Title:
【発明の名称】高粘度の流体をポンピングするための装置および方法
Document Type and Number:
Japanese Patent JP2003515699
Kind Code:
A
Abstract:
A system for dispensing and filtering fluid is disclosed, in which the fluid flow path is substantially vertical from the fluid inlet through fluid dispense. Substantially all wetted surfaces are Teflon(R) or some similar non-contaminating fluid, for applications such as cleanroom processes. A valve and a filter chamber are incorporated into a pump head to simplify the flow path and reduce potential contamination points. Preferred methods, and chips or other microelectronic devices fabricated from the apparatus or methods, are also disclosed.
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Inventors:
Gibson, Greg
Application Number:
JP2001542684A
Publication Date:
May 07, 2003
Filing Date:
November 30, 2000
Export Citation:
Assignee:
Microlith Corporation
International Classes:
B67D7/58; B01D35/26; B01J4/02; F04B13/00; F04B23/06; F04B43/02; F04B43/06; F04B43/067; F04B53/14; F04B53/20; (IPC1-7): F04B13/00; B01J4/02; F04B23/06; F04B43/02; F04B53/14
Domestic Patent References:
| JPH02119985U | 1990-09-27 | |||
| JPH09151854A | 1997-06-10 | |||
| JPS5634073U | 1981-04-03 | |||
| JPH03114565A | 1991-05-15 | |||
| JPH0529207A | 1993-02-05 | |||
| JPH10305256A | 1998-11-17 |
Attorney, Agent or Firm:
Youichi Oshima