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Title:
【発明の名称】幾何学的エアリアルイメージシミュレーション
Document Type and Number:
Japanese Patent JP2003520999
Kind Code:
A
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Inventors:
Alesin, Stanislav Buoy
Egorov, Evgeni
Belokopitov, Genazi
Petra Novik, Dusan
Application Number:
JP2001554268A
Publication Date:
July 08, 2003
Filing Date:
January 20, 2000
Export Citation:
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Assignee:
LSI Logic Corporation
International Classes:
G03F1/08; G03F7/20; H01L21/027; (IPC1-7): G03F1/08; H01L21/027
Domestic Patent References:
JPH11327120A1999-11-26
JP2000221659A2000-08-11
JPH0620907A1994-01-28
JP2000003848A2000-01-07
JPH07128138A1995-05-19
JPS6286460A1987-04-20
JPH11344799A1999-12-14
Attorney, Agent or Firm:
Youichi Oshima



 
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