Title:
【発明の名称】標的材を処理するエネルギー効率に優れたレーザーベースの方法およびシステム
Document Type and Number:
Japanese Patent JP2003518440
Kind Code:
A
Abstract:
An energy-efficient method and system for processing target material such as microstructures in a microscopic region without causing undesirable changes in electrical and/or physical characteristics of material surrounding the target material is provided. The system includes a controller for generating a processing control signal and a signal generator for generating a modulated drive waveform based on the processing control signal. The waveform has a sub-nanosecond rise time. The system also includes a gain-switched, pulsed semiconductor seed laser for generating a laser pulse train at a repetition rate. The drive waveform pumps the laser so that each pulse of the pulse train has a predetermined shape. Further, the system includes a laser amplifier for optically amplifying the pulse train to obtain an amplified pulse train without significantly changing the predetermined shape of the pulses.
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Inventors:
Smart donald vie
Application Number:
JP2001548238A
Publication Date:
June 10, 2003
Filing Date:
December 19, 2000
Export Citation:
Assignee:
GS Lumonics Incorporated
International Classes:
B23K26/06; B23K26/00; B23K26/064; B23K26/073; B23K26/40; H01L21/302; H01L21/768; H01L23/525; H01S3/00; B23K101/36; (IPC1-7): B23K26/00; H01L21/302; H01S3/00
Domestic Patent References:
| JPH11197863A | 1999-07-27 | |||
| JPH07183606A | 1995-07-21 | |||
| JPH06114582A | 1994-04-26 | |||
| JPH07288353A | 1995-10-31 | |||
| JPH11207479A | 1999-08-03 | |||
| JPH09183128A | 1997-07-15 | |||
| JPH11254171A | 1999-09-21 | |||
| JPH0857678A | 1996-03-05 | |||
| JPH08155506A | 1996-06-18 |
Foreign References:
| WO1999021250A2 | 1999-04-29 |
Attorney, Agent or Firm:
Minoru Nakamura (9 outside)