Title:
【発明の名称】波長切り換え可能なレーザーにもとづいてエッチングした回路ボードの処理システム
Document Type and Number:
Japanese Patent JP2003516625
Kind Code:
A
Abstract:
A wavelength switchable laser (10) of this invention is based on a solid-state laser source (12) in which a fourth harmonic UV laser beam (26) is ordinarily used for processing, and a second harmonic "green" laser beam (28) is dumped and wasted. However, this invention uses the ordinarily wasted green laser beam for processing ECB (30) conductor layers (32, 36), which enhances processing throughout because of the higher power of the green energy than of the UV energy. A Pockel cell (16) effects laser beam polarization switching that causes either the green beam or the UV beam to be directed to the ECB for processing different materials. This invention requires only a single rail laser source and is, therefore, simple, cost effective, efficient, inherently aligned, and has high processing throughput.
Inventors:
Song Yun Long
Edward Svenson
Edward Svenson
Application Number:
JP2001543296A
Publication Date:
May 13, 2003
Filing Date:
December 05, 2000
Export Citation:
Assignee:
Electro Scientific Industries, Inc.
International Classes:
B23K26/06; B23K26/073; B23K26/38; H01S3/00; H01S3/109; H01S3/115; H05K3/00; H05K3/40; B23K26/00; H05K3/46; B23K101/42; (IPC1-7): H05K3/00; B23K26/00; B23K26/06; H01S3/00; H01S3/109; H01S3/115; H05K3/40; H05K3/46
Attorney, Agent or Firm:
Sugimura Kosaku (1 person outside)