce a desired pattern; and (iv) wherein the patterning compound is anchored to the substrate.
Inventors:
Merkin, Chad A.
Pinner, richard
Hong, Senfun
Pinner, richard
Hong, Senfun
Application Number:
JP2000592858A
Publication Date:
November 26, 2002
Filing Date:
January 07, 2000
Export Citation:
Assignee:
NORTHWESTERN UNIVERSITY
International Classes:
B81C1/00; B82B3/00; G01Q70/16; G01Q80/00; G03F7/00; B05D1/00; B05D1/18; B05D1/26; G01Q70/06; G01Q70/14; G03F7/16; (IPC1-7): B81C1/00; B82B3/00; G01N13/16; G12B21/02
Attorney, Agent or Firm:
Hironobu Onda (1 person outside)