Title:
【発明の名称】半導体ウェーハの活性ドーパントのプロファイルを決定するための装置及びその方法
Document Type and Number:
Japanese Patent JP2002540396
Kind Code:
A
Abstract:
A method (1) creates charge carriers in a concentration that changes in a periodic manner (also called "modulation") only with respect to time, and (2) determines the number of charge carriers created in the carrier creation region by measuring an interference signal obtained by interference between a reference beam and a portion of a probe beam that is reflected by charge carriers at various depths of the semiconductor material, and comparing the measurement with corresponding values obtained by simulation (e.g. in graphs of such measurements for different junction depths). Various properties of the reflected portion of the probe beam (such as power and phase) are functions of the depth at which the reflection occurs, and can be measured to determine the depth of the junction, and the profile of active dopants. Therefore, the just-described reflected portion of the probe beam is interfered with a reference beam formed by a portion of probe beam reflected by the front surface of the semiconductor material, and phase and amplitude of the interference signal resulting therefrom are both measured. Alternatively, a phase difference between a first interference signal (obtained by interference of (1) a variable phase beam and (2) the portion of probe beam reflected by the front surface) and a second interference signal (obtained by interference of (1) the variable phase beam and (2) a portion of the probe beam reflected by charge carriers at various depths) indicates the junction depth.
Inventors:
Borden, Peter Gee
Niji Major, Regina Gee
Niji Major, Regina Gee
Application Number:
JP2000606984A
Publication Date:
November 26, 2002
Filing Date:
March 20, 2000
Export Citation:
Assignee:
Boxer Cross Incorporated
International Classes:
G01B11/22; G01N21/17; H01L21/00; H01L21/02; H01L21/66; (IPC1-7): G01B11/22; H01L21/00; H01L21/02; H01L21/66
Domestic Patent References:
| JPS61223543A | 1986-10-04 | |||
| JPS60256031A | 1985-12-17 | |||
| JPH075122A | 1995-01-10 | |||
| JPH0763524A | 1995-03-10 | |||
| JPH05142147A | 1993-06-08 | |||
| JPH0755702A | 1995-03-03 |
Foreign References:
| US5042952A | 1991-08-27 |
Attorney, Agent or Firm:
Youichi Oshima