Title:
【発明の名称】有機材料をレーザー穿孔するための方法及び装置
Document Type and Number:
Japanese Patent JP2003511241
Kind Code:
A
Abstract:
For the laser drilling of organic materials, in particular for making blind holes in dielectric layers, a frequency-doubled Nd-vanadate laser with the following parameters is used:
Inventors:
Hubert de Stour
Marcel Haleman
Joseph Van Pim Break
Marcel Haleman
Joseph Van Pim Break
Application Number:
JP2001528442A
Publication Date:
March 25, 2003
Filing Date:
September 29, 2000
Export Citation:
Assignee:
Siemens Aktiengesellschaft
International Classes:
B23K26/00; B23K26/18; B23K26/402; H01S3/00; H05K3/00; B23K101/42; (IPC1-7): B23K26/00; B23K26/18; H01S3/00
Attorney, Agent or Firm:
Toshio Yano (4 outside)